Nanoforce estimation based on Kalman filtering and applied to a force sensor using diamagnetic levitation

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• 作者：Emmanuel Piat^a ; ^{emmanuel.piat@ens2m.fr} ; Joë ; l Abadie^a ; ^{jabadie@femto-st.fr} ; Sté ; phane Oster^a ; ^b ; ^{contact@stilsa.com}
• 关键词：Micro and nano force sensor ; Magnetic spring ; Kalman filtering ; Unknown input estimation
• 刊名：Sensors and Actuators A ; Physical
• 出版年：2012
• 期刊代码：160_09244247
• 类别：et
• 出版时间：June, 2012
• 卷：179
• 期：Complete
• 页码：223-236
• 文件大小：2262 K

摘要

Nanoforce sensors based on passive diamagnetic levitation with a macroscopic seismic mass are a possible alternative to classical Atomic Force Microscopes when the force bandwidth to be measured is limited to a few Hertz. When an external unknown force is applied to the levitating seismic mass, this one acts as a transducer that converts this unknown input into a displacement that is the measured output signal. Because the under-damped and long transient response of this kind of macroscopic transducer cannot be neglected for time-varying force measurement, it is then necessary to deconvolve the output to correctly estimate the unknown input force. The deconvolution approach proposed in this paper is based on a Kalman filter that use an uncertain a priori model to represent the unknown nanoforce to be estimated. The main advantage of this approach is that the end-user can directly control the unavoidable trade-off that exists between the wished resolution on the estimated force and the response time of the estimation.