Graphene as a Massless Electrode for Ultrahigh-Frequency Piezoelectric Nanoelectromechanical Systems

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• 作者：Zhenyun Qian ; Fangze Liu ; Yu Hui ; Swastik Kar ; Matteo Rinaldi
• 刊名：Nano Letters
• 出版年：2015
• 出版时间：July 8, 2015
• 年：2015
• 卷：15
• 期：7
• 页码：4599-4604
• 全文大小：346K
• ISSN：1530-6992

文摘

Designing 鈥渋deal electrodes鈥?that simultaneously guarantee low mechanical damping and electrical loss as well as high electromechanical coupling in ultralow-volume piezoelectric nanomechanical structures can be considered to be a key challenge in the NEMS field. We show that mechanically transferred graphene, floating at van der Waals proximity, closely mimics 鈥渋deal electrodes鈥?for ultrahigh frequency (0.2 GHz < f₀ < 2.6 GHz) piezoelectric nanoelectromechanical resonators with negligible mechanical mass and interfacial strain and perfect radio frequency electric field confinement. These unique attributes enable graphene-electrode-based piezoelectric nanoelectromechanical resonators to operate at their theoretically 鈥渦nloaded鈥?frequency-limits with significantly improved electromechanical performance compared to metal-electrode counterparts, despite their reduced volumes. This represents a spectacular trend inversion in the scaling of piezoelectric electromechanical resonators, opening up new possibilities for the implementation of nanoelectromechanical systems with unprecedented performance.