Synthesis and mechanical properties of quaternary Ti-Cr-Si-N nanocomposite coatings deposited by closed field unbalanced middle frequency magnetron sputtering

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• 作者：C.W. Zou^a ; ^{Changweizou@hotmail.com} ; J. Zhang^a ; W. Xie^a ; L.X. Shao^a ; ; D. Li^a ; D.J. Fu^b
• 关键词：Ti&ndash ; Cr&ndash ; Si&ndash ; N nanocomposite coatings ; Microstructure ; Hardness ; Magnetron sputtering
• 刊名：Journal of Alloys and Compounds
• 出版年：2012
• 期刊代码：45_09258388
• 类别：ms
• 出版时间：15 July, 2012
• 卷：529
• 期：Complete
• 页码：52-57
• 文件大小：847 K

摘要

Ti-Cr-Si-N coatings were synthesized onto WC and Si (1 1 1) substrates using a closed field unbalanced middle frequency magnetron sputtering method. In this study, comparative studies on microstructure and evaluation of mechanical properties of Ti-Cr-Si-N coatings with various Si contents were conducted. The microstructure of Ti-Cr-Si-N nanocomposite coatings are consisted of nanocrystalline TiN and amorphous Si₃N₄ or TiSi₂ (nc-TiN/a-Si₃N₄ or a-TiSi₂). As the Si contents in the coatings increased, the Ti-Cr-Si-N coatings showed largely increased hardness value of approximately 36.8 GPa at Si contents of 7 at.%, however, when the Si contents was further increased, the hardness of the coatings decreased. The average friction coefficient of Ti-Cr-Si-N coatings largely decreased from 0.84 to 0.43 with increasing Si contents to 9 at.%. This result would be caused by the tribochemical reaction, which often takes place in many ceramics, e.g. Si₃N₄ reacts with H₂O to produce SiO₂ or Si(OH)₂ tribo-layer as a self-lubricant.