基因测序仪运动平台的高精度定位控制
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摘要
为了实现对基因测序仪运动平台的高精度定位控制,建立了基因测序仪运动平台控制系统。对该系统所采用的数学建模、模型辨识、控制器设计、输入整形等方法进行研究。根据运动平台动力学方程和永磁同步直线电机电压-推力关系构建了运动平台数学模型,利用频域扫描法在实物实验的基础上辨识出运动平台的模型参数。最后,基于运动平台模型设计了双闭环控制器和前馈控制器组成的复合控制器来保证运动平台的稳定性和高精度,同时根据整个系统的主导极点设计了输入整形器以抑制运动平台的残余振荡。实验结果表明:加入了输入整形的复合控制器将运动平台的稳态重复定位精度从±1.47μm提高到±0.354μm。较传统复合控制器,本文提出的方法能使基因测序仪运动平台更快进入可用重复定位精度范围,并基本满足基因测序仪采集图像时所需的稳定性强、精度高等要求。
To realize high precision position control of a gene sequencer motion stage, a gene sequencer motion stage control system was developed, and its applied methods such as mathematical modeling, model identification, controller design, and input shaping were investigated. First, based on the dynamic equation of the motion stage and the voltage-force relationship of a permanent magnet linear synchronous motor, a model of the motion stage was established. Then the method of frequency domain scan was adopted to determine the model parameters. Finally, a compound controller, combined with a double closed loop controller and forward feedback controller, was designed based on the model of motion stage to ensure stability and high precision of the motion stage, and an input shaper was designed based on the dominant pole of the compound control system to eliminate oscillation in the motion stage. Experimental results indicate that the compound controller with the input shaping improves the repeated positioning accuracy of the motion stage from ±1.47 μm to ±0.354 μm. The proposed design allows the motion stage to achieve the ultimate repeated positioning accuracy faster than the conventional compound controller, and satisfies the requirements of high stability and precision when the gene sequencer generates an image.
To realize high precision position control of a gene sequencer motion stage, a gene sequencer motion stage control system was developed, and its applied methods such as mathematical modeling, model identification, controller design, and input shaping were investigated. First, based on the dynamic equation of the motion stage and the voltage-force relationship of a permanent magnet linear synchronous motor, a model of the motion stage was established. Then the method of frequency domain scan was adopted to determine the model parameters. Finally, a compound controller, combined with a double closed loop controller and forward feedback controller, was designed based on the model of motion stage to ensure stability and high precision of the motion stage, and an input shaper was designed based on the dominant pole of the compound control system to eliminate oscillation in the motion stage. Experimental results indicate that the compound controller with the input shaping improves the repeated positioning accuracy of the motion stage from ±1.47 μm to ±0.354 μm. The proposed design allows the motion stage to achieve the ultimate repeated positioning accuracy faster than the conventional compound controller, and satisfies the requirements of high stability and precision when the gene sequencer generates an image.
引文
[1] SERVICE R F. Gene sequencing. The race for the $1000 genome[J]. Science, 2006, 311(5767):1544-1546.
[2] 马建. 基于固态纳米孔基因测序的关键技术研究[D].南京:东南大学,2016.MA J. Research on Gene Sequencing Technology Based on Solid State Nanopores[D]. Nanjing: Southeast University, 2016. (in Chinese)
[3] 李兰兰. 步进扫描投影光刻机同步运动控制策略及方法研究[D].北京:中国科学院研究生院,2014.LI L L. Synchronization Control Strategy and Method of Step-and-scan Projection Lithography[D]. Beijing:Graduate University of the Chinese Academy of Sciences, 2014. (in Chinese)
[4] 崔晶, 王迪凡. X-Y精密定位平台的敏感函数逆前馈补偿控制[J]. 光学 精密工程, 2015, 23(4):1081-1087.CUI J, WANG D F. Feedforward compensation control of X-Y precise positioning table using inversed-sensitive function[J]. Opt. Precision Eng., 2015, 23(4):1081-1087. (in Chinese)
[5] 罗品奎. 双直线电机驱动的H型运动平台控制研究[D]. 武汉:华中科技大学, 2013.LUO P K. Study on Motion Control of H-type Stage Driven by Dual Linear Motors[D]. Wuhan: Huazhong University of Science and Technology, 2013. (in Chinese)
[6] WANG J, LI D. Application of fuzzy PID control in PMLSM servo drive system[C]. IEEE International Conference on Mechatronics and Automation, IEEE, 2015:6-10.
[7] 刘强, 张从鹏. 直线电机驱动的H型气浮导轨运动平台[J]. 光学 精密工程, 2007, 15(10):1540-1546.LIU Q, ZHANG C P. H type air bearing motion stage driven by linear motors[J]. Opt. Precision Eng, 2007, 15(10):1540-1546. (in Chinese)
[8] CHEN S L, TAN K K, HUANG S. Identification of Coulomb friction-impeded systems with a triple-relay feedback apparatus[J]. IEEE Transactions on Control Systems Technology,2012, 20(3):726-737.
[9] 张博, 韩雪峰, 齐蓉,等. 复合滑模控制在精密PMLSM激光切割运动平台的应用[J]. 光学 精密工程, 2017, 25(1):84-92.ZHANG B, HAN X F, QI R, et al.. Application of composite sliding mode control on motion platform of PMLSM precision laser cutting[J]. Opt. Precision Eng, 2017, 25(1):84-92. (in Chinese)
[10] 向红标, 裘祖荣, 李醒飞,等. 精密实验平台的非线性摩擦建模与补偿[J]. 光学 精密工程, 2010, 18(5):1119-1127.XIANG H B, QIU Z R, LI X F, et al.. Nonlinear friction modeling and compensation of high-precision experimental platforms[J]. Opt. Precision Eng., 2010, 18(5):1119-1127. (in Chinese)
[11] WU A Z, CHEN X. Synchronization control for reticle stage and wafer stage based on iterative learning control[J]. Information Technology Journal, 2012, 11(4):492-495.
[12] 朱自立, 徐建明, 孙明轩,等. XY平台的迭代学习控制初次控制信号选定[J]. 控制理论与应用, 2016, 33(4):535-541.ZHU Z L, XU J M, SUN M X, et al.. Determining initial control signal in iterative learning control for X Y tables[J]. Control Theory and Applications, 2016, 33(4):535-541. (in Chinese)
[13] 万勇利. 闭环迭代学习策略及其在光刻机精密运动平台中的应用[D]. 哈尔滨:哈尔滨工业大学, 2016.WAN L Y. Close-loop Iterative Learning Strategy and Its Application in Precision Motion Platform of Lithography[D]. Harbin : Harbin Institute of Technology, 2016. (in Chinese)
[14] 刘武龙. 高加速精密运动平台建模及控制关键技术研究[D]. 哈尔滨:哈尔滨工业大学, 2013.LIU W L. Research on Key Modeling and Controlling Techniques for High Acceleration Precision Motion Stage[D]. Harbin : Harbin Institute of Technology, 2013. (in Chinese)
[15] 张刚, 刘品宽, 张波,等. 直线电机精密运动平台轨迹跟踪控制器设计[J]. 光学 精密工程, 2013, 21(2):371-379.ZHANG G, LIU P K, ZHANG B, et al.. Design of trajectory tracking controller for precision positioning table driven by linear motor[J]. Opt. Precision Eng., 2013, 21(2):371-379. (in Chinese)
[16] TIAN Y B, LI T T, CHENG L. Compound control of pneumatic servo positioning platform based on double bellows[C]. Chinese Automation Congress (CAC), Jinan, 2017: 3103-3108.
[17] 袁雷.现代永磁同步直线电机控制原理及MATLAB仿真[M]. 北京:北京航空航天大学出版社,2016.YUAN L. Control Theory and MATLAB Simulation of Modern Permanent Magnet Synchronous Motor[M]. Beijing: Beijing University of Aeronautics and Astronautics Press, 2016. (in Chinese)
[2] 马建. 基于固态纳米孔基因测序的关键技术研究[D].南京:东南大学,2016.MA J. Research on Gene Sequencing Technology Based on Solid State Nanopores[D]. Nanjing: Southeast University, 2016. (in Chinese)
[3] 李兰兰. 步进扫描投影光刻机同步运动控制策略及方法研究[D].北京:中国科学院研究生院,2014.LI L L. Synchronization Control Strategy and Method of Step-and-scan Projection Lithography[D]. Beijing:Graduate University of the Chinese Academy of Sciences, 2014. (in Chinese)
[4] 崔晶, 王迪凡. X-Y精密定位平台的敏感函数逆前馈补偿控制[J]. 光学 精密工程, 2015, 23(4):1081-1087.CUI J, WANG D F. Feedforward compensation control of X-Y precise positioning table using inversed-sensitive function[J]. Opt. Precision Eng., 2015, 23(4):1081-1087. (in Chinese)
[5] 罗品奎. 双直线电机驱动的H型运动平台控制研究[D]. 武汉:华中科技大学, 2013.LUO P K. Study on Motion Control of H-type Stage Driven by Dual Linear Motors[D]. Wuhan: Huazhong University of Science and Technology, 2013. (in Chinese)
[6] WANG J, LI D. Application of fuzzy PID control in PMLSM servo drive system[C]. IEEE International Conference on Mechatronics and Automation, IEEE, 2015:6-10.
[7] 刘强, 张从鹏. 直线电机驱动的H型气浮导轨运动平台[J]. 光学 精密工程, 2007, 15(10):1540-1546.LIU Q, ZHANG C P. H type air bearing motion stage driven by linear motors[J]. Opt. Precision Eng, 2007, 15(10):1540-1546. (in Chinese)
[8] CHEN S L, TAN K K, HUANG S. Identification of Coulomb friction-impeded systems with a triple-relay feedback apparatus[J]. IEEE Transactions on Control Systems Technology,2012, 20(3):726-737.
[9] 张博, 韩雪峰, 齐蓉,等. 复合滑模控制在精密PMLSM激光切割运动平台的应用[J]. 光学 精密工程, 2017, 25(1):84-92.ZHANG B, HAN X F, QI R, et al.. Application of composite sliding mode control on motion platform of PMLSM precision laser cutting[J]. Opt. Precision Eng, 2017, 25(1):84-92. (in Chinese)
[10] 向红标, 裘祖荣, 李醒飞,等. 精密实验平台的非线性摩擦建模与补偿[J]. 光学 精密工程, 2010, 18(5):1119-1127.XIANG H B, QIU Z R, LI X F, et al.. Nonlinear friction modeling and compensation of high-precision experimental platforms[J]. Opt. Precision Eng., 2010, 18(5):1119-1127. (in Chinese)
[11] WU A Z, CHEN X. Synchronization control for reticle stage and wafer stage based on iterative learning control[J]. Information Technology Journal, 2012, 11(4):492-495.
[12] 朱自立, 徐建明, 孙明轩,等. XY平台的迭代学习控制初次控制信号选定[J]. 控制理论与应用, 2016, 33(4):535-541.ZHU Z L, XU J M, SUN M X, et al.. Determining initial control signal in iterative learning control for X Y tables[J]. Control Theory and Applications, 2016, 33(4):535-541. (in Chinese)
[13] 万勇利. 闭环迭代学习策略及其在光刻机精密运动平台中的应用[D]. 哈尔滨:哈尔滨工业大学, 2016.WAN L Y. Close-loop Iterative Learning Strategy and Its Application in Precision Motion Platform of Lithography[D]. Harbin : Harbin Institute of Technology, 2016. (in Chinese)
[14] 刘武龙. 高加速精密运动平台建模及控制关键技术研究[D]. 哈尔滨:哈尔滨工业大学, 2013.LIU W L. Research on Key Modeling and Controlling Techniques for High Acceleration Precision Motion Stage[D]. Harbin : Harbin Institute of Technology, 2013. (in Chinese)
[15] 张刚, 刘品宽, 张波,等. 直线电机精密运动平台轨迹跟踪控制器设计[J]. 光学 精密工程, 2013, 21(2):371-379.ZHANG G, LIU P K, ZHANG B, et al.. Design of trajectory tracking controller for precision positioning table driven by linear motor[J]. Opt. Precision Eng., 2013, 21(2):371-379. (in Chinese)
[16] TIAN Y B, LI T T, CHENG L. Compound control of pneumatic servo positioning platform based on double bellows[C]. Chinese Automation Congress (CAC), Jinan, 2017: 3103-3108.
[17] 袁雷.现代永磁同步直线电机控制原理及MATLAB仿真[M]. 北京:北京航空航天大学出版社,2016.YUAN L. Control Theory and MATLAB Simulation of Modern Permanent Magnet Synchronous Motor[M]. Beijing: Beijing University of Aeronautics and Astronautics Press, 2016. (in Chinese)