Single-Step Deposition of Cerium-Substituted Yttrium Iron Garnet for Monolithic On-Chip Optical Isolation

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• 作者：Xue Yin Sun ; Qingyang Du ; Taichi Goto ; Mehmet C. Onbasli ; Dong Hun Kim ; Nicolas M. Aimon ; Juejun Hu ; Caroline A. Ross
• 刊名：ACS Photonics
• 出版年：2015
• 出版时间：July 15, 2015
• 年：2015
• 卷：2
• 期：7
• 页码：856-863
• 全文大小：758K
• ISSN：2330-4022

文摘

Photonic integrated circuits require magneto-optical (MO) materials for making nonreciprocal devices such as isolators and circulators. The most successful MO materials are rare-earth-substituted iron garnets, but these can be challenging to grow on silicon without a seed layer, which introduces spacing loss between the waveguide and the MO cladding. A pulsed-laser deposition (PLD) method is used for making MO Ce:YIG (Ce<sub>1sub>Y<sub>2sub>Fe<sub>5sub>O<sub>12sub>)/YIG (Y<sub>3sub>Fe<sub>5sub>O<sub>12sub>) bilayer or trilayer films on different substrates, including silicon, quartz, and Gd<sub>3sub>Ga<sub>5sub>O<sub>12sub> (GGG), in which a multilayer film is deposited in one run and then annealed. A YIG seed layer grown above the MO Ce:YIG facilitates recrystallization during ex situ rapid thermal annealing, which results in a reduced thermal budget and simplified deposition process. A monolithically integrated optical isolator was demonstrated by direct deposition of a bilayer Ce:YIG/YIG capping layer onto a silicon-on-insulator resonator. The device exhibited an insertion loss of 7.4 卤 1.8 dB and an isolation ratio of 13.0 卤 2.2 dB within the telecommunication window (位 = 1564.4 nm), which outperforms previously reported monolithic isolators.