摘要
Electron stimulated oxidation of CaF2 in transmission electron microscope has been thoroughly studied using various electron microscopy techniques, including imaging, electron diffraction and electron energy-loss spectroscopy. It found that the electron irradiation induced CaO locate on the edge of specimen. The oxidation process is associated with desorption of F by electron irradiation, and originates from O impurities in the specimen. Driven by electric field produced by electron irradiation, the O ions inside bulk diffuse to the edge region, occupying the interstitials of metallized Ca lattice. Therefore, the accumulation of O along the edge of specimen results in forming CaO.