一种用于激光制导的高灵敏度制冷型APD四象限探测器组件
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摘要
设计并制作了一种硅雪崩光电二极管(APD)四象限探测器芯片,基于该芯片研制了一款新型高灵敏度制冷型APD四象限探测器组件;创新性地将探测器芯片、热电制冷器、前置放大电路和增益控制模块集成在带光窗的金属外壳中;该组件制冷加热速度快,在-45～70℃环境温度内可使器件恒定工作在10±2℃。测试结果表明,相对于传统的PIN四象限探测器组件,由于APD探测器本身能产生雪崩增益,该组件的灵敏度提高了近两个数量级,作用距离更远。
A silicon quadrant avalanche photodetector(APD)chip was designed and produced and a new high sensitivity and cooled quadrant APD module was fabricated based on this chip.The module integrates APD chip,thermo-electric cooler(TEC),preamplifier and gain control module in the metal case with light window.The module can realize fast cooling and heating,and it can work at 10±2℃constantly over ambient temperature range of-45～70℃.Test results indicate that,compared with traditional PIN quadrant photodetector module,the sensitivity of the APD module is increased by nearly two orders of magnitude and the detection distance is farther because of its avalanche gain.
A silicon quadrant avalanche photodetector(APD)chip was designed and produced and a new high sensitivity and cooled quadrant APD module was fabricated based on this chip.The module integrates APD chip,thermo-electric cooler(TEC),preamplifier and gain control module in the metal case with light window.The module can realize fast cooling and heating,and it can work at 10±2℃constantly over ambient temperature range of-45～70℃.Test results indicate that,compared with traditional PIN quadrant photodetector module,the sensitivity of the APD module is increased by nearly two orders of magnitude and the detection distance is farther because of its avalanche gain.
引文
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[2]谭千里.四象限探测器组件在激光制导技术中的应用[J].半导体光电,2005,26(2):155-157.Tan Qianli.The application of quadrant photodetector module on laser guidance technology[J].Semiconductor Optoelectronics,2005,26(2):155-157.
[3]宋建华.具有温度补偿的数控偏压电路[J].光学与光电技术,2013,11(2):12-15.Song Jianhua.Digital control bias circuit of APD with temperature compensation[J].Opt.&Optoelectron.Technol.,2013,11(2):12-15.
[4]徐昌贵,贾艳婷,闫献国,等.半导体制冷技术及其应用[J].机械工程与自动化,2012(3):209-211.Xu Changgui,Jia Yanting,Yan Xianguo,et al.Semiconductor refrigeration technology and its application[J].Mechanical Engin.&Automation,2012(3):209-211.
[5]居峰.带前放Si-APD探测器的动态特性研究[R].南京:南京理工大学,2012.Ju Feng.Study on dynamic characteristics of pre-displacement Si-APD detector[D].Nanjing:Nanjing University of Science and Technol.,2012.