Structural and optical properties of nanostructured TiO₂ thin films fabricated by glancing angle deposition

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• 作者：Sumei Wang ; Guodong Xia ; Hongbo He ; Kui Yi ; Ji ; a Shao ; Zhengxiu Fan
• 关键词：Thin films ; Vapor deposition ; Microstructure ; Optical properties ; Scanning electron microscopy
• 刊名：Journal of Alloys and Compounds
• 出版年：2007
• 期刊代码：45_09258388
• 类别：ms
• 出版时间：4 April 2007
• 卷：431
• 期：1-2
• 页码：287-291
• 文件大小：880 K

摘要

TiO₂ films deposited by electron beam evaporation with glancing angle deposition (GLAD) technique were reported. The influence of flux angle on the surface morphology and the microstructure was investigated by scanning electron microscopy. The GLAD TiO₂ films are anisotropy with highly orientated nanostructure of the slanted columns. With the increase of flux angle, refractive index and packing density decrease. This is caused by the shadowing effect dominating film growth. The anisotropic structure of TiO₂ films results in optical birefringence, which reaches its maximum at the flux angle α = 65°. The maximum birefringence of GLAD TiO₂ films is higher than that of common bulk materials. It is suggested that glancing angle deposition may offer an effective method to obtain tailorable refractive index and birefringence in a large continuous range.