ZnO nanowire arrays and ZnO nanoparticles electrodes have been successfully fabricated at lower temperature than traditional methods on ITO/PEN flexible substrates. Different temperatures to deposit ZnO seed layers for ZnO nanowire arrays and different compositions of the ZnO nanoparticles paste slurries have been carried out, in order to study the influences of the lower temperature treatment on the performances of the flexible dye-sensitized solar cells based on the two types of electrodes respectively. The optimum processes to fabricate the ZnO nanowire and nanoparticles electrodes on the ITO/PEN flexible substrates have been proposed and confirmed.