绝缘体表面电荷的开尔文探针力显微镜测量方法
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摘要
研究了一种基于开环模式开尔文探针力显微镜的表面电荷测量方法。该方法能够避免闭环模式开尔文探针力显微镜中外加直流偏压对电荷测量的影响。研究了针尖-样品间距、交流电压、比例系数等参数对电势测量的影响,优化了开环模式开尔文探针力显微镜电荷测量方法,并将该方法运用于反射镜薄膜表面电荷积累特性的研究。实验结果表明针尖-样品间距直接影响开环模式开尔文探针力显微镜电荷测量的准确性,当针尖-样品间距控制在100nm时,实验成功检测到反射镜在等离子环境中的表面电荷积累效应,并且实现高于100nC/cm~2的电荷分辨率,这对反射镜薄膜在等离子环境下损耗增加机制的研究具有重要意义。
It studies a method for measuring surface charges of insulators based on open-loop Kelvin probe force microscope(KPFM).The method can avoid the influence of the bias feedback loop using in closed-loop KPFM.In this work,we research the influence of the distance of sample and tip,alternating voltage and scale factor,therefore the measurement of surface charges by open-loop KPFM is optimized.Furthermore,the power of the method is illustrated on the surface charge accumulation effectof reflector films.Experimental results present that:the distance of sample and tip directly affects accuracy of the measurement by open-loop KPFM.Based on the data we discover the surface charge accumulation effect of reflector films,and the charge resolution is higher than 100 nC/cm~2,when the distance of sample and tip is 100 nm.This method is of great significance to study the loss of reflector films in plasma environment.
It studies a method for measuring surface charges of insulators based on open-loop Kelvin probe force microscope(KPFM).The method can avoid the influence of the bias feedback loop using in closed-loop KPFM.In this work,we research the influence of the distance of sample and tip,alternating voltage and scale factor,therefore the measurement of surface charges by open-loop KPFM is optimized.Furthermore,the power of the method is illustrated on the surface charge accumulation effectof reflector films.Experimental results present that:the distance of sample and tip directly affects accuracy of the measurement by open-loop KPFM.Based on the data we discover the surface charge accumulation effect of reflector films,and the charge resolution is higher than 100 nC/cm~2,when the distance of sample and tip is 100 nm.This method is of great significance to study the loss of reflector films in plasma environment.
引文
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[18]翟亮,王涛,白满社,左毅娟,等.应用于等离子体环境的反射镜损耗的实时测量[J].光学学报,2017,37(7):147-151.
[19]易葵,马平,邱红,等.大口径传输反射镜的研究进展[J].光学精密工程,2016,24(12):2902-2907.
[2]孙志,王暄,韩柏,等.聚酰亚胺薄膜表面电荷的开尔文力显微镜研究[J].中国电机工程学报,2014,34(12):1957-1964.
[3]穆海宝,张冠军,铃木祥太,等.交流电压下聚合物材料表面的电荷分布特性[J].中国电机工程学报,2010,30(31):130-136.
[4]王友功,川崎俊之,高田达雄.普克尔斯效应反射法测量绝缘膜表面放电电荷的分布[J].西安交通大学学报,1996(11):53-59.
[5]TSUKADA M,MASAGO A,SHIMIZU M.Theoretical methods for kelvin probe force microscopy simulation and application to semiconductor surfaces[C].International of Vacuum Congress,2010.
[6]沈健,包生祥,王志红.开尔文力显微镜检测ZnO薄膜的接触电势差[J].电子测量与仪器学报,2006(6):68-71.
[7]SARAF S,ROSENWAKS Y.Local measurement of semiconductor band bending and surface charge using Kelvin probe force microscopy[J].Surface Science,2005,574(2):L35-L39.
[8]SWAMINATHAN VENKATESAN.Kelvin probe force microscopic study of nanoscale interlayers in double junction organic solar cells[C].Topic Abstracts of the 2nd International Congress on Advanced Materials(AM2013),2013:1.
[9]崔泽群.基于开尔文探针力显微镜的有机半导体器件研究[D].苏州:苏州大学,2016.
[10]沈健.铁电薄膜表面与界面特性的扫描力显微镜研究[D].成都:电子科技大学,2006.
[11]YAN F,CHEN G,LU L,et al.Dynamics of photogenerated surface charge on BiFeO3 Films[J].ACS NANO,2012,6(3):2353-2360.
[12]MELITZ W,SHEN J,KUMMEL A C,et al.Kelvin probe force microscopy and its application[J].Surface Science Reports,2011,66(1):1-27.
[13]OKAMOTO K,SUGAWARA Y,MORITA S.The imaging mechanism of atomic-scale kelvin probe force microscopy and its application to atomic-scale force mapping[J].Japanese Journal of Applied Physics,2003,42(11):7163-7168.
[14]周强,谢中,王祝盈,等.铜铅合金的扫描开尔文探针显微镜研究[J].电子显微学报,2006(4):348-352.
[15]COLLINS L,KILPATRICK J I,WEBER S A,et al.Open loop Kelvin probe force microscopy with single and multi-frequency excitation[J].Nanotechnology,2013,24(47):475702(1)-475702(10).
[16]COLLINS L,KILPATRICK J I,BHASKARAN M,et al.Dual harmonic Kelvin probe force microscopy for surface potential measurements of ferroelectrics[C].Applications of Ferroelectrics Held Jointly with 2012European Conference on the Applications of Polar Dielectrics and 2012International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials,IEEE,2012:1-4.
[17]LIU J,GAIKWAD R,HANDE A,et al.Mapping and quantifying surface charges on clay nanoparticles[J].Langmuir the Acs Journal of Surfaces&Colloids,2015,31(38):10469-10476.
[18]翟亮,王涛,白满社,左毅娟,等.应用于等离子体环境的反射镜损耗的实时测量[J].光学学报,2017,37(7):147-151.
[19]易葵,马平,邱红,等.大口径传输反射镜的研究进展[J].光学精密工程,2016,24(12):2902-2907.
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