Development of a SnO<sub>2sub>/CuO-coated surface acoustic wave-based H<sub>2sub>S sensor with switch-like response and recovery
- 作者：Xiudong Wang <sup>wang_xiu_dong@hotmail.comsup> ; [Author Vitae] ; Wen Wang<sup> ; sup><sup>wangwenwq@mail.ioa.ac.cnsup> ; [Author Vitae] ; Honglang Li ; [Author Vitae] ; Chen Fu ; [Author Vitae] ; Yabing Ke ; [Author Vitae] ; Shitang He ; [Author Vitae]
- 关键词：H2S ; Response ; Recovery ; SAW gas sensor ; SnO2/CuO ; Sensitivity
- 刊名：Sensors and Actuators B ; Chemical
- 出版年：2012
- 期刊代码：161_09254005
- 类别：et
- 出版时间：5 July, 2012
- 卷：169
- 期：Complete
- 页码：10-16
- 文件大小：1120 K
摘要
A new surface acoustic wave (SAW) sensor with switch-like response and recovery was developed for H<sub>2sub>S gas sensing, in which, as a sensitive interface material toward H<sub>2sub>S, a SnO<sub>2sub>/CuO composite film was deposited onto a 147 MHz SAW delay line on 36掳 YXLiTaO<sub>3sub> substrate by the RF magnetron sputtering technique, and annealed at 450 掳C for 2.5 h in the dry air. The adsorption of H<sub>2sub>S by the sensitive coating modulates the phase velocity of the acoustic wave due to the mass loading and acoustoelectric effect, thus, the target specific H<sub>2sub>S gas can be evaluated by recording the frequency shift of the SAW device. The temperature effect on sensor response characteristics was investigated in temperature range of 70-205 掳C, and the optimal working temperature of 160 掳C was extracted experimentally, at which, fast response time (55 s) and recovery time (45 s), and larger frequency response of 230 kHz were observed from the fabricated SAW sensor toward H<sub>2sub>S with concentration of 20 ppm. Moreover, high sensitivity of 16.9 kHz ppm<sup>鈭?sup>, excellent selectivity, and superior repeatability were observed.