基于不等占空比二元光栅的相位测量轮廓术
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摘要
提出了一种基于不等占空比二元光栅的相位测量轮廓术(PMP)。所用的光栅只有0和255两个灰度,消除了投影仪的伽玛非线性对正弦光栅灰度的影响,同时可将投影系统的刷新频率提高一个数量级。所提方法的测量精度高于罗奇光栅离焦投影傅里叶变换轮廓术的,重复精度高于传统正弦光栅PMP。
The phase measurement profilometry(PMP)based on binary gratings with an unequal duty cycle is proposed.The adopted binary gratings have only two grayscales of 0 and 255,and the effect of the gamma nonlinearity on the grayscale of the sinusoidal grating is eliminated.At the same time,the refresh frequency of the projection system can be increased by an order of magnitude.The measurement accuracy of this proposed method is higher than that of the Roach grating defocus projection Fourier transform profilometry and the repeat accuracy is higher than that of the traditional PMP based on sinusoidal gratings.
The phase measurement profilometry(PMP)based on binary gratings with an unequal duty cycle is proposed.The adopted binary gratings have only two grayscales of 0 and 255,and the effect of the gamma nonlinearity on the grayscale of the sinusoidal grating is eliminated.At the same time,the refresh frequency of the projection system can be increased by an order of magnitude.The measurement accuracy of this proposed method is higher than that of the Roach grating defocus projection Fourier transform profilometry and the repeat accuracy is higher than that of the traditional PMP based on sinusoidal gratings.
引文
[1]Xu X F,Cao Y P,Peng K,et al.On-line threedimensional measurement based on phase prediction[J].Acta Optica Sinica,2016,36(6):0612005.许幸芬,曹益平,彭旷,等.基于相位预测的在线三维测量像素匹配方法[J].光学学报,2016,36(6):0612005.
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[3]Chen L C,Chang Y W.High accuracy confocal fullfield 3-D surface profilometry for micro lenses using a digital fringe projection strategy[J].Key Engineering Materials,2008,364/365/366:113-116.
[4]Zhang S,Yau S T.High-resolution,real-time 3Dabsolute coordinate measurement based on a phaseshifting method[J].Optics Express,2006,14(7):2644-2649.
[5]Gorpas D,Politopoulos K,Yova D.A binocular machine vision system for three-dimensional surface measurement of small objects[J].Computerized Medical Imaging and Graphics,2007,31(8):625-637.
[6]Peng K,Cao Y P,Wu Y C,et al.On-line threedimensional measurement method based on low modulation feature[J].Chinese Journal of Lasers,2013,40(7):0708006.彭旷,曹益平,武迎春,等.基于低调制度特征的在线三维测量方法[J].中国激光,2013,40(7):0708006.
[7]Saxena M,Eluru G,Gorthi S S.Structured illumination microscopy[J].Advances in Optics and Photonics,2015,7(2):241-275.
[8]Gong Y,Zhang S.Ultrafast 3-D shape measurement with an off-the-shelf DLP projector[J].Optics Express,2010,18(19):19743-19754.
[9]Su X Y,Zhou W S.Phase-measuring profilometry using defocused projection of the Ronchi grating[J].Opto-Electronic Engineering,1993,20(4):8-16.苏显渝,周文胜.采用罗奇光栅离焦投影的位相测量轮廓术[J].光电工程,1993,20(4):8-16.
[10]Tian Z X,Chen W J,Su X Y.Method for improving accuracy and measurement speed of PMP using error diffusion binary encoded sinusoidal grating[J].Laser&Optoelectronics Progress,2014,51(12):121201.田紫霞,陈文静,苏显渝.采用二元编码的正弦光栅提高PMP测量速度和精度的方法[J].激光与光电子学进展,2014,51(12):121201.
[11]Li Y,Cao Y P,Huang Z F,et al.A three dimensional on-line measurement method based on five unequal steps phase shifting[J].Optics Communications,2012,285(21/22):4285-4289.
[12]Sun S J,Zhai A P,Cao Y P.A fast algorithm for obtaining 3D shape and texture information of objects[J].Acta Optica Sinica,2016,36(3):0312001.孙士杰,翟爱平,曹益平.一种快速获取物体三维形貌和纹理信息的算法[J].光学学报,2016,36(3):0312001.
[13]Liu H C,Halioua M,Srinivasan V.Automated phase-measuring profilometry of 3-D diffuse objects[J].Applied Optics,1984,23(18):3105.
[14]Judge T R,Bryanston-Cross P J.A review of phase unwrapping techniques in fringe analysis[J].Optics and Lasers in Engineering,1994,21(4):199-239.
[15]Su X Y.Phase unwrapping techniques for 3Dshape measurement[J].Proceedings of SPIE,1996,2886:460-465.
[16]Zhang H Q,Guo R H,Jiang C,et al.Improved path-independent phase unwrapping algorithm based on total-variation minimum denoising[J].Laser&Optoelectronics Progress,2016,53(12):121202.张辉钦,郭仁慧,蒋超,等.改进的基于全变分最小去噪的路径无关相位解包算法[J].激光与光电子学进展,2016,53(12):121202.
[17]Zhao W C,Lu Y G,Zhang T.Phase gradient correlation based quality map for two dimensional phase unwrapping[J].Acta Optica Sinica,2009,29(s2):149-154.赵万成,路元刚,张婷.用于二维相位展开的相位梯度相关质量图[J].光学学报,2009,29(s2):149-154.
[18]Li W S,Su L K,Su X Y.Phase-measuring profilometry in big scale measurement[J].Acta Optica Sinica,2000,20(6):792-796.李万松,苏礼坤,苏显渝.相位检测面形术在大尺度三维面形测量中的应用[J].光学学报,2000,20(6):792-796.
[19]Zhou W S,Su X Y.A direct mapping algorithm for phase-measuring profilometry[J].Optica Acta International of Optics,1994,41(1):89-94.
[20]Zhang S.High-resolution 3D profilometry with binary phase-shifting methods[J].Applied Optics,2011,50(12):1753-1757.
[21]Ayubi G A,Ayubi J A,Di M J,et al.Pulse-width modulation in defocused three-dimensional fringe projection[J].Optics Letters,2010,35(21):3682-3684.
[22]Zhao L W,Da F P,Zheng D L.Method for binary grating generation using defocused projection for three-dimensional measurement[J].Acta Optica Sinica,2016,36(8):0812005.赵立伟,达飞鹏,郑东亮.离焦投影三维测量的二值光栅生成方法[J].光学学报,2016,36(8):0812005.
[2]Zhang E,Laufer J,Beard P.Backward-mode multiwavelength photoacoustic scanner using aplanar Fabry-Perot polymer film ultrasound sensor for highresolution three-dimensional imaging of biological tissues[J].Applied Optics,2008,47(4):561-577.
[3]Chen L C,Chang Y W.High accuracy confocal fullfield 3-D surface profilometry for micro lenses using a digital fringe projection strategy[J].Key Engineering Materials,2008,364/365/366:113-116.
[4]Zhang S,Yau S T.High-resolution,real-time 3Dabsolute coordinate measurement based on a phaseshifting method[J].Optics Express,2006,14(7):2644-2649.
[5]Gorpas D,Politopoulos K,Yova D.A binocular machine vision system for three-dimensional surface measurement of small objects[J].Computerized Medical Imaging and Graphics,2007,31(8):625-637.
[6]Peng K,Cao Y P,Wu Y C,et al.On-line threedimensional measurement method based on low modulation feature[J].Chinese Journal of Lasers,2013,40(7):0708006.彭旷,曹益平,武迎春,等.基于低调制度特征的在线三维测量方法[J].中国激光,2013,40(7):0708006.
[7]Saxena M,Eluru G,Gorthi S S.Structured illumination microscopy[J].Advances in Optics and Photonics,2015,7(2):241-275.
[8]Gong Y,Zhang S.Ultrafast 3-D shape measurement with an off-the-shelf DLP projector[J].Optics Express,2010,18(19):19743-19754.
[9]Su X Y,Zhou W S.Phase-measuring profilometry using defocused projection of the Ronchi grating[J].Opto-Electronic Engineering,1993,20(4):8-16.苏显渝,周文胜.采用罗奇光栅离焦投影的位相测量轮廓术[J].光电工程,1993,20(4):8-16.
[10]Tian Z X,Chen W J,Su X Y.Method for improving accuracy and measurement speed of PMP using error diffusion binary encoded sinusoidal grating[J].Laser&Optoelectronics Progress,2014,51(12):121201.田紫霞,陈文静,苏显渝.采用二元编码的正弦光栅提高PMP测量速度和精度的方法[J].激光与光电子学进展,2014,51(12):121201.
[11]Li Y,Cao Y P,Huang Z F,et al.A three dimensional on-line measurement method based on five unequal steps phase shifting[J].Optics Communications,2012,285(21/22):4285-4289.
[12]Sun S J,Zhai A P,Cao Y P.A fast algorithm for obtaining 3D shape and texture information of objects[J].Acta Optica Sinica,2016,36(3):0312001.孙士杰,翟爱平,曹益平.一种快速获取物体三维形貌和纹理信息的算法[J].光学学报,2016,36(3):0312001.
[13]Liu H C,Halioua M,Srinivasan V.Automated phase-measuring profilometry of 3-D diffuse objects[J].Applied Optics,1984,23(18):3105.
[14]Judge T R,Bryanston-Cross P J.A review of phase unwrapping techniques in fringe analysis[J].Optics and Lasers in Engineering,1994,21(4):199-239.
[15]Su X Y.Phase unwrapping techniques for 3Dshape measurement[J].Proceedings of SPIE,1996,2886:460-465.
[16]Zhang H Q,Guo R H,Jiang C,et al.Improved path-independent phase unwrapping algorithm based on total-variation minimum denoising[J].Laser&Optoelectronics Progress,2016,53(12):121202.张辉钦,郭仁慧,蒋超,等.改进的基于全变分最小去噪的路径无关相位解包算法[J].激光与光电子学进展,2016,53(12):121202.
[17]Zhao W C,Lu Y G,Zhang T.Phase gradient correlation based quality map for two dimensional phase unwrapping[J].Acta Optica Sinica,2009,29(s2):149-154.赵万成,路元刚,张婷.用于二维相位展开的相位梯度相关质量图[J].光学学报,2009,29(s2):149-154.
[18]Li W S,Su L K,Su X Y.Phase-measuring profilometry in big scale measurement[J].Acta Optica Sinica,2000,20(6):792-796.李万松,苏礼坤,苏显渝.相位检测面形术在大尺度三维面形测量中的应用[J].光学学报,2000,20(6):792-796.
[19]Zhou W S,Su X Y.A direct mapping algorithm for phase-measuring profilometry[J].Optica Acta International of Optics,1994,41(1):89-94.
[20]Zhang S.High-resolution 3D profilometry with binary phase-shifting methods[J].Applied Optics,2011,50(12):1753-1757.
[21]Ayubi G A,Ayubi J A,Di M J,et al.Pulse-width modulation in defocused three-dimensional fringe projection[J].Optics Letters,2010,35(21):3682-3684.
[22]Zhao L W,Da F P,Zheng D L.Method for binary grating generation using defocused projection for three-dimensional measurement[J].Acta Optica Sinica,2016,36(8):0812005.赵立伟,达飞鹏,郑东亮.离焦投影三维测量的二值光栅生成方法[J].光学学报,2016,36(8):0812005.
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