微波等离子体激发用大功率微波模式转换器
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摘要
设计了大功率微波模式转换器,并采用两种工艺加工,分别利用低功率冷测和大功率热测实验对比了其性能。结果表明,导电氧化的加工件性能要明显优于老化件,其低功率冷测传输效率可达99.9%,返回损耗降低至-29.12 dB,大功率热测实验表明,采用导电氧化工艺的模式转换器镀膜质量要整体优于老化件的镀膜质量。
A high-power microwave mode converter is designed and fabricated by two processes. The performance of the converter is compared at low-power cold measurement and high-power thermal measurement. The results show that the performance of the workpiece processed by conductive oxidation is obviously better than that of the aging workpiece. The transmission efficiency of low power cold measurement can reach 99.9%,and the return loss can be reduced to -29.12 dB. The high power thermal measurement experiment shows that the coating quality of the mode converter with conductive oxidation process is better than that of the aging workpiece as a whole.
A high-power microwave mode converter is designed and fabricated by two processes. The performance of the converter is compared at low-power cold measurement and high-power thermal measurement. The results show that the performance of the workpiece processed by conductive oxidation is obviously better than that of the aging workpiece. The transmission efficiency of low power cold measurement can reach 99.9%,and the return loss can be reduced to -29.12 dB. The high power thermal measurement experiment shows that the coating quality of the mode converter with conductive oxidation process is better than that of the aging workpiece as a whole.
引文
[1]吕庆敖,邬钦崇.微波等离子体CVD装置中的微波模式转换器的模式研究[J].真空电子技术,1997,14(5):12-15.
[2] CHEN Longwei,MENG Yuedong,ZUO Xiao,et al. On the Characteristics of Coaxial-Type Microwave Excited Linear Plasma:a Simple Numerical Analysis[J]. Plasma Sci. Technol,2015,17(5):372-383.
[3] Hao Sun,Hai-Feng Zhang,Zhong-Ping Zhang,et al. Experimenton diffuse reflection laser ranging to space debris and data analysis[J]. Astron. Astrophys,2015,15(6):909-917.
[4] T. V. Choudhary,C. Sivadinarayana,D.W. Goodman.Catalytic ammonia decomposition:COx-free hydrogen production for fuel cell applications[J]. Catal. Lett,2001,(72):197-201.
[5] X.-K. Li,W.-J. Ji,J. Zhao,et al. Ammonia decomposition over Ruand Ni catalysts supported on fumed Si O2MCM-41,and SBA-15[J]. J. Catal,2005(236):181-189.
[6] M. Reli,N. Ambrozova,M. Sihor,et al. Novel cerium doped titania catalysts for photocatalytic decomposition of ammonia[J]. Appl. Catal. B:Environ,2015,(178):108-116.
[7] F. Schüth,R. Palkovits,R. Schl觟gl,et al. Ammonia as a possible element in an energy infrastructure:catalysts for ammonia decomposition[J]. Energy Environ. Sci,2012,(5):6278-6289.
[8] M. R. Rahimpour,H. R. Mottaghi,M.M. Barmaki. Hydrogen production from urea wastewater using a combination of urea thermal hydrolyser-desorber loop and a hydrogen-permselective membrane reactor[J]. Fuel Process.Technol,2010,(91):600-612.
[9] M.R. Rahimpour,M.M. Barmaki,H.R. Mottaghi. A comparative study for simultaneous removal of urea,ammonia and carbon dioxide from industrial wastewater using a thermal hydrolyser[J]. Chem. Eng. J.,2010(164):155-167.
[10] C.-M. Hung. Decomposition kinetics of ammonia in gaseous stream by a nanoscale copper-cerium bimetallic catalyst[J]. J. Hazard. Mater,2008,(150):53-61.
[2] CHEN Longwei,MENG Yuedong,ZUO Xiao,et al. On the Characteristics of Coaxial-Type Microwave Excited Linear Plasma:a Simple Numerical Analysis[J]. Plasma Sci. Technol,2015,17(5):372-383.
[3] Hao Sun,Hai-Feng Zhang,Zhong-Ping Zhang,et al. Experimenton diffuse reflection laser ranging to space debris and data analysis[J]. Astron. Astrophys,2015,15(6):909-917.
[4] T. V. Choudhary,C. Sivadinarayana,D.W. Goodman.Catalytic ammonia decomposition:COx-free hydrogen production for fuel cell applications[J]. Catal. Lett,2001,(72):197-201.
[5] X.-K. Li,W.-J. Ji,J. Zhao,et al. Ammonia decomposition over Ruand Ni catalysts supported on fumed Si O2MCM-41,and SBA-15[J]. J. Catal,2005(236):181-189.
[6] M. Reli,N. Ambrozova,M. Sihor,et al. Novel cerium doped titania catalysts for photocatalytic decomposition of ammonia[J]. Appl. Catal. B:Environ,2015,(178):108-116.
[7] F. Schüth,R. Palkovits,R. Schl觟gl,et al. Ammonia as a possible element in an energy infrastructure:catalysts for ammonia decomposition[J]. Energy Environ. Sci,2012,(5):6278-6289.
[8] M. R. Rahimpour,H. R. Mottaghi,M.M. Barmaki. Hydrogen production from urea wastewater using a combination of urea thermal hydrolyser-desorber loop and a hydrogen-permselective membrane reactor[J]. Fuel Process.Technol,2010,(91):600-612.
[9] M.R. Rahimpour,M.M. Barmaki,H.R. Mottaghi. A comparative study for simultaneous removal of urea,ammonia and carbon dioxide from industrial wastewater using a thermal hydrolyser[J]. Chem. Eng. J.,2010(164):155-167.
[10] C.-M. Hung. Decomposition kinetics of ammonia in gaseous stream by a nanoscale copper-cerium bimetallic catalyst[J]. J. Hazard. Mater,2008,(150):53-61.