基于飞秒光学频率梳相关探测的绝对测距
|
摘要
提出了一种基于飞秒光学频率梳相关探测的绝对距离测量方法,通过检测测量信号与参考信号的相关条纹,实现了绝对距离测量。研究了一阶相关函数的测量模型,建立了基于非平衡迈克耳孙干涉光路的测量系统,通过拟合一阶相关函数包络并提取其峰值精确判断脉冲重合位置,获得了被测距离。设计并配合长导轨进行了3 m的绝对距离测量实验,并与商用干涉仪测量结果进行实时比对。基于大量实验数据,针对环境因素及系统误差进行了分析,并进行了误差消除与补偿。研究结果表明,所提方法在500 min长期测量中,在3 m的测量范围内的最大测量误差为5.85μm,测量标准差为2.20μm。
An absolute distance measurement method is proposed based on coherent detection by a femtosecond optical frequency comb. The absolute distance measurement is realized by the detection of coherence patterns between measurement signals and reference signals. The measurement model of the first-order coherence function is studied. The measurement system based on an unbalanced Michelson interferometer is constructed. The target distance is obtained by the envelope fitting of the first-order coherence function and by the high-precision extraction of peaks on the overlapped pulse positions. The 3 m absolute distance measurement experiment on a long range guide is designed and a real-time comparison with those by the commercial interferometers is conducted. In addition, the ambient factors and system errors are analyzed based on a large number of experimental results. The errors are eliminated and compensated. The results show that in the 500 min long term measurement process, the maximum measurement error is 5.85 μm and the standard deviation is 2.20 μm as for the proposed method with a measurement range of 3 m.
An absolute distance measurement method is proposed based on coherent detection by a femtosecond optical frequency comb. The absolute distance measurement is realized by the detection of coherence patterns between measurement signals and reference signals. The measurement model of the first-order coherence function is studied. The measurement system based on an unbalanced Michelson interferometer is constructed. The target distance is obtained by the envelope fitting of the first-order coherence function and by the high-precision extraction of peaks on the overlapped pulse positions. The 3 m absolute distance measurement experiment on a long range guide is designed and a real-time comparison with those by the commercial interferometers is conducted. In addition, the ambient factors and system errors are analyzed based on a large number of experimental results. The errors are eliminated and compensated. The results show that in the 500 min long term measurement process, the maximum measurement error is 5.85 μm and the standard deviation is 2.20 μm as for the proposed method with a measurement range of 3 m.
引文
[1] Ye S H, Zhu J G, Zhang Z L, et al. Status and development of large-scale coordinate measurement research[J]. Acta Metrologica Sinica, 2008, 29(4A):1-6.叶声华,邾继贵,张滋黎,等.大空间坐标尺寸测量研究的现状与发展[J].计量学报,2008, 29(4A):1-6.
[2] Zhang F M, Qu X H, Dai J F, et al. A method of precision evaluation for field large-scale measurement[J]. Acta Optica Sinica, 2008, 28(11):2159-2163.张福民,曲兴华,戴建芳,等.一种现场大尺寸测量精度的评价方法[J].光学学报,2008, 28(11):2159-2163.
[3] Hu W C, Qiu Z R, Zhang G X. In-situ calibration method for large-scale space angle optical measurement system[J]. Chinese Journal of Lasers,2012, 39(10):1008006.胡文川,裘祖荣,张国雄.大尺寸空间角度检测系统的现场标定方法[J].中国激光,2012, 39(10):1008006.
[4] Kim S W. Combs rule[J]. Nature Photonics, 2009,3(6):313-314.
[5] Luo J, Yang S, Hao Q, et al. Precise locking the repetition rate of a SESAM mode-locking all polarization maintaining fiber laser[J]. Acta Optica Sinica, 2017, 37(2):0206003.罗浆,杨松,郝强,等.SESAM锁模全保偏光纤激光器重复频率的精确锁定[J].光学学报,2017, 37(2):0206003.
[6] Hao Q, Wang Y F, Luo P,et al. Self-starting dropout-free harmonic mode-locked soliton fiber laser with a low timing jitter[J]. Optics Letters, 2017, 42(12):2330-2333.
[7] Cundiff S T, Ye J. Femtosecond optical frequency combs[J]. Review of Modern Physics, 2003, 75(1):325-342.
[8] Minoshima K, Matsumoto H. High-accuracy measurement of 240-m distance in an optical tunnel by use of a compact femtosecond laser[J]. Applied Optics, 2000, 39(30):5512-5517.
[9] Schuhler N, Salvade Y, Leveque S, et al.Frequency-comb-referenced two-wavelength source for absolute distance measurement[J]. Optics Letters, 2006, 31(21):3101-3103.
[10] Coddington I, Swann W C, Nenadovic L, et al.Rapid and precise absolute distance measurements at long range[J]. Nature Photonics, 2009, 3(6):351-356.
[11] Ye J. Absolute measurement of a long, arbitrary distance to less than an optical fringe[J]. Optics Letters, 2004, 29(10):1153-1155.
[12] Wei D, Takahashi S, Takamasu K, et al. Analysis of the temporal coherence function of a femtosecond optical frequency comb[J]. Optics Express, 2009, 17(9):7011-7018.
[13] Lee J, Kim Y J, Lee K, et al. Time-of-flight measurement with femtosecond light pulses[J].Nature Photonics, 2010, 4(10):716-720.
[14] Wei D, Takahashi S, Takamasu K,et al. Time-offlight method using multiple pulse train interference as a time recorder[J]. Optics Express, 2011,19(6):4881-4889.
[15] Wang G C, Yan S H, Yang J, et al. Theoretical modeling analysis for precise space ranging based on cross-correlation of femtosecond optical frequency comb[J]. Acta Optica Sinica, 2015,35(4):0412002.王国超,颜树华,杨俊,等.基于飞秒光梳互相关的空间精密测距理论模型分析[J].光学学报,2015,35(4):0412002.
[16] Zhang Y Y, Guo Y, Ren Y J, et al. Study of drifterror and its compensation method in absolute distance measurement by optical frequency scanning interferometry[J]. Acta Optica Sinica, 2017, 37(12):1212001.张雅雅,郭寅,任永杰,等.光频扫描干涉绝对测距漂移误差与补偿方法研究[J].光学学报,2017, 37(12):1212001.
[17] Wang G C, Tan L L, Yan S H, et al. Synchronous phase demodulation for real-time absolute distance measurement based on optical comb multi-wavelength interferometry[J]. Acta Optica Sinica, 2017, 37(1):0112003.王国超,谭立龙,颜树华,等.基于光梳多波长干涉实时绝对测距的同步相位解调[J].光学学报,2017,37(1):0112003.
[18] Wu T F, Liang Z G, Yan J H. Theoretical study on air dispersion compensation in the distance measurement of femtosecond pulsed laser[J].Chinese Journal of Lasers, 2012, 39(12):1208004.武腾飞,梁志国,严家骅.飞秒激光测距中空气色散补偿理论研究[J].中国激光,2012,39(12):1208004.
[19] An W N, Zhang F M, Wu H Z, et al. Absolute distance measurement method based on frequencydomain interference using a femtosecond optical frequency comb[J]. Chinese Journal of Scientific Instrument, 2014, 35(11):2458-2465.安慰宁,张福民,吴翰钟,等.一种基于飞秒光频梳频域干涉的绝对测距方法[J].仪器仪表学报,2014,35(11):2458-2465.
[20] Wu H Z, Cao S Y, Zhang F M, et al. A new method of measuring absolute distance by using optical frequency comb[J]. Acta Physica Sinica, 2014, 63(10):100601.吴翰钟,曹士英,张福民,等.一种光学频率梳绝对测距的新方法[J].物理学报,2014, 63(10):100601.
[21] Zhuge J C, Xing S J, Gao J S. Theoretical analysis of arbitrary and absolute length measurement by using femtosecond optical frequency comb[J]. Acta Optica Sinica, 2016, 36(1):0112004.诸葛晶昌,邢书剑,高建树.飞秒光频梳的任意长绝对测距理论分析[J].光学学报,2016, 36(1):0112004.
[22] Hua Q, Zhou W H, Xu Y. Review of absolute distance measurement with femtosecond optical frequency comb[J]. Metrology&Measurement Technology, 2012, 32(1):1-5, 14.华卿,周维虎,许艳.飞秒激光频率梳绝对测距技术综述[J].计测技术,2012, 32(1):1-5, 14.
[23] Liu Y, Yang L H, Guo Y, et al. Optimizationmethods of pulse-to-pulse alignment using femtosecond pulse laser based on temporal coherence function for practical distance measurement[J].Optics and Lasers in Engineering, 2018, 101:35-43.
[24] Xu Y. Theoretical study on cross-correlation signal of a femtosecond pulse laser in air[J]. Acta PhotonicaSinica, 2017, 46(4):0414002.许艳.空气中飞秒脉冲激光器互相关信号的理论研究[J].光子学报,2017, 46(4):0414002.
[25] Ciddor P E. Refractive index of air:New equations for the visible and near infrared[J]. Applied Optics,1996, 35(9):1566-1573.
[2] Zhang F M, Qu X H, Dai J F, et al. A method of precision evaluation for field large-scale measurement[J]. Acta Optica Sinica, 2008, 28(11):2159-2163.张福民,曲兴华,戴建芳,等.一种现场大尺寸测量精度的评价方法[J].光学学报,2008, 28(11):2159-2163.
[3] Hu W C, Qiu Z R, Zhang G X. In-situ calibration method for large-scale space angle optical measurement system[J]. Chinese Journal of Lasers,2012, 39(10):1008006.胡文川,裘祖荣,张国雄.大尺寸空间角度检测系统的现场标定方法[J].中国激光,2012, 39(10):1008006.
[4] Kim S W. Combs rule[J]. Nature Photonics, 2009,3(6):313-314.
[5] Luo J, Yang S, Hao Q, et al. Precise locking the repetition rate of a SESAM mode-locking all polarization maintaining fiber laser[J]. Acta Optica Sinica, 2017, 37(2):0206003.罗浆,杨松,郝强,等.SESAM锁模全保偏光纤激光器重复频率的精确锁定[J].光学学报,2017, 37(2):0206003.
[6] Hao Q, Wang Y F, Luo P,et al. Self-starting dropout-free harmonic mode-locked soliton fiber laser with a low timing jitter[J]. Optics Letters, 2017, 42(12):2330-2333.
[7] Cundiff S T, Ye J. Femtosecond optical frequency combs[J]. Review of Modern Physics, 2003, 75(1):325-342.
[8] Minoshima K, Matsumoto H. High-accuracy measurement of 240-m distance in an optical tunnel by use of a compact femtosecond laser[J]. Applied Optics, 2000, 39(30):5512-5517.
[9] Schuhler N, Salvade Y, Leveque S, et al.Frequency-comb-referenced two-wavelength source for absolute distance measurement[J]. Optics Letters, 2006, 31(21):3101-3103.
[10] Coddington I, Swann W C, Nenadovic L, et al.Rapid and precise absolute distance measurements at long range[J]. Nature Photonics, 2009, 3(6):351-356.
[11] Ye J. Absolute measurement of a long, arbitrary distance to less than an optical fringe[J]. Optics Letters, 2004, 29(10):1153-1155.
[12] Wei D, Takahashi S, Takamasu K, et al. Analysis of the temporal coherence function of a femtosecond optical frequency comb[J]. Optics Express, 2009, 17(9):7011-7018.
[13] Lee J, Kim Y J, Lee K, et al. Time-of-flight measurement with femtosecond light pulses[J].Nature Photonics, 2010, 4(10):716-720.
[14] Wei D, Takahashi S, Takamasu K,et al. Time-offlight method using multiple pulse train interference as a time recorder[J]. Optics Express, 2011,19(6):4881-4889.
[15] Wang G C, Yan S H, Yang J, et al. Theoretical modeling analysis for precise space ranging based on cross-correlation of femtosecond optical frequency comb[J]. Acta Optica Sinica, 2015,35(4):0412002.王国超,颜树华,杨俊,等.基于飞秒光梳互相关的空间精密测距理论模型分析[J].光学学报,2015,35(4):0412002.
[16] Zhang Y Y, Guo Y, Ren Y J, et al. Study of drifterror and its compensation method in absolute distance measurement by optical frequency scanning interferometry[J]. Acta Optica Sinica, 2017, 37(12):1212001.张雅雅,郭寅,任永杰,等.光频扫描干涉绝对测距漂移误差与补偿方法研究[J].光学学报,2017, 37(12):1212001.
[17] Wang G C, Tan L L, Yan S H, et al. Synchronous phase demodulation for real-time absolute distance measurement based on optical comb multi-wavelength interferometry[J]. Acta Optica Sinica, 2017, 37(1):0112003.王国超,谭立龙,颜树华,等.基于光梳多波长干涉实时绝对测距的同步相位解调[J].光学学报,2017,37(1):0112003.
[18] Wu T F, Liang Z G, Yan J H. Theoretical study on air dispersion compensation in the distance measurement of femtosecond pulsed laser[J].Chinese Journal of Lasers, 2012, 39(12):1208004.武腾飞,梁志国,严家骅.飞秒激光测距中空气色散补偿理论研究[J].中国激光,2012,39(12):1208004.
[19] An W N, Zhang F M, Wu H Z, et al. Absolute distance measurement method based on frequencydomain interference using a femtosecond optical frequency comb[J]. Chinese Journal of Scientific Instrument, 2014, 35(11):2458-2465.安慰宁,张福民,吴翰钟,等.一种基于飞秒光频梳频域干涉的绝对测距方法[J].仪器仪表学报,2014,35(11):2458-2465.
[20] Wu H Z, Cao S Y, Zhang F M, et al. A new method of measuring absolute distance by using optical frequency comb[J]. Acta Physica Sinica, 2014, 63(10):100601.吴翰钟,曹士英,张福民,等.一种光学频率梳绝对测距的新方法[J].物理学报,2014, 63(10):100601.
[21] Zhuge J C, Xing S J, Gao J S. Theoretical analysis of arbitrary and absolute length measurement by using femtosecond optical frequency comb[J]. Acta Optica Sinica, 2016, 36(1):0112004.诸葛晶昌,邢书剑,高建树.飞秒光频梳的任意长绝对测距理论分析[J].光学学报,2016, 36(1):0112004.
[22] Hua Q, Zhou W H, Xu Y. Review of absolute distance measurement with femtosecond optical frequency comb[J]. Metrology&Measurement Technology, 2012, 32(1):1-5, 14.华卿,周维虎,许艳.飞秒激光频率梳绝对测距技术综述[J].计测技术,2012, 32(1):1-5, 14.
[23] Liu Y, Yang L H, Guo Y, et al. Optimizationmethods of pulse-to-pulse alignment using femtosecond pulse laser based on temporal coherence function for practical distance measurement[J].Optics and Lasers in Engineering, 2018, 101:35-43.
[24] Xu Y. Theoretical study on cross-correlation signal of a femtosecond pulse laser in air[J]. Acta PhotonicaSinica, 2017, 46(4):0414002.许艳.空气中飞秒脉冲激光器互相关信号的理论研究[J].光子学报,2017, 46(4):0414002.
[25] Ciddor P E. Refractive index of air:New equations for the visible and near infrared[J]. Applied Optics,1996, 35(9):1566-1573.