Sn electrodeposition process for fabricating microabsorber arrays for an X-ray microcalorimeter
- 作者：Homma ; Takayuki ; Sato ; Hirotaka ; Kobayashi ; Hideomi ; Arakawa ; Takahiro ; Kudo ; Hiroyuki ; Osaka ; Testuya ; et. al.
- 关键词：Electrodeposition ; Pattern formation ; Surfactant ; X-ray microcalorimeter ; Microfabrication ; Three-dimensional microstructure
- 刊名：Journal of Electroanalytical Chemistry
- 出版年：2003
- 期刊代码：27_00220728
- 类别：ph
- 出版时间：November 15, 2003
- 卷：559
- 期：Complete
- 页码：143-148
- 文件大小：389 K
摘要
Sn electrodeposition was employed for fabricating an array of microabsorbers with a ‘mushroom-shaped’ microstructure for a precision X-ray microdetector, the so called X-ray microcalorimeter. A deposition process for flat and smooth Sn films, which was suitable for the use of the absorber material, was developed by optimizing the conditions of additives such as o-cresol-4-sulfonic acid and polyethyleneglycol (PEG) to the Sn bath. The Sn films exhibited suitable properties, i.e. a higher superconducting transition temperature than the operating temperature of the X-ray microcalorimeter. The mushroom-shaped absorber array was successfully fabricated by Sn electrodeposition in combination with a photolithographic technique.