DN1250液氮屏蔽型制冷机低温泵的研制与性能测试
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摘要
北京卫星环境工程研究所研制了四台DN1250口径的液氮屏蔽型制冷机低温泵。该低温泵已经作为大型空间环境模拟系统的高真空主泵投入使用,满足了热真空试验对高真空的需求,取得了良好的效果。本文主要针对该低温泵的三种主要性能指标(抽速、降温时间和渡越容量)的设计方法、性能测试方法以及结果进行介绍,测试结果表明该系列低温泵对氮气的抽速达到了57000L/s,降温时间约330min,渡越容量达到3.0×10~5Pa·L。
Four refrigerator cooled cryopumps(DN1250 LN_2) were designed and manufactured by BISEE. The pumps were used in space environment simulation system to meet the demand of the high vacuum in thermal vacuum test. The design and test method for pumping speed, cool down time and crossover were introduced in this paper. A test system was built to test the main performance of the cryopumps. The experimental results show that the pumping speed for N_2 of the pump is up to 57000 L/s, the cool down time is about 330 min, and the crossover is over than 3.0 × 10~5Pa·L.
Four refrigerator cooled cryopumps(DN1250 LN_2) were designed and manufactured by BISEE. The pumps were used in space environment simulation system to meet the demand of the high vacuum in thermal vacuum test. The design and test method for pumping speed, cool down time and crossover were introduced in this paper. A test system was built to test the main performance of the cryopumps. The experimental results show that the pumping speed for N_2 of the pump is up to 57000 L/s, the cool down time is about 330 min, and the crossover is over than 3.0 × 10~5Pa·L.
引文
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[2]达道安.真空设计手册第3版[M].北京:国防工业出版社, 2004.
[3] Kimo M Welch. Recommended practices for measuring the performance and characteristics of closed-loop gaseous helium cryopumps[J]. Journal of Vacuum Science and Technology A, 1999, 17(5):3081-3095.
[4]杨乃恒.真空获得设备[M].北京:冶金工业出版社,2001.
[5] Baechler, W.G. Cryopumps for research and industry[J].Vacuum, 1987, 37(1-2):21-29.
[6] Hafner, H. U., H. H. Klein, et al. New methods and investigations for regenerating refrigerator cryopumps[J].Vacuum, 1990,41(7-9):1840-1842.
[7] Ikegami, K., S. Nakajima, et al. Design and performance characteristics of refrigerator-cooled cryopumps for the RIKEN ring cyclotron[J]. Vacuum,1988,38(2):99-102.
[8] Juhnke, C., H. H. Klein, et al. The crossover of refrigerator-cooled cryopumps[J]. Vacuum, 1993,44(5-7):717-719.