双读数头圆光栅偏心参数标定修正算法
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摘要
圆光栅安装偏心误差是影响圆光栅角度测量精度的关键因素,偏心误差补偿是提高角度测量精度的重要方法。为准确辨识和补偿圆光栅安装偏心误差参数,在建立的圆光栅偏心误差模型基础上提出了一种双读数头平均误差补偿方法,对读数误差进行修正,并对测量与修正模型进行仿真实验。使用正23面棱体与光电自准直仪搭建实验装置,对所提方法的测量补偿效果进行验证。实验结果表明:采用所提出的补偿修正方法能够有效补偿圆光栅读数头读数偏差,圆光栅的测角精度达到1″以内。
The eccentricity error of the circular grating affects the angle measurement accuracy of circular grating directly. It is an important method to improve the angle measurement accuracy by compensating the eccentricity error. In order to accurately identify and compensate the installation eccentric error parameters of circular grating,the circular grating eccentricity error model is established and a kind of mean error compensation method for double reading head is proposed to correct the reading error. The experimental device is built by using the positive 23 polyhedrons and photoelectric autocollimator. The compensation correction effect is verified. The experimental results showed that the reading deviation of circular grating reading head can be compensated effectively with the proposed correction method. The angular precision of the circular grating is less than 1″.
The eccentricity error of the circular grating affects the angle measurement accuracy of circular grating directly. It is an important method to improve the angle measurement accuracy by compensating the eccentricity error. In order to accurately identify and compensate the installation eccentric error parameters of circular grating,the circular grating eccentricity error model is established and a kind of mean error compensation method for double reading head is proposed to correct the reading error. The experimental device is built by using the positive 23 polyhedrons and photoelectric autocollimator. The compensation correction effect is verified. The experimental results showed that the reading deviation of circular grating reading head can be compensated effectively with the proposed correction method. The angular precision of the circular grating is less than 1″.
引文
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[5]艾华,戴岑.圆光栅衍射光干涉偏心测量方法[J].仪器仪表学报,2014(S1):128-132.
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[2]冯超鹏,祝连庆,潘志康,等.一种新的圆光栅偏心参数自标定方法[J].仪器仪表学报,2016,37(11):2459-2464.
[3]Zhao R T,Shi X L,Wang Z. Effect of encoder eccentricity on rolling speed control and elimination method[C]. ITM Web of Conferences. EDP Sciences,2017.
[4]王文,林铿,高贯斌,等.关节臂式坐标测量机角度传感器偏心参数辨识[J].光学精密工程,2010,18(1):135-141.
[5]艾华,戴岑.圆光栅衍射光干涉偏心测量方法[J].仪器仪表学报,2014(S1):128-132.
[6]郑大腾,谢世坤,罗志扬,等.关节臂坐标测量机圆光栅偏心误差建模及修正研究[J].电子测量与仪器学报,2016,30(10):1568-1574.