The influence of nitrogen on laser doping from phosphorous doped a-SiNx layers
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- 作者：Bernd Steinhausera ; bernd.steinhauser@ise.fraunhofer.de" class="auth_mail" title="E-mail the corresponding author ; Ulrich Jä ; gera ; ulrich.jaeger@ise.fraunhofer.de" class="auth_mail" title="E-mail the corresponding author ; Jan Benicka ; jan.benick@ise.fraunhofer.de" class="auth_mail" title="E-mail the corresponding author ; Ellen Chongb ; shu-yunn.chong@recgroup.com" class="auth_mail" title="E-mail the corresponding author ; Jenny Lamb ; jenny.lam@recgroup.com" class="auth_mail" title="E-mail the corresponding author ; Rob Steemanb ; 1 ; robert.steeman@gmail.com" class="auth_mail" title="E-mail the corresponding author ; Hannes Rostanb ; hannes.rostan@recgroup.com" class="auth_mail" title="E-mail the corresponding author ; Jan Nekardaa ; jan.nekarda@ise.fraunhofer.de" class="auth_mail" title="E-mail the corresponding author ; Martin Hermlea ; martin.hermle@ise.fraunhofer.de" class="auth_mail" title="E-mail the corresponding author ; Ralf Preua ; ralf.preu@ise.fraunhofer.de" class="auth_mail" title="E-mail the corresponding author ; Stefan W. Glunza ; Stefan.glunz@ise.fraunhofer.de" class="auth_mail" title="E-mail the corresponding author
- 关键词：N-type ; Passivation ; Laser doping
- 刊名：Solar Energy Materials and Solar Cells
- 出版年：2016
- 出版时间：December 2016
- 年：2016
- 卷：157
- 期：Complete
- 页码：295-304
- 全文大小：2914 K
文摘
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Analyzation of the influence of nitrogen on the laser doping process.
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Presentation of a new layer reducing the nitrogen content for enhanced laser doping performance.
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Fabrication of large area n-type solar cells with 20.9% featuring a laser doped LBSF creation on the rear side.
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