Makyoh-topography study of grooves scratched and etched in single-crystal semiconductors
- 作者：Riesz ; Ferenc
- 关键词：Makyoh topography ; Surface morphology ; Surface scratch ; 68.35.Bs ; 81.70.Fy ; 07.60.Yi
- 刊名：Materials Letters
- 出版年：2000
- 期刊代码：59_0167577x
- 类别：ms
- 出版时间：December, 2000
- 卷：46
- 期：5
- 页码：291-295
- 文件大小：769 K
摘要
A Makyoh-topography study of grooves scribed and etched in semiconductor wafers is presented. It is shown that scribing induces singular deformation of the wafer; the Makyoh image results in as an overlap or shifting aside of the images of the surface areas separated by the scratch. Etching does not induce any stress; the Makyoh image is a diffraction pattern of the etched groove. Possibilities of the use of Makyoh for detecting scratches in mirror-like surfaces are discussed.