Fabrication process of intrinsic Josephson junction stacks in Bi₂Sr₂CaCu₂O_8+x crystals by double-sided patterning process using dilute hydrochloric acid

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• 作者：Takahiro Kato^a ; ^{kato@vos.nagaokaut.ac.jp} ; Hiroki Ishida^b ; Hisayuki Suematsu^a ; Kanji Yasui^a ; Katsuyoshi Hamasaki^a
• 关键词：Bi-2212 ; Intrinsic Josephson junction ; Internal stack structure ; Dilute acid solution ; Double-sided patterning process
• 刊名：Cryogenics
• 出版年：2012
• 期刊代码：45_00112275
• 类别：et
• 出版时间：July-September, 2012
• 卷：52
• 期：7-9
• 页码：398-402
• 文件大小：863 K

摘要

We have developed a new double-sided patterning (DSP) process that employs dilute acid (pH = 1.65) to fabricate Bi₂Sr₂CaCu₂O_8+x (Bi-2212) stacks of intrinsic Josephson junctions. These stacks, which were fabricated from a single crystal of Bi-2212, were surrounded by an acid-treated product. The critical aspect of this process is that the Bi-2212 surrounding the photoresist pattern was converted into a transparent material, BiOCl, which was connected with the Bi-2212 crystal. Consequently, this process provides a simple way to achieve DSP of the surfaces of Bi-2212 crystals. This new DSP process realizes a remarkably improved reproducibility in fabricating Bi-2212 stacks that exhibit good current-voltage characteristics with a large hysteresis and multiple branches at T = 77 K.