C/SiC复合材料表面高温瞬态温度传感器的研究
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摘要
针对C/SiC复合材料制造的航空发动机热端部件瞬时表面温度监测困难的问题,研究了一种C/SiC复合材料瞬时表面温度测量方法。采用磁控溅射法结合电镀工艺在C/SiC复合材料表面沉积了Ni-Cr-ZrO_2复合过渡层,采用磁控溅射法在Ni-Cr-ZrO_2复合过渡层上依次制备了SiO_2绝缘膜、NiCr/NiSi薄膜热电偶和SiO_2保护膜。对不同厚度SiO_2绝缘膜的绝缘性能进行研究,结果表明3μm厚的SiO_2薄膜绝缘电阻值可达1.64×10~9Ω。对传感器静态性能的实验研究结果表明,在50～600℃,塞贝克系数为42.1μV/℃,非线性误差1.52%。用理论计算与实验结合的方式对传感器的动态性能进行了研究,结果表明,传感器的动态响应时间在微秒级,可实现瞬态温度测试。对传感器进行测温实验,结果表明传感器能满足室温～600℃范围内瞬态温度检测的需求。
Theinstantaneous surface temperaturemonitoringis always challenging for the aero-engine hot components composed of C/SiC composite materials.An measurement method of instantaneous surface temperature monitoring is studied for the aero-engine hot components composed of C/SiC composite materials. The Ni-Cr-ZrO_2 composite transition layer isdeposited on the surface of C/SiC composite by magnetron sputtering and electroplating.Insulating film SiO_2, NiCr/NiSithin film thermocouple and SiO_2 protective filmareprepared sequentially on the Ni-Cr-ZrO_2composite metal transition layer on the surface of C/SiC composite prepared by magnetron sputtering.The insulation properties of SiO_2 insulating films with different thicknesses areinvestigated. The results indicatethat the insulation resistance of SiO_2 films with a thickness of 3 μm is about 1.64×10~9 Ω. The experimental results of the static performance of the sensor show that the Seebeck coefficient is 42.1 μV/℃ and the nonlinear error is 1.52% in the range of 50～600℃. The dynamic performance of the sensor is studied by the combination of theoretical calculation and experiment. The results show that the dynamic response time of the sensor is in the microsecond range, which can realize the transient temperature test. The temperature measurement experiment shows that the sensor can meet the requirements of transient temperature detection ranged from room temperature to 600℃.
Theinstantaneous surface temperaturemonitoringis always challenging for the aero-engine hot components composed of C/SiC composite materials.An measurement method of instantaneous surface temperature monitoring is studied for the aero-engine hot components composed of C/SiC composite materials. The Ni-Cr-ZrO_2 composite transition layer isdeposited on the surface of C/SiC composite by magnetron sputtering and electroplating.Insulating film SiO_2, NiCr/NiSithin film thermocouple and SiO_2 protective filmareprepared sequentially on the Ni-Cr-ZrO_2composite metal transition layer on the surface of C/SiC composite prepared by magnetron sputtering.The insulation properties of SiO_2 insulating films with different thicknesses areinvestigated. The results indicatethat the insulation resistance of SiO_2 films with a thickness of 3 μm is about 1.64×10~9 Ω. The experimental results of the static performance of the sensor show that the Seebeck coefficient is 42.1 μV/℃ and the nonlinear error is 1.52% in the range of 50～600℃. The dynamic performance of the sensor is studied by the combination of theoretical calculation and experiment. The results show that the dynamic response time of the sensor is in the microsecond range, which can realize the transient temperature test. The temperature measurement experiment shows that the sensor can meet the requirements of transient temperature detection ranged from room temperature to 600℃.
引文
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[17] WANG D Y.A simple route to deposit SiO2 film with resistivity > 109 Ω·m[J].Materials Letters,2018,211(1):277- 280.
[18] 全国工业过程测量和控制标准化技术委员会.GB/T 15479-1995.工业自动化仪表绝缘电阻、绝缘强度技术要求和试验方法[S].北京:中国标准出版社,National Technical Committee for Standardization of industrial Process Measurement and Control.GB/T 15479-1995.industrial automation instrumentation insulation resistance,insulation strength technical requirements and test methods[S].Beijing:China Standard Press,1995.
[19] 崔云先,张子超,丁万昱,等.NiCr高温薄膜电阻应变计制备及耐高温性能研究[J].仪器仪表学报,2016,37(7):1548-1555.CUI Y X,ZHANG Z CH,DING W Y,et al.Study on fabrication of NiCr films based high temperature resistance strain gauge and its high temperature performance[J].Chinese Journal of Scientific Instrument,2016,37(7):1548-1555.
[20] CUI Y X,YANG D,JIA Y,et al.Dynamic calibration of the cutting temperature sensor of NiCr/NiSi Thin-Film thermocouple[J].Chinese Journal of Mechanical Engineering,2011,24(1):73-77.
[21] CAHILL D G,ALLEN T H.Thermal conductivity of sputtered and evaporated SiO2 and TiO2 optical coatings[J].Applied Physics Letters,1994,65(3):309-311.
[22] 李付国,黄吕权,解亚军,等.薄膜热电偶动态特性研究[J].仪器仪表学报,1996,17(3):316-318.LI F G,HUANG L Q,XIE Y H,et al.The investigation of thin film thermocouple dynamic performance[J].Chinese Journal of Scientific Instrument,1996,17(3):316-318.
[2] LI L B.Synergistic effect of arbitrary loading sequence and interface wear on the fatigue hysteresis loops of carbon fiber-reinforced ceramic-matrix composites[J].Engineering Fracture Mechanics,2015(146):67- 88.
[3] 程起有,童小燕,陈刘定,等.平纹编织碳纤维增强碳化硅复合材料冲击特性及冲击后的压缩强度[J].硅酸盐学报,2009,37(11):1942-1946.CHENG Q Y,TONG X Y,CHEN L D et al.Low-velocity impact characteristics and compressive strength after impact of plain woven carbon fiber reinforced silicon carbon composites[J]Journal of The Chinese Ceramic Society,2009,37(11):1942-1946.
[4] 王林山,熊翔,肖鹏,等.高温热处理对C/C-SiC复合材料制备与力学性能的影响[J].新型炭材料,2005,20(3):245- 249.WANG L SH,XIANG X,XIAO P,et al.Effect of high temperature heat treatment on preparation and mechanical performance of C/C-SiCcomposites material[J].New Carbon Materials,2005,20(3):245- 249.
[5] HOU J T,QIAO S R,ZHANG C Y,et al.The influence of high temperature exposure to air on the damage to 3D-C/SiC composites[J].New Carbon Materials,2009,24(2):173-177.
[6] 黄春峰,蒋明夫,毛茂华.国外航空发动机薄膜热电偶技术发展研究[J].航空发动机,2011,37(6):53- 57.HUANG CH F,JIANG M F,MAO M H.Development on thin-film thermocouples technology for foreign aeroengine[J].Aeroengine,2011,37(6):53- 57.
[7] 王燕山,董祥明,刘伟等.航空发动机高温测试技术的研究进展[J].测控技术,2017,36(9):1- 6.WANG Y SH,DONG X M,LIU W et al.Research development of aeroengine high temperature measurement technology [J]Measurement and Control Technology,2017,36(9):1- 6.
[8] 姚艳玲,代军,黄春峰.现代航空发动机温度测试技术发展综述[J].航空制造技术,2015(12):103-107.YAO Y L,DAI J,HUANG CH F.Development for temperature measurement technology in modernaer-oengine[J].Aeronautical Manufacturing Technology,2015(12):103-107.
[9] 张兴,薛秀生,陈斌,等.示温漆在发动机测试中的应用与研究[J].测控技术,2008,27(1):21- 23.ZHANG X,XUE X SH,CHEN B et al.Research and application of thermal indicating paint in aeroengine test[J].Measurement and Control Technology,2008,27(1):21- 23.
[10] 王俊德,黄梅,殷惠.气体温度的红外光谱测量[J].光谱学与光谱分析,1995(4):49- 57.WANG J D,HUANG M,YIN H.Infrared spectroscopy of gas temperature[J].Spectroscopy and Spectral Analysis,1995(4):49- 57.
[11] 赵源深,杨丽红.薄膜热电偶温度传感器研究进展[J].传感器与微系统,2012,31(2):1-3.ZHAO Y SH,YANG L H.The research development of thin film thermocouple sensor[J].Transducer and Microsystem Technologies,2012,31(2):1-3.
[12] CHENX M,GREGORY O J,AMANI M.Thin-Film thermocouples based on the system In2O3-SnO2[J].Journal of the American Ceramic Society,2011,94(3):854- 860.
[13] 张智,郝志彪,闫联生.C/C-SiC复合材料制备方法及应用现状[J].炭素,2008(2):29-35.ZHANG ZH,HAO ZH B,YAN L SH.C/C-SiC Composite materials preparation methods and application status[J].Carbon,2008(2):29-35.
[14] 何杰,吴蒙华,贾卫平.Ni-ZrO2-CeO2二元纳米复合镀层摩擦磨损及耐蚀性研究[J].功能材料,2018,49(1):01102-01106.HE J,WU M H,JIA W P.Ni-ZrO2-CeO2Study on friction wear and corrosion resistance of binary nanocomposite coatings[J].Journal of Functional Materials,2018,49(1):01102-01106.
[15] 崔云先,薛帅毅,周通,等.薄膜瞬态温度传感器的制备及性能研究[J].仪器仪表学报,2017,38(12):3028-3035.CUI Y X,XUE SH Y,ZHOU T,et al.Fabrication and performance analysis of thin film transient temperature sensor[J].Chinese Journal of Scientific Instrument,2017,38(12):3028-3035.
[16] LIU Y.Research on measurement of cutting area temperatureand its predictionmodel[J].International Journal of Manufacturing Research,2018,13(3):1-18.
[17] WANG D Y.A simple route to deposit SiO2 film with resistivity > 109 Ω·m[J].Materials Letters,2018,211(1):277- 280.
[18] 全国工业过程测量和控制标准化技术委员会.GB/T 15479-1995.工业自动化仪表绝缘电阻、绝缘强度技术要求和试验方法[S].北京:中国标准出版社,National Technical Committee for Standardization of industrial Process Measurement and Control.GB/T 15479-1995.industrial automation instrumentation insulation resistance,insulation strength technical requirements and test methods[S].Beijing:China Standard Press,1995.
[19] 崔云先,张子超,丁万昱,等.NiCr高温薄膜电阻应变计制备及耐高温性能研究[J].仪器仪表学报,2016,37(7):1548-1555.CUI Y X,ZHANG Z CH,DING W Y,et al.Study on fabrication of NiCr films based high temperature resistance strain gauge and its high temperature performance[J].Chinese Journal of Scientific Instrument,2016,37(7):1548-1555.
[20] CUI Y X,YANG D,JIA Y,et al.Dynamic calibration of the cutting temperature sensor of NiCr/NiSi Thin-Film thermocouple[J].Chinese Journal of Mechanical Engineering,2011,24(1):73-77.
[21] CAHILL D G,ALLEN T H.Thermal conductivity of sputtered and evaporated SiO2 and TiO2 optical coatings[J].Applied Physics Letters,1994,65(3):309-311.
[22] 李付国,黄吕权,解亚军,等.薄膜热电偶动态特性研究[J].仪器仪表学报,1996,17(3):316-318.LI F G,HUANG L Q,XIE Y H,et al.The investigation of thin film thermocouple dynamic performance[J].Chinese Journal of Scientific Instrument,1996,17(3):316-318.
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