单晶硅直拉炉用炭/炭埚帮的侵蚀机理探讨
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摘要
埚帮是单晶硅直拉炉中最重要的结构损耗件,随着直拉法热场尺寸的不断增大,主流单晶硅制造企业已经大批量采用炭/炭复合材料埚帮替代石墨埚帮。采用针刺法制备毛坯预制体,经化学气相沉积、树脂浸渍炭化增密和高温纯化处理后制成炭/炭复合材料埚帮。根据热场温度及元素分析炭/炭埚帮侵蚀破坏的机理,对使用后的炭/炭埚帮断口进行观察分析,结合反应机理进而推断影响埚帮使用寿命的主要因素,为提高炭/炭埚帮寿命的设计提供参考。
The crucible is one of the most important structural loss of silicon Czochralski furnace,with thermal field size of Czochralski furnace increasing,the mainstream silicon manufacturing companies are using large quantities of carbon/carbon composites to replace graphite crucible。Using the following method to made carbon/carbon composite for crucible that blank preform prepared by acupuncture method,by chemical vapor infiltration,impregnation carbonization to increasing density and high temperature purification treatment.According to the mechanism of the thermal field temperature and elemental analysis carbon crucible erosion,on the use of carbon crucible for fracture were observed and analyzed.With the reaction mechanism and then to infer the main factors influence the service life of the crucible,to improve carbon crucible help life provides reference for the design.
The crucible is one of the most important structural loss of silicon Czochralski furnace,with thermal field size of Czochralski furnace increasing,the mainstream silicon manufacturing companies are using large quantities of carbon/carbon composites to replace graphite crucible。Using the following method to made carbon/carbon composite for crucible that blank preform prepared by acupuncture method,by chemical vapor infiltration,impregnation carbonization to increasing density and high temperature purification treatment.According to the mechanism of the thermal field temperature and elemental analysis carbon crucible erosion,on the use of carbon crucible for fracture were observed and analyzed.With the reaction mechanism and then to infer the main factors influence the service life of the crucible,to improve carbon crucible help life provides reference for the design.
引文
[1]苏君明,周绍建,李瑞珍,等,工程应用C/C复合材料的性能分析与展望[J].新型炭材料,2015,30(2):106-113.
[2]徐远志.光伏产业现状分析及展望[J].新型炭材料,2014,43(5):48-53.
[3]孟凡君.国家政策扶持光伏产业持续回暖[N].中国工业报20160223:A03.
[4]刘立新,罗平,李春,等,单晶硅生长原理及工艺[J].长春理工大学学报2009,32(4):569-573.
[5]蒋建纯,周九宁,浦保健,等,炭/炭复合材料制造硅晶体生长坩埚初探[J].炭素,2004,(2):3-7.
[6]魏唱蕾.TDL-150型单晶炉炉体设计及炉内温场和氩气流场的数值模拟[D].西安理工大学2007:1-58.
[7]张青莲.无机化学丛书第三卷[M].科学出版社,1988,1-545.
[2]徐远志.光伏产业现状分析及展望[J].新型炭材料,2014,43(5):48-53.
[3]孟凡君.国家政策扶持光伏产业持续回暖[N].中国工业报20160223:A03.
[4]刘立新,罗平,李春,等,单晶硅生长原理及工艺[J].长春理工大学学报2009,32(4):569-573.
[5]蒋建纯,周九宁,浦保健,等,炭/炭复合材料制造硅晶体生长坩埚初探[J].炭素,2004,(2):3-7.
[6]魏唱蕾.TDL-150型单晶炉炉体设计及炉内温场和氩气流场的数值模拟[D].西安理工大学2007:1-58.
[7]张青莲.无机化学丛书第三卷[M].科学出版社,1988,1-545.