LTCC用钌系电阻浆料特性分析
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摘要
随着低温共烧陶瓷(Low Temperature Co-fired Ceramic, LTCC)技术优势逐步被大家所认识,其广阔的应用前景以及巨大的市场需求驱动着国内厂商开始关注LTCC材料的开发,涌现出了不同品种的LTCC生瓷带和浆料,但由于缺乏工程化应用验证和可靠性考核,离货架产品尚有不少距离。文中对国产钌系电阻浆料在X波段收/发组件中的应用进行了深入研究,分析了钌系电阻浆料的工艺性能、材料匹配性能、微波性能以及可靠性能,并采用国产钌系电阻浆料研制了X波段T/R组件,性能指标满足相控阵雷达技术要求,为微波LTCC材料的国产化进行了有益的探索。
With LTCC technology advantages of low temperature co-fired ceramic(LTCC) being gradually recognized, wide application prospects and huge market demands have driven domestic manufacturers to focus on the development of LTCC materials. Although a variety of LTCC green tapes and pastes have been developed, there is still a gap from the shelf for the lack of engineering verification and reliability assessment. In this paper, the application of domestically produced ruthenium system resistor paste in X-band T/R module is intensively studied. The technological property,matching property with other materials,microwave property and reliability of this ruthenium system resistor paste are described. Furthermore, X-band T/R modules based on this ruthenium system resistor paste are fabricated, and satisfy the technique standard of phased array radar. This study provides useful results for the localization of LTCC materials.
With LTCC technology advantages of low temperature co-fired ceramic(LTCC) being gradually recognized, wide application prospects and huge market demands have driven domestic manufacturers to focus on the development of LTCC materials. Although a variety of LTCC green tapes and pastes have been developed, there is still a gap from the shelf for the lack of engineering verification and reliability assessment. In this paper, the application of domestically produced ruthenium system resistor paste in X-band T/R module is intensively studied. The technological property,matching property with other materials,microwave property and reliability of this ruthenium system resistor paste are described. Furthermore, X-band T/R modules based on this ruthenium system resistor paste are fabricated, and satisfy the technique standard of phased array radar. This study provides useful results for the localization of LTCC materials.
引文
[1] WANG G, BARLOW F, ELSHABINI A, et al. Modeling and control of resistance tolerance for embedded resistors in LTCC[C]// Electronic Components and Technology Conference. San Diego, CA, USA, 2002: 516-525.
[2] GERKE R D, ATOR D. Embedded resistors and capacitors in organic and inorganic substrates[C]// Aerospace Conference. Big Sky,Montana, USA, 2006: 1-17.
[3] CHO Y H, KIM J W, PARK Y H, et al. An ultra-miniaturized transceiver module for bluetooth applications using 3-D LTCC system-on-package technology[C]// IEEE MTT-S International Microwave Symposium Digest. Atlanta, Georgia, USA, 2008: 1-4.
[4] 刘永宁. 微波多层电路与低温共烧陶瓷(LTCC)[J]. 现代雷达, 2000(6): 83-86.
[5] 钟慧, 张怀武. 低温共烧结陶瓷(LTCC): 特点、应用及问题[J]. 磁性材料及器件, 2003, 34(4): 33-35, 42.
[6] 龙承毅, 张树人, 周晓华, 等. CaO-B2O3-SiO2系LTCC基板材料的制备及烧结[J]. 电子元件与材料, 2011, 30(7): 29-31.
[7] 金勿毁, 陈立桥, 李世鸿, 等. 金铂钯合金粉末的特性对低温共烧电子浆料性能的影响[J]. 贵金属, 2015, 36(1): 1-5.
[8] 陈力春, 堵永国, 陈兴宇, 等. LTCC流延生瓷带的力学性能[J]. 电子元件与材料, 2009, 28(12): 64-67.
[9] 罗慧, 李世鸿, 刘继松, 等. 化学法制备超细玻璃粉及其在LTCC用厚膜电阻浆料中的应用[J]. 贵金属, 2014, 35(3): 24-28.
[2] GERKE R D, ATOR D. Embedded resistors and capacitors in organic and inorganic substrates[C]// Aerospace Conference. Big Sky,Montana, USA, 2006: 1-17.
[3] CHO Y H, KIM J W, PARK Y H, et al. An ultra-miniaturized transceiver module for bluetooth applications using 3-D LTCC system-on-package technology[C]// IEEE MTT-S International Microwave Symposium Digest. Atlanta, Georgia, USA, 2008: 1-4.
[4] 刘永宁. 微波多层电路与低温共烧陶瓷(LTCC)[J]. 现代雷达, 2000(6): 83-86.
[5] 钟慧, 张怀武. 低温共烧结陶瓷(LTCC): 特点、应用及问题[J]. 磁性材料及器件, 2003, 34(4): 33-35, 42.
[6] 龙承毅, 张树人, 周晓华, 等. CaO-B2O3-SiO2系LTCC基板材料的制备及烧结[J]. 电子元件与材料, 2011, 30(7): 29-31.
[7] 金勿毁, 陈立桥, 李世鸿, 等. 金铂钯合金粉末的特性对低温共烧电子浆料性能的影响[J]. 贵金属, 2015, 36(1): 1-5.
[8] 陈力春, 堵永国, 陈兴宇, 等. LTCC流延生瓷带的力学性能[J]. 电子元件与材料, 2009, 28(12): 64-67.
[9] 罗慧, 李世鸿, 刘继松, 等. 化学法制备超细玻璃粉及其在LTCC用厚膜电阻浆料中的应用[J]. 贵金属, 2014, 35(3): 24-28.