Response behavior of a palladium nanoparticle array based hydrogen sensor in hydrogen-nitrogen mixture

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• 作者：Bo Xie  ; [Author Vitae] ; SiShi Zhang  ; [Author Vitae] ; Fei Liu  ; [Author Vitae] ; Xing Peng  ; [Author Vitae] ; Fengqi Song  ; [Author Vitae] ; Guanghou Wang  ; [Author Vitae] ; Min Han ; ^{sjhanmin@nju.edu.cn}  ; [Author Vitae]
• 关键词：Hydrogen sensor ; Palladium nanoparticle arrays ; Closely spaced ; Quantum conductance ; 伪-to-尾 phase transition
• 刊名：Sensors and Actuators A ; Physical
• 出版年：2012
• 期刊代码：160_09244247
• 类别：et
• 出版时间：July, 2012
• 卷：181
• 期：Complete
• 页码：20-24
• 文件大小：871 K

摘要

Closely spaced palladium nanoparticle arrays were fabricated in between a pair of interdigital electrodes by means of gas phase cluster beam deposition with controlled coverage. The quantum conductance change induced by hydrogen absorption was used for hydrogen sensing. The hydrogen response behavior of a sensor chip was investigated in N₂ + H₂ mixture gas. The sensor could be calibrated with three linear response hydrogen concentration regimes. A sub-second fast response was shown at 2.2%H₂ concentration. The influence of the temperature variation to the quantitative hydrogen concentration measurement with this sensor was discussed.