微沟槽周期结构表面的磁性复合流体微纳光整研究及实验教学装置应用

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英文篇名：Polishing of Periodic Structural Surface of Micro Grooves by Magnetic Compound Fluid and Its Application in Experimental Teaching Equipments 作者：姜晨 ; 张瑞 ; 郝宇 英文作者：JIANG Chen;ZHANG Rui;HAO Yu;School of Mechanical Engineering, University of Shanghai for Science and Technology; 关键词：微纳加工 ; 机械制造 ; 微沟槽 ; 实验教学装置 ; 磁性复合流体 英文关键词：micro-nano machining;;mechanical manufacturing;;micro grooves;;experimental teaching equipment;;magnetic compound fluid 中文刊名：HDGY 英文刊名：Journal of University of Shanghai for Science and Technology 机构：上海理工大学机械工程学院; 出版日期：2019-02-15 出版单位：上海理工大学学报 年：2019 期：v.41;No.188 基金：国家自然科学基金资助项目(51475310);; 上海理工大学教师教学发展研究项目(CFTD17026Y) 语种：中文; 页：HDGY201901013 页数：5 CN：01 ISSN：31-1739/T 分类号：88-92

摘要

针对磁性复合流体黏度可控的特性,研究一种微纳沟槽表面可控抛光加工方法及工艺,实现低成本、可控微纳结构表面加工技术,并将其应用于微纳加工实验教学。采用磁性复合流体作为抛光液,设计端面式和圆周面式两种磁性复合流体抛光机构;根据周期性微米级沟槽表面结构特点,采用圆周面式磁性复合流体抛光机构进行微结构表面抛光加工实验;设计加工工艺,通过实验对比微沟槽周期结构表面加工效果,验证了实验装置及微结构可控抛光加工方法的有效性,实现微沟槽周期结构表面材料可控去除加工。该装置结构紧凑,使用与维护成本低,有效填补面向机械专业制造类课程的微纳加工实验教学装置技术空白。
        Based on the viscosity control of magnetic compound fluid, a method and process for the polishing of micro-nano structural surfaces were presented in order to obtain a micro-nano machining technology with low cost and controllabitity and apply it in the teaching experiment of micro-nano machining. Using the magnetic compound fluid as the polishing fluid, two kinds of magnetic compound fluid polishing equipments were designed. According to the characteristics of the surface structure of micro grooves, the circumferential type magnetic compound fluid polishing equipment was used to perform the microstructure surface finishing experiments. By designing the polishing process and comparing the effect of the surface machining of micro groove fringes, the experimental device and the method for microstructure finishing were validated. The device for magnetic compound fluid polishing has a simple structure, low cost in use and maintenance, which is suitable for widely use in the experimental teaching of micro-nano machining in mechanical manufacturing courses.

引文

[1]王凌云,杜晓辉,张方方,等.航空微机电系统非硅材料微纳加工技术[J].航空制造技术,2016(17):16-22.
    [2]张楠,王敏锐.微纳米加工工艺数据库的设计研究[J].制造业自动化,2014,36(9):139-142.
    [3]李文妹,姜晨,许继鹏,等.光学玻璃磁性复合流体抛光液研究[J].激光与光电子学进展,2016,53(6):062202.
    [4]焦黎,吴勇波,郭会茹.磁场分布对磁性复合流体抛光材料去除率的影响[J].机械工程学报,2013,49(17):79-84.
    [5]SHIMADA K,WU Y B,WONG Y C.Effect of magnetic cluster and magnetic field on polishing using magnetic compound fluid(MCF)[J].Journal of Magnetism and Magnetic Materials,2003,262(2):242-247.
    [6]GUO H R,WU Y B,LU D,et al.Effects of pressure and shear stress on material removal rate in ultra-fine polishing of optical glass with magnetic compound fluid slurry[J].Journal of Materials Processing Technology,2014,214(11):2759-2769.
    [7]顾佩华.新工科与新范式:概念、框架和实施路径[J].高等工程教育研究,2017(6):1-12.
    [8]林健.面向未来的中国新工科建设[J].清华大学教育研究,2017,38(2):26-35.
    [9]张海生.我国高校“新工科”建设的实践探索与分类发展[J].重庆高教研究,2018,6(1):41-55.
    [10]王娜君,王杰,李旦,等.基于工程能力培养的实验教学改革探索[J].教育探索,2011(10):49-50.
    [11]YANG Y,GAO S M,CHEN K Y,et al.Vibration analysis and development of an ultrasonic elliptical vibration tool based on a portal frame structure[J].Precision Engineering,2017,50:421-432.
    [12]GUO P,LU Y,EHMANN K F,et al.Generation of hierarchical micro-structures for anisotropic wetting by elliptical vibration cutting[J].CIRP Annals,2014,63(1):553-556.