摘要
ZnO:Ga(GZO) thin films were grown on quartz glass under different oxygen partial pressures (PO2). The intensity and the profile of green emission spectra were strongly influenced by PO2. The PL spectra of samples revealed green emissions were relating to transitions between the neutral Ga substitution donor (GaZn) and oxygen interstitial acceptor (Oi). Multi-Gaussian fitting showed green emissions consisted of two adjacent bands located at 2.50聽eV and 2.65聽eV, which corresponded to and transitions, respectively. Concentrations of and were increased with the increasing PO2 is the reason why green emissions were influenced by PO2.