Structure optimization of connection frames based on frequency sensitivity in macro-micro motion platforms
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摘要
High-performance connection frames are of great significance for ultra-high acceleration and ultra-precision positioning in macro-micro motion platforms. This paper first takes the connection frame as a research object,builds a finite element model(FEM) of the natural frequency of the frame, and then verifies the correctness of this model. The frequency sensitivity method is then used to perturb the structural parameters of the FEM of the connection frame, and the sensitivities of the first-order natural frequency and mass of the corresponding structural parameters are obtained by calculation and analysis. The design variables are also determined. The natural frequency is used as the optimization objective, and the design parameters and mass of the connection frame are constrained. The structural parameters of the connecting frame are obtained through optimization, and the model is built and verified by experiments. The results show that the first-order natural frequency of the connecting frame is effectively improved by the frequency sensitivity method, avoids resonance between the connecting frame and the voice coil motor, and realizes the lightweight design of the connection frame. This research provides a reliable basis for the stable operation and ultra-precision positioning of ultra-high acceleration macro-motion platforms.
High-performance connection frames are of great significance for ultra-high acceleration and ultra-precision positioning in macro-micro motion platforms. This paper first takes the connection frame as a research object,builds a finite element model(FEM) of the natural frequency of the frame, and then verifies the correctness of this model. The frequency sensitivity method is then used to perturb the structural parameters of the FEM of the connection frame, and the sensitivities of the first-order natural frequency and mass of the corresponding structural parameters are obtained by calculation and analysis. The design variables are also determined. The natural frequency is used as the optimization objective, and the design parameters and mass of the connection frame are constrained. The structural parameters of the connecting frame are obtained through optimization, and the model is built and verified by experiments. The results show that the first-order natural frequency of the connecting frame is effectively improved by the frequency sensitivity method, avoids resonance between the connecting frame and the voice coil motor, and realizes the lightweight design of the connection frame. This research provides a reliable basis for the stable operation and ultra-precision positioning of ultra-high acceleration macro-motion platforms.
High-performance connection frames are of great significance for ultra-high acceleration and ultra-precision positioning in macro-micro motion platforms. This paper first takes the connection frame as a research object,builds a finite element model(FEM) of the natural frequency of the frame, and then verifies the correctness of this model. The frequency sensitivity method is then used to perturb the structural parameters of the FEM of the connection frame, and the sensitivities of the first-order natural frequency and mass of the corresponding structural parameters are obtained by calculation and analysis. The design variables are also determined. The natural frequency is used as the optimization objective, and the design parameters and mass of the connection frame are constrained. The structural parameters of the connecting frame are obtained through optimization, and the model is built and verified by experiments. The results show that the first-order natural frequency of the connecting frame is effectively improved by the frequency sensitivity method, avoids resonance between the connecting frame and the voice coil motor, and realizes the lightweight design of the connection frame. This research provides a reliable basis for the stable operation and ultra-precision positioning of ultra-high acceleration macro-motion platforms.
引文
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6.Jie DG, Liu YJ, Sun LN, et al.Modeling and control of a macro-micro dual-drive ultraprecision position mechanism.Opt Precis Eng 2005;13(2):171-8.
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9.Chen YS, Qiu JH, Ji HL.Hysteresis compensation and decoupling control of piezoelectrically driven two-dimensional micro-position stage.Nanotechnol Precis Eng2013;11(3):252-8.
10.Ding H.Modeling and control of the high acceleration motion system.Aeronaut Manuf Technol 2005(8):26-30.
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12.Lew Jae Y, Dan J.Vibration control of a miacro/macro-manipulator system.IEEE Contr Syst Mag 1996;16(1):26-31.
13.Zhang XH.Study on crucial technology of active vibration isolation system based on structure-optimized giant magnetostrictive actuator.Beijing:School of Automatic and Electrical Engineering Beihang University.2004.
14.He XM.Dynamics of the ultra-precision stage with gas-lubricated bearings.Wuhan:Huazhong University of Science and Technology Wuhan.2007.
15.Zhang LF, Long ZL, Fang JW, et al.A linear macro/micro platform design based on FEM simulation.Adv Mater Res Guangzhou, Chinese 2012:1379-86.
16.Fang JW, Long ZL, Zhang LF, et al.Control analysis of point-to-point positioning based on macro-micro stage.Appl Mech Mater 2012:1563-9.
17.Liang XP, Wang H.Structural optimization:principles and engineering applications.Beijing:Tsinghua University Press.2010.
18.Wen BC, Liu SY, He Q.Mechanical vibration theory and dynamic design method.Beijing:China Machine Press.2001.
2.Zhang L, Gao J, Chen X.A rapid dynamic positioning method for settling time reduction through a macro-micro composite stage with high positioning accuracy.IEEE Trans Ind Electron 2018;65(6):4849-53.
3.Deng YJ, Jin X, Zhang ZJ.A macro-micro compensation method for straightness motion error and positioning error of an improved linear stage.J Adv Manuf Technol2015;80(9–12):1799-806.
4.Fang JW, Long ZL, Wang MY, et al.Multi–mode sliding mode control for precision linear stage based on fixed or floating stator.Rev Sci Instrum 2016;87(2):1-10.
5.Zhang LF, Li XL, Fang JW, et al.Multi-objective positioning design optimization of flexure hinge mechanism considering thermal-mechanical coupling deformation and natural frequency.Adv Mech Eng 2017;9(1):1-17.
6.Jie DG, Liu YJ, Sun LN, et al.Modeling and control of a macro-micro dual-drive ultraprecision position mechanism.Opt Precis Eng 2005;13(2):171-8.
7.Li MM.The research on some key techniques of long stroke nano-positioning system.Shanghai:Shanghai University.2007.
8.Lin C, Yu SG, Cheng K, et al.Dynamic analysis and testing of micro/nano-positioning platform.J Zheijang Univ 2012;46(8):1376-81.
9.Chen YS, Qiu JH, Ji HL.Hysteresis compensation and decoupling control of piezoelectrically driven two-dimensional micro-position stage.Nanotechnol Precis Eng2013;11(3):252-8.
10.Ding H.Modeling and control of the high acceleration motion system.Aeronaut Manuf Technol 2005(8):26-30.
11.Daivd W, David P, Wayne J.Experiemntal study on micro/macro manipulator vibration control.Proceedings of the 1996 IEEE international conference on robotics and automation Minneapolis.Minnesota, USA.1996;2549–2554.
12.Lew Jae Y, Dan J.Vibration control of a miacro/macro-manipulator system.IEEE Contr Syst Mag 1996;16(1):26-31.
13.Zhang XH.Study on crucial technology of active vibration isolation system based on structure-optimized giant magnetostrictive actuator.Beijing:School of Automatic and Electrical Engineering Beihang University.2004.
14.He XM.Dynamics of the ultra-precision stage with gas-lubricated bearings.Wuhan:Huazhong University of Science and Technology Wuhan.2007.
15.Zhang LF, Long ZL, Fang JW, et al.A linear macro/micro platform design based on FEM simulation.Adv Mater Res Guangzhou, Chinese 2012:1379-86.
16.Fang JW, Long ZL, Zhang LF, et al.Control analysis of point-to-point positioning based on macro-micro stage.Appl Mech Mater 2012:1563-9.
17.Liang XP, Wang H.Structural optimization:principles and engineering applications.Beijing:Tsinghua University Press.2010.
18.Wen BC, Liu SY, He Q.Mechanical vibration theory and dynamic design method.Beijing:China Machine Press.2001.