Microscale Fracture Behavior of Single Crystal Silicon Beams at Elevated Temperatures
详细信息 查看全文
- 作者：Balila Nagamani Jaya ; Jeffrey M. Wheeler ; Juri Wehrs ; James P. Best ; Rafael Soler ; Johann Michler ; Christoph Kirchlechner ; Gerhard Dehm
- 刊名：Nano Letters
- 出版年：2016
- 出版时间：December 14, 2016
- 年：2016
- 卷：16
- 期：12
- 页码：7597-7603
- 全文大小：369K
- ISSN：1530-6992
文摘
The micromechanical fracture behavior of Si [100] was investigated as a function of temperature in the scanning electron microscope with a nanoindenter. A gradual increase in KC was observed with temperature, in contrast to sharp transitions reported earlier for macro-Si. A transition in cracking mechanism via crack branching occurs at ∼300 °C accompanied by multiple load drops. This reveals that onset of small-scale plasticity plays an important role in the brittle-to-ductile transition of miniaturized Si.