基于微机电系统技术的薄膜离子源制备与实验研究

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英文篇名：Fabrication and Experiment on Surface Flashover Ion Source Based on Micro-electro-mechanical System Technology 作者：王亚军 ; 徐翱 ; 席仕伟 ; 杨林 ; 金大志 ; 陈磊 英文作者：WANG Yajun;XU Ao;XI Shiwei;YANG Lin;JIN Dazhi;CHEN Lei;Institute of Electronic Engineering, China Academy of Engineering Physics; 关键词：薄膜离子源 ; 微机电系统 ; 离子电流 英文关键词：surface flashover ion source;;micro-electro-mechanical system;;ion current 中文刊名：YZJS 英文刊名：Atomic Energy Science and Technology 机构：中国工程物理研究院电子工程研究所; 出版日期：2019-04-13 14:46 出版单位：原子能科学技术 年：2019 期：v.53 基金：国家自然科学基金资助项目(61804144);; 中国工程物理研究院超精密加工技术重点实验室基金资助项目(ZZ16001) 语种：中文; 页：YZJS201907025 页数：7 CN：07 ISSN：11-2044/TL 分类号：192-198

摘要

基于微机电系统技术的薄膜离子源是芯片型中子发生器的关键部件。本文通过在陶瓷基底上制备图形化钛膜并利用3层陶瓷重叠的方法获得了薄膜离子源样品,采用平板探针法和激光共聚焦显微镜得到了薄膜离子源的离子电流及其电极烧蚀特性,并进一步利用高速相机和光谱仪得到了薄膜离子源的放电发光演化图像和等离子体组分信息,最后基于实验结果分析揭示了薄膜离子源放电的工作机制。
        The surface flashover ion source based on micro-electro-mechanical system technology is the critical component of the chip type neutron generator. In this paper, patterned titanium films were prepared on ceramic substrates and surface flashover ion source samples were obtained by overlapping three layers of ceramics. The ion current and electrode ablation characteristics of the surface flashover ion source were obtained by the plate probe and laser confocal microscope, and the discharge evolution image and the emission spectra of the surface flashover ion source were obtained by the high-speed camera and the spectrometer. Finally, based on the experimental results, the discharge mechanism of surface flashover ion source is revealed.

引文

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