Investigation of TiO2 thick film capacitors for use as strain gauge sensors
- 作者：A. Arshak ; K. Arshak ; D. Morris ; O. Korostynska and E. Jafer
- 刊名：Sensors and Actuators A ; Physical
- 出版年：2005
- 期刊代码：160_09244247
- 类别：et
- 出版时间：2005
- 卷：122
- 期：2
- 页码：242-249
- 文件大小：381 K
摘要
In this work the strain sensing properties of interdigitated and sandwich thick film capacitors, using titanium dioxide as the dielectric, are investigated. By pre-firing the TiO2 powder and forming a polymer thick film paste the use of expensive paste ingredients, such as ruthenium or palladium oxide, was avoided. After firing, XRD was used to verify the composition and crystallite size of the TiO2 powder, while SEM allowed the particle sizes of the powder to be examined. It was found that the powder has a crystallite and particle size, which is less than 1 μm. Following this, the sensors were fabricated by screen-printing onto glass substrates and placed in a cantilever beam arrangement so that the change in their capacitance with strain could be measured. The gauge factor, which demonstrates the devices sensitivity, was found by dividing the fractional change in capacitance by the applied strain. A gauge factor of 5 and 30 was recorded for interdigitated and sandwich capacitors, respectively. In the case of sandwich capacitors, this gauge factor is higher than normally achieved using oxide films (3–15). Furthermore, the sensors showed a high degree of linearity with low hysteresis. The TCC has been measured for temperatures ranging from 25 to 70 °C so that the effect of temperature on the devices is known. Values, typical of thick film capacitors (876–2834 ppm/°C) have been recorded for temperatures up to 60 °C. Finally, ac electrical measurements have been used to shown that tunnelling is the dominant conduction mechanism within the TiO2 film.