Chemical Solution Deposition of Epitaxial Carbide Films

详细信息    查看全文

• 作者：Guifu Zou ; Haiyan Wang ; Nathan Mara ; Hongmei Luo ; Nan Li ; Zengfeng Di ; Eve Bauer ; Yongqiang Wang ; Thomas McCleskey ; Anthony Burrell ; Xinghang Zhang ; Michael Nastasi ; Quanxi Jia
• 刊名：Journal of the American Chemical Society
• 出版年：2010
• 出版时间：March 3, 2010
• 年：2010
• 卷：132
• 期：8
• 页码：2516-2517
• 全文大小：157K
• 年卷期：v.132,no.8(March 3, 2010)
• ISSN：1520-5126

文摘

Carbide films exhibit many unique properties. The development of a versatile and simple technique for the deposition of carbide films will enable a wide range of technological applications. Here we report a cost-effective chemical solution deposition or polymer-assisted deposition method for growing epitaxial carbide (including TiC, VC, and TaC) films. These epitaxial carbide films exhibit structural and physical properties similar to the films grown by vapor deposition methods.