水下CMUT动态性能仿真与测试的研究

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英文篇名：Research of Dynamic Performance Simulation and Test of underwater CMUT 作者：张睿 ; 解丹 ; 马健喆 ; 潘理虎 ; 张永梅 ; 陈立潮 英文作者：ZHANG Rui;XIE Dan;MA Jianzhe;PAN Lihu;ZHANG Yongmei;CHEN Lichao;Taiyuan University of Science and Technology,Department of Computer Science and Technology;BeiJing HualongTong Science and Technology Co.,Ltd;North China University of Technology,School of Computer Science; 关键词：微电容式超声传感器 ; 动态性能 ; 仿真 ; 测试 ; 探测 英文关键词：capacitive micromachined ultrasonic transducer;;dynamic performance;;simulation;;testing;;detecting 中文刊名：CGJS 英文刊名：Chinese Journal of Sensors and Actuators 机构：太原科技大学计算机科学与技术学院;北京华龙通科技有限公司;北方工业大学计算机学院; 出版日期：2019-04-15 出版单位：传感技术学报 年：2019 期：v.32 基金：国家杰出青年科学基金项目(61525107);; 山西省中科院科技合作项目(20141101001);; 山西省应用基础研究计划项目(201801D221179);; 太原科技大学博士科研启动项目(20162036);太原科技大学教学改革与研究项目(201937);; 教育部产学合作协同育人项目(201801121002,201801121011);; 全国高等学校计算机教育研究会2019年度课题(CERACU2019R02);; 语种：中文; 页：CGJS201904005 页数：7 CN：04 ISSN：32-1322/TN 分类号：25-31

摘要

目前CMUT以其频带宽、易集成阵列化、无需匹配层、灵敏度高等优点成为水下超声传感器在研究及应用推广方面的一个新热点。主要开展了对CMUT动态性能的仿真与测试。首先利用SIMULINK对CMUT发射和接收性能进行动态仿真分析,并建立实验平台,以仿真结果作为依据对CMUT动态性能进行了测试,同时实现了CMUT水下初步探测。本研究为CMUT的设计提供了有利的依据。
        At present,CMUT has become a new hotspot in the research and application of underwater ultrasonic sensors due to its metrics,such as wide bandwidth,easy integration of arrays,no matching layer and high sensitivity.The dynamic performance of CMUT was simulated and tested. Firstly,the CMUT transmit or receive performance was simulated and analyzed by SIMULINK. Then the experimental platform was built. According to the simulation results,dynamic performance of CMUT was tested. At the same time,the preliminary detecting of CMUT was realized. This Research provides favorable basis for the design of CMUT.

引文

[1] Champika S,Jame G W S,Zhou Z,et al.Trapping,Separating,and Palpating Microbead Clusters in Droplets and Flows Using Capacitive Micromachined Ultrasonic Transducers(CMUTs)[J].Sensors & Actuators:B.Chemical,2018,(276):481-488.
    [2] Oralkan ?,Ergun A S,Johnson J A,et al.Capacitive Micromachined Ultrasonic Transducers:Next-Generation Arrays for Acoustic Imaging?[J].IEEE Trans Ultrason Ferroelectr Freq Control,2002,49:1596-1610.
    [3] 张慧,郑冠儒,李志,等.空气耦合电容式微超声换能器线阵设计与测试[J].传感技术学报,2018,5(31):803-808.
    [4] 张睿,潘理虎,陈立潮,等.基于形态学串行运算的CMUT水下扇形扫描探测[J].传感技术学报,2018,31(2):1-7.
    [5] Zhang R,Zhang W D,He C D,et al.Design of Capacitive Micromachined Ultrasonic Transducer(CMUT)Linear Array for Underwater Imaging[J].Sensor Review,2015,6(1):77-85.
    [6] Zhang R,Xue C Y,He C D,et al.Design and Performance Analysis of Capacitive Micromachined Ultrasonic Transducer(CMUT)Array for Underwater Imaging[J].Microsystem Technol,2016,22(12):2939-2947.IEEE International Conference on Computer Vision.2015:2965-2973.
    [7] 王朝杰,王红亮,段培盛,等.电容式微机械超声换能器封装设计[J].压电与声光,2017,4(39):624-628.
    [8] Peake W H.The Lowest Frequency of a Water-Loaded Circular Plate[J].Acoustic Society of America,1954,(26):166-168.
    [9] Song J L,Xue C Y,He C D,et al.Capacitive Micromachined Ultrasonic Transducers(CMUTs)for Underwater Imaging Applications[J].Sensors,2015,15:23205-23217.
    [10] Mu L F,Zhang W D,He C D,et al.Design and Test of a Capacitance Detection Circuit Based on a Transimpedanceamplifier[J].Journal of Semiconductors,2015,7:075007(1-8).
    [11] Miao J,Wang H,Li P,et al.Glass-SOI-Based Hybrid-Bonded Capacitive Micromachined Ultrasonic Transducer with Hermetic Cavities for Immersion Applications[J].IEEE Journal of Microelectromechanical Systems,2016,25(5):976-986.
    [12] 官志坚.电容式微加工超声传感器(CMUT)仿真与制造流程[D].天津:天津大学,2007:24-29.
    [13] Ira O W,Mario K,Khuri-Yakub B T,et al.Analytically Calculating Membrane Displacement and the Equivalent Circuit Model of a Circular CMUT Cell[C]//IEEEInternational Ultrasonics Symposium Proceedings,2008:2111-2114.