电容式角位移传感器有限元仿真及拓扑优化研究
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摘要
以一种高精度电容式角位移传感器的敏感元件为模型,通过有限元法分析电容式角位移传感器敏感元件在机械角度、厚度和弹性模量变化下的应变。通过分析应变结果获得传感器的测量范围,通过改变敏感元件的厚度可以扩大或缩小其测量范围。最后采用拓扑优化方法对敏感元件的机械结构进行了最优化设计,得到其拓扑最优化结构,可以对传感器敏感元件的结构设计提供参考。
Sensitive element of a high precision capacitive angular displacement sensor was used as the model,the finite element method was used to analyze the strain that sensitive element of the capacitive angular displacement sensor displays under the change of mechanical angle,thickness and elastic modulus.The measurement range of the sensor was obtained through the analysis of the strain,and the measurement range can be enlarged or reduced by changing the thickness of the sensing element.Finally,the optimization design of the mechanical structure of the sensitive elements was carried out by using the topology optimization method,and a new topology optimization structure was obtained which can provide reference for the structural design of the sensor's sensing element.
Sensitive element of a high precision capacitive angular displacement sensor was used as the model,the finite element method was used to analyze the strain that sensitive element of the capacitive angular displacement sensor displays under the change of mechanical angle,thickness and elastic modulus.The measurement range of the sensor was obtained through the analysis of the strain,and the measurement range can be enlarged or reduced by changing the thickness of the sensing element.Finally,the optimization design of the mechanical structure of the sensitive elements was carried out by using the topology optimization method,and a new topology optimization structure was obtained which can provide reference for the structural design of the sensor's sensing element.
引文
[1]彭鹏,邵淦,杨恩臻.电容式角位移传感器[J].电子技术与软件工程,2014(15):260.
[2]曹得胜.光电侦查平台中电容式角位传感器的应用[J].信息通信,2016(1):31-32.
[3]侯亚宾,卜雄洙,孙斌.微小电容检测系统的设计及应用[J].国外电子测量技术,2015(12):87-90.
[4]徐英,张涛,李敏雪,等.电容式角位移传感器电场有限元仿真研究[J].仪器仪表学报,2004(4):512-515.
[5]黄次方,唐小平,陈家璧.一种新型两维水平传感器[J].光学仪器,1997(6):36-41.
[6]彭鹏.二维自感知电容式角位移测量系统研究[D].合肥:合肥工业大学,2015.
[2]曹得胜.光电侦查平台中电容式角位传感器的应用[J].信息通信,2016(1):31-32.
[3]侯亚宾,卜雄洙,孙斌.微小电容检测系统的设计及应用[J].国外电子测量技术,2015(12):87-90.
[4]徐英,张涛,李敏雪,等.电容式角位移传感器电场有限元仿真研究[J].仪器仪表学报,2004(4):512-515.
[5]黄次方,唐小平,陈家璧.一种新型两维水平传感器[J].光学仪器,1997(6):36-41.
[6]彭鹏.二维自感知电容式角位移测量系统研究[D].合肥:合肥工业大学,2015.