反射式计量圆光栅自动检测系统的设计
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摘要
精度和均匀性是评价计量光栅的重要参数,针对反射式计量圆光栅均匀性和精度的检测,设计了一套自动检测系统,系统在原定角检验仪的基础上,增加了反射式读数系统,通过信号采集卡并配合小型编码器将传感器的信号和位置信息传给计算机,然后通过LabVIEW平台对数据进行算法处理,实现自动检测和过程控制,最终计算出圆光栅误差并将结果归档和打印输出。并对32768线的反射式计量圆光栅进行精度和均匀性实际测量,检测其精度为±0.75″均匀性为4.2%。系统测量速度快,精度高,稳定性好。简化了传统检测设备和调试步骤,实现对计量圆光栅精度和均匀性检测的自动化。
The precision and uniformity are important parameters for evaluating metrological radial grating. A set of automatic detection system is designed for the detection of uniformity and precision of the reflective metrological radial grating. This system adds the reflective reading system on the basis of the original angle tester. The signal is transmitted to the computer by the acquisition system, and the location information is passed to the computer by a tiny encoder. Then the data were processed by the LabVIEW, to complete the automatic error detection and process control. Finally, the test results will be printed out and keep on a file. After the actual test on reflective metrological radial grating with 32768 lines. The relative precision error of the grating is ±0.75″, the uniformity error is less than 4.2%. The system was fast, high precision and stability. It simplifies the traditional test equipment and debugging steps, and realizes the automation of measuring the precision and uniformity of the circular grating.
The precision and uniformity are important parameters for evaluating metrological radial grating. A set of automatic detection system is designed for the detection of uniformity and precision of the reflective metrological radial grating. This system adds the reflective reading system on the basis of the original angle tester. The signal is transmitted to the computer by the acquisition system, and the location information is passed to the computer by a tiny encoder. Then the data were processed by the LabVIEW, to complete the automatic error detection and process control. Finally, the test results will be printed out and keep on a file. After the actual test on reflective metrological radial grating with 32768 lines. The relative precision error of the grating is ±0.75″, the uniformity error is less than 4.2%. The system was fast, high precision and stability. It simplifies the traditional test equipment and debugging steps, and realizes the automation of measuring the precision and uniformity of the circular grating.
引文
[1] 杜颖财,万秋华, 卢新然,等.小型大孔径高精度编码器的精度分析[J].电子测量与仪器学报, 2010, 24 (8):780-785.
[2] 陈晓怀,杜国山,程真英.光栅测量系统的误差研究[J].电子测量与仪器学报, 2010,26(3):187-191.
[3] 王显军.光电轴角编码器细分信号误差及精度分析[J].光学精密工程, 2012, 20(2): 379-386.
[4] 姚雪峰,孙慈,杨晋,等. 高精度角位移平台的研制及误差补偿[J].仪器仪表学报,2016,37(7): 961-967.
[5] MULLER M S, BUCK T C, EL-KHOZONDAR H J, et al. Shear strain influence on fiber bragg grating measurement systems[J]. Journal of Lightwave Technology, 2009, 27(23): 5223-5229.
[6] 董莉莉,熊经武.光电轴角编码器的发展动态[J]. 光学精密工程, 2009,8(2): 198-202.
[7] MANCINI D,CASCONE E,SCHIPANI P. Galileo high-resolution encoder system[J]. SPIE,1997:328-334.
[8] 邓方,陈杰,陈文颉,等.一种高精度的光电编码器检测方法及其装置[J]. 北京理工大学学报, 2007, 27(11): 977-980.
[9] 刘春桐,李洪才,何祯鑫,等基于LabVIEW的光纤光栅自动检测及分析系统[J].光子学报, 2016, 45(2): 72-78.
[10] 杜颖财,王希军,王树洁,等.增量式编码器自动检测系统[J]. 电子测量与仪器学报,2012,26(11): 993-998.
[11] 苏东风,续志军,贾继强,等.提高圆光栅测角系统精度的读数头设计[J].电子测量与仪器学报,2013,27(8): 653-657.
[12] KAO C F, HUANG H L,LU S H. Optical encoder based on fractional-talbot effect using two-dimensional phase grating[J]. Optics Communications,2010,283(9):1950-1955.
[13] 毕继耀,张大伟,杨海马,等, 线阵CCD光谱分辨率检测系统设计[J].电子测量与仪器学报,2015,29(7): 1086-1092.
[14] 陈寅. 一种基于LabVIEW平台的小型数据库技术[J].国外电子测量技术,2016,35(5): 70-73,78.
[15] 高利鑫,周玮琳,陈团,等. 高精度倾斜仪探头信号采集处理电路的设计[J].电子测量技术,2016,39(9): 153-157.
[2] 陈晓怀,杜国山,程真英.光栅测量系统的误差研究[J].电子测量与仪器学报, 2010,26(3):187-191.
[3] 王显军.光电轴角编码器细分信号误差及精度分析[J].光学精密工程, 2012, 20(2): 379-386.
[4] 姚雪峰,孙慈,杨晋,等. 高精度角位移平台的研制及误差补偿[J].仪器仪表学报,2016,37(7): 961-967.
[5] MULLER M S, BUCK T C, EL-KHOZONDAR H J, et al. Shear strain influence on fiber bragg grating measurement systems[J]. Journal of Lightwave Technology, 2009, 27(23): 5223-5229.
[6] 董莉莉,熊经武.光电轴角编码器的发展动态[J]. 光学精密工程, 2009,8(2): 198-202.
[7] MANCINI D,CASCONE E,SCHIPANI P. Galileo high-resolution encoder system[J]. SPIE,1997:328-334.
[8] 邓方,陈杰,陈文颉,等.一种高精度的光电编码器检测方法及其装置[J]. 北京理工大学学报, 2007, 27(11): 977-980.
[9] 刘春桐,李洪才,何祯鑫,等基于LabVIEW的光纤光栅自动检测及分析系统[J].光子学报, 2016, 45(2): 72-78.
[10] 杜颖财,王希军,王树洁,等.增量式编码器自动检测系统[J]. 电子测量与仪器学报,2012,26(11): 993-998.
[11] 苏东风,续志军,贾继强,等.提高圆光栅测角系统精度的读数头设计[J].电子测量与仪器学报,2013,27(8): 653-657.
[12] KAO C F, HUANG H L,LU S H. Optical encoder based on fractional-talbot effect using two-dimensional phase grating[J]. Optics Communications,2010,283(9):1950-1955.
[13] 毕继耀,张大伟,杨海马,等, 线阵CCD光谱分辨率检测系统设计[J].电子测量与仪器学报,2015,29(7): 1086-1092.
[14] 陈寅. 一种基于LabVIEW平台的小型数据库技术[J].国外电子测量技术,2016,35(5): 70-73,78.
[15] 高利鑫,周玮琳,陈团,等. 高精度倾斜仪探头信号采集处理电路的设计[J].电子测量技术,2016,39(9): 153-157.