多频率开尔文探针力显微镜的设计
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摘要
本文研究开尔文探针力显微镜(KPFM)中多频率方法的实现。KPFM中的多频率方法同时激发微悬臂探针的第一次和第二次的本征机械振动模式并分别用于样品形貌和表面电势成像。据此,本文设计了一种基于传统比例-积分控制器基本原理的模拟式反馈控制器,用以实现探针的调控。测试表明,该反馈控制器带宽可达约5 k Hz,并利用该反馈控制器研制出了多频率KPFM,其电势测量灵敏度优于5 m V。利用该多频率KPFM,对注入电荷后的介电薄膜样品进行测试,一次成像即可得到样品的形貌图及局域电势的二维分布图。该多频率KPFM技术可广泛应用于电子材料与器件的电特性表征。
A realization of the multi-frequency technique for Kelvin Probe Force Microscopy(KPFM) is studied. In the multi-frequency KPFM, the first eigenmode of the cantilever probe is used for topographic imaging, while the second one is resonantly excited for surface potential. Thus, an additional feedback is needed to adjust the probe automatically. An analog feedback controller with bandwidth of about 5 k Hz is designed based on the principle of conventional Proportional-integral Controller(PIC). Employing the controller, a novel multi-frequency KPFM is developed, whose sensitivity for surface potential measurement is demonstrated to be better than 5 m V. Topography and surface potential distribution for a kind of dielectric film with the injection of charge are imaged with the multi-frequency KPFM,suggesting its application in the characterization of electrical material and devices.
A realization of the multi-frequency technique for Kelvin Probe Force Microscopy(KPFM) is studied. In the multi-frequency KPFM, the first eigenmode of the cantilever probe is used for topographic imaging, while the second one is resonantly excited for surface potential. Thus, an additional feedback is needed to adjust the probe automatically. An analog feedback controller with bandwidth of about 5 k Hz is designed based on the principle of conventional Proportional-integral Controller(PIC). Employing the controller, a novel multi-frequency KPFM is developed, whose sensitivity for surface potential measurement is demonstrated to be better than 5 m V. Topography and surface potential distribution for a kind of dielectric film with the injection of charge are imaged with the multi-frequency KPFM,suggesting its application in the characterization of electrical material and devices.
引文
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[11]丁喜冬,冯天恩,张进修.基于DSP的SPM反馈控制器设计[J].计算机工程,2007,33(3):275-277.DING Xidong,FENG Tian?en,ZHANG Jinxiu.Design of Feedback Controller for SPM Based on DSP[J].Computer Engineering,2007,33(3):275-277.
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[13]DING Xidong,LI Chao,LIANG Zhongwen,et al.Resonant multi-frequency method for Kelvin probe force microscopy in air[J].Measurement Science and Technology(S0957-0233),2012,23(10):105402.
[2]Nonnenmaccher M,Oboyle M P,Wickramasinghe H K.Kelvin probe force microscopy[J].Applied Physics Letters(S0003-6951),1991,58(25):2921-2923.
[3]Zerweck U,Loppacher C,Otto T,et al.Kelvin probe force microscopy of C60 on metal substrates:towards molecular resolution[J].Nanotechnology(S0957-4484),2007,18(8):084006.
[4]Gaillard N,Gros-Jean M,Mariolle D,et al.Method to assess the grain crystallographic orientation with a submicronic spatial resolution using Kelvin probe force microscope[J].Applied Physics Letters(S0003-6951),2006,89(15):154101.
[5]Garcia R,Herruzo E T.The emergence of multi-frequency force microscopy[J].Nature Nanotechnology(S1748-3395),2012,7(4):217-226.
[6]Stark R W,Naujoks N,Stemmer A.Multi-frequency electrostatic force microscopy in the repulsive regime[J].Nanotechnology(S0957-4484),2007,18(6):065502.
[7]Palacios-Lidón E,Pérez-García B,Colchero J.Enhancing dynamic scanning force microscopy in air:as close as possible[J].Nanotechnology(S0957-4484),2009,20(8):085707.
[8]DING Xidong,AN Jin,XU Jianbin,et al.Improving lateral resolution of electrostatic force microscopy by multi-frequency method under ambient conditions[J].Applied Physics Letters(S0003-6951),2009,94(22):223109.
[9]Rave U,Janser K,Arnold W.Vibrations of free and surface-coupled atomic force microscope cantilevers:theory and experiment[J].Review of Scientific Instruments(S1089-7623),1996,67(9):3281-3293.
[10]Takahashi T,Kawamukai T.Phase detection of electrostatic force by AFM with a conductive tip[J].Ultramicroscopy(S0304-3991),2000,82(1/4):63-68.
[11]丁喜冬,冯天恩,张进修.基于DSP的SPM反馈控制器设计[J].计算机工程,2007,33(3):275-277.DING Xidong,FENG Tian?en,ZHANG Jinxiu.Design of Feedback Controller for SPM Based on DSP[J].Computer Engineering,2007,33(3):275-277.
[12]陶永华,尹怡欣,葛芦生.新型PID控制及其应用[M].北京:机械工业出版社,1998:1-5.
[13]DING Xidong,LI Chao,LIANG Zhongwen,et al.Resonant multi-frequency method for Kelvin probe force microscopy in air[J].Measurement Science and Technology(S0957-0233),2012,23(10):105402.
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