Differential pickup circuit design of a kind of Z-axis MEMS quartz gyroscope

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• 作者：Lihui Feng  ; ;   ; ^{lihui.feng@bit.edu.cn} ; Zhixiong Zhang ; Yunan Sun ; Fang Cui
• 关键词：quartz gyroscope ; coupling error noise ; differential pickup circuit
• 刊名：Procedia Engineering
• 出版年：2011
• 出版时间：2011
• 年：2011
• 卷：15
• 期：Complete
• 页码：999-1003
• 全文大小：433 K

文摘

The?MEMS?quartz?gyroscope is composed by a tuning fork and the detection circuits. The tuning fork's error noise of a?quartz gyroscope will?have significant influence on it's performance. The?mechanical coupling error noise still existed after?design and processed, normally this kind of error noise can be?reduced?by some other methods such as laser trim, but the capacitor coupling error noise can¡¯t be reduced by these methods.?This paper introduces differences between error sources of?a kind of z-axis quartz gyroscope and y-axis quartz gyroscope. The capacitor error noise of z-axis quartz gyroscope is larger than that of y-axis quartz gyroscope. According to characteristics of?z-axis?quartz gyroscope's coupling error noise signal, the?differential and?phase compensation?circuit is designed, which?can effectively remove the?influence of tuning fork's error noise on the z-axis quartz gyroscope's?signal, and can effectively improve the z-axis quartz gyroscope's?performance.