磁控电流对Ti600钛合金表面WC-C膜组织和性能的影响
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摘要
目前,利用离化C2H2和共溅WC靶相结合(PACVD+UBMS)制备WC-C膜,以及膜结构、性能与工艺参数间关系的文献报道较少。采有PACVD+UBMS在Ti600钛合金表面制备得到WC-C膜,分析了不同磁控电流条件下形成的膜的物相组织、微观结构、膜硬度以及膜基结合力,并进行了磨损试验测试。结果表明:磁控电流为0 A时,磁控溅射膜中并没有形成WC对应的特征衍射峰,磁控电流3～12 A的WC-C膜中生成了WC的衍射峰,但WC-C膜内的WC相不稳定,WC-C膜表现为明显的梯度过渡结构;当磁控电流增大后,WC-C膜的膜基结合力将会随之增加,膜的弹性模量与硬度也随之减小;当磁控电流增大后,试样的磨损率也开始增加,磁控电流6 A所得试样的磨损率最大;磨痕宽度也随磁控电流的增大逐渐增大,并出现了磨屑堆积现象,且发生了小块剥落现象。
The magnetron sputtering method was selected to prepare WC-C film on the surface of Ti600 titanium alloy,and the film phase composition,microstructure,film hardness and film-base binding force under different magnetron current conditions were analyzed,and then the friction test was conducted. Results showed that no characteristic diffraction peak corresponding to WC formed during the only magnetron sputtering,while the diffraction peak of WC generated under a magnetron current of 3-12 A,meanwhile the WC phase was unstable,and the WC-C film presented obvious gradient transition structure. When the magnetron current increased,the bonding force between the film and the base increased,and the elastic modulus and hardness of the film conversely decreased. When the magnetron current increased,the wear rate of the sample also began to increase,and at the magnetron current of 6 A the wear rate was the largest. Besides,the width of wear mark also increased gradually,and the phenomena of chip accumulation and small pieces spalling occurred.
The magnetron sputtering method was selected to prepare WC-C film on the surface of Ti600 titanium alloy,and the film phase composition,microstructure,film hardness and film-base binding force under different magnetron current conditions were analyzed,and then the friction test was conducted. Results showed that no characteristic diffraction peak corresponding to WC formed during the only magnetron sputtering,while the diffraction peak of WC generated under a magnetron current of 3-12 A,meanwhile the WC phase was unstable,and the WC-C film presented obvious gradient transition structure. When the magnetron current increased,the bonding force between the film and the base increased,and the elastic modulus and hardness of the film conversely decreased. When the magnetron current increased,the wear rate of the sample also began to increase,and at the magnetron current of 6 A the wear rate was the largest. Besides,the width of wear mark also increased gradually,and the phenomena of chip accumulation and small pieces spalling occurred.
引文
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[3] MASJUKI H H. An updated overview of diamond-like carbon coating in tribology[J]. Critical Reviews in Solid State and Materials Sciences,2015,40(2):90-118.
[4] MAHMOUDI B,TURY B,HAGER C H,et al. Effects of black oxide and a WC-C coating on the micropitting of SAE52100 bearing steel[J]. Tribology Letters,2015,58(2):20-26.
[5]郭延龙,孙有文,王淑云,等.金属掺杂类金刚石膜的研究进展[J].纳米科技,2008,33(6):13-16.
[6] PU J B,HE D B,WANG L P. Effects of WC phase contents on the microstructure,mechanical properties and tribological behaviors of WC-C superlattice coatings[J]. Applied Surface Science,2015,357:2 039-2 047.
[7]蒲吉斌,王立平,薛群基.多尺度强韧化碳基润滑膜的研究进展[J].中国表面工程,2014,27(6):4-27.
[8] CAPOTE G,RAMREZ M A,SILVA P C S D,et al. Improvement of the properties and the adherence of DLC coatings deposited using a modified pulsed-DC PECVD technique and an additional cathode[J]. Surface and Coatings Technology,2016,55(308):70-79.
[9]吕起鹏,李刚,公发全,等.低温等离子体辅助脉冲直流磁控溅射制备Ti N膜[J].真空科学与技术学报,2014,34(11):1 192-1 196.