Rehabilitation of MgO(001) Substrate Surface for Growth of Single-Crystal LaBaCo2O5+δ Films by Magnetron Sputtering

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• 作者：Q. Y. Zhang ; J. Shaibo ; J. Ju ; M. Liu ; S. Cheng ; Y. J. Ma ; J. Y. Xiao ; X. N. Jiang ; C. Y. Ma
• 刊名：Crystal Growth & Design
• 出版年：2016
• 出版时间：August 3, 2016
• 年：2016
• 卷：16
• 期：8
• 页码：4272-4277
• 全文大小：396K
• 年卷期：0
• ISSN：1528-7505

文摘

Single-crystal films are at the foundation of a number of advanced technologies, such as for devices related to microelectronics, optoelectronics, spintronics, and superconducting electronics. In this study, high-temperature annealing was used to rehabilitate the MgO(001) surface to improve the crystallinity of highly epitaxial LaBaCo₂O_5+δ (LBCO) films, which have demonstrated potential for applications in fast gas sensors. In comparison with the LBCO film grown on the as-received substrate, solid evidence is presented to support that the rehabbed substrates facilitate deposition of single-crystal LBCO films by radio frequency magnetron sputtering at the optimized conditions. Thus, substrate annealing is demonstrated to be a practical and effective method for rehabbing the damaged surface of a substrate induced by manufacture and surface milling and is promising for a range of important applications based on the growth of single-crystal films.