Direct and Scalable Deposition of Atomically Thin Low-Noise MoS2 Membranes on Apertures

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• 作者：Pradeep Waduge ; Ismail Bilgin ; Joseph Larkin ; Robert Y. Henley ; Kenneth Goodfellow ; Adam C. Graham ; David C. Bell ; Nick Vamivakas ; Swastik Kar ; Meni Wanunu
• 刊名：ACS Nano
• 出版年：2015
• 出版时间：July 28, 2015
• 年：2015
• 卷：9
• 期：7
• 页码：7352-7359
• 全文大小：608K
• ISSN：1936-086X

文摘

Molybdenum disulfide (MoS₂) flakes can grow beyond the edge of an underlying substrate into a planar freestanding crystal. When the substrate edge is in the form of an aperture, reagent-limited nucleation followed by edge growth facilitate direct and selective growth of freestanding MoS₂ membranes. We have found conditions under which MoS₂ grows preferentially across micrometer-scale prefabricated solid-state apertures in silicon nitride membranes, resulting in sealed membranes that are one to a few atomic layers thick. We have investigated the structure and purity of our membranes by a combination of atomic-resolution transmission electron microscopy, elemental analysis, Raman spectroscopy, photoluminescence spectroscopy, and low-noise ion-current recordings through nanopores fabricated in such membranes. Finally, we demonstrate the utility of fabricated ultrathin nanopores in such membranes for single-stranded DNA translocation detection.