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基于过程免疫时间的半导体企业电压暂降经济损失预评估方法
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  • 英文篇名:Economic losses pre-evaluation of semiconductor enterprise due to voltage sags based on process immunity time
  • 作者:张旭彬 ; 张逸 ; 张孔林 ; 李为明 ; 郭庆波 ; 李俭华
  • 英文作者:ZHANG Xu-bin;ZHANG Yi;ZHANG Kong-lin;LI Wei-ming;GUO Qing-bo;LI Jian-hua;College of Electrical Engineering and Automation,Fuzhou University;State Grid Fujian Maintenance Company;Shanghai Hekai Electric Technology Co.Ltd.;
  • 关键词:半导体 ; 电压暂降 ; 经济损失预评估 ; 过程免疫时间 ; 生产过程中断
  • 英文关键词:semiconductor;;voltage sag;;economic losses pre-evaluation;;process immunity time;;production process trip
  • 中文刊名:DGDN
  • 英文刊名:Advanced Technology of Electrical Engineering and Energy
  • 机构:福州大学电气工程与自动化学院;国网福建检修公司;上海合凯电气科技有限公司;
  • 出版日期:2018-04-11 16:00
  • 出版单位:电工电能新技术
  • 年:2018
  • 期:v.37;No.180
  • 基金:国家高技术研究发展计划(863计划)项目(2014AA051901)
  • 语种:中文;
  • 页:DGDN201806006
  • 页数:7
  • CN:06
  • ISSN:11-2283/TM
  • 分类号:46-52
摘要
电压暂降已成为最严重的电能质量问题,给用户带来了极大的经济损失。国内外目前针对半导体企业电压暂降经济损失预评估的研究较少,为此本文提出一种基于过程免疫时间的实用评估方法。首先,以液晶屏面板为研究对象,应用故障树分析法对半导体复杂的生产过程进行分解以确定关键设备的逻辑连接关系;其次,结合实测的设备过程免疫时间和逻辑连接关系推算生产过程的综合过程免疫时间;再次,依据历史电压暂降监测数据和综合过程免疫时间预测生产过程中断次数;最后,结合生产过程中断次数和单次中断经济损失预估用户总经济损失值。实例分析结果验证了所提方法符合工程实际,具备可行性,对新投建的半导体生产线选择电压暂降治理方案、制定生产计划具有参考意义。
        Voltage sags have become the most serious power quality problems,which bring great economic losses to power users. In view of the lack of research on predicting economic losses due to voltage sags in semiconductor industry at home and abroad so far,a practical pre-evaluation method based on process immunity iime( PIT) is proposed. Firstly,to determine the logical connection between key devices,the production process of semiconductor has been decomposed in the method of fault tree by the example of TFT-LCD. Secondly,the PITs of the key devices have been obtained by the measured data,and the comprehensive PITs of production process are deducted by the logical connection between key devices and the PITs of key device. Then,according to historical data of voltage sags and comprehensive PIT curve,the number of production process trips can be predicted. Finally,according to the number of production process trips and economic losses for single process trip,the whole economic losses value can be calculated. The results of case analysis verify the correctness and feasibility of the method. This method has important guidance and reference value for semiconductor enterprise in selecting voltage sag treatment scheme and formulating production plan,which conforms to engineering practice.
引文
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