辐射状均压槽气浮支承静态性能仿真研究
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摘要
为提高静压气体轴承静态特性,设计了一种新型径向槽结构静压气体轴承。建立了径向槽结构静压气体轴承CFD模型,分析了径向槽结构深度、半径、数目、角度和供气压力对静压气体轴承承载能力和刚度的影响。静压气体轴承承载能力随槽结构深度、数目、角度和供气压力增加逐渐增大,槽结构数目和供气压力对其承载能力影响尤为显著;静压气体轴承承载能力随槽结构半径增加先增大后减小;静压气体轴承径向槽结构深度、数目、角度、半径和供气压力影响静压气体轴承刚度及其刚度峰值所在的气膜厚度,槽结构半径、数目和供气压力对刚度值影响显著,槽结构角度和半径对静压气体轴承刚度峰值所在的气膜厚度影响显著。辐射状均压槽气浮支承静态性能仿真研究,为高承载和高刚度气浮支承研究发展奠定了良好的理论基础。
In order to improve the static characteristics of aerostatic bearing,a new type of aerostatic bearing with radial groove structure is designed. The CFD model of aerostatic bearing with radial groove structure is established; the effects of the depth,radius,number of grooves,angle and pressure of radial groove structure on the bearing capacity and stiffness of aerostatic bearing are analyzed. The loading capacity of aerostatic bearings increases with the increase of groove structure depth,number,angle and pressure,and the number and pressure of groove structure have a significant effect on its loading capacity; the loading capacity of aerostatic bearings increases first and then decreases with the increase of groove structure radius; the depth,number and pressure of radial groove structure of aerostatic bearings angle,radius and pressure of supply gas affect the film thickness where the stiffness and its peak value of stiffness of aerostatic bearing. Radius,number of grooves and pressure of supply gas have significant influence on stiffness value. Angle and radius of groove structure have significant influence on the film thickness where the peak value of stiffness of aerostatic bearing lies. The static performance simulation lays a good theoretical foundation and technical support for the research and development of high loading capacity and high stiffness aerostatic bearing.
In order to improve the static characteristics of aerostatic bearing,a new type of aerostatic bearing with radial groove structure is designed. The CFD model of aerostatic bearing with radial groove structure is established; the effects of the depth,radius,number of grooves,angle and pressure of radial groove structure on the bearing capacity and stiffness of aerostatic bearing are analyzed. The loading capacity of aerostatic bearings increases with the increase of groove structure depth,number,angle and pressure,and the number and pressure of groove structure have a significant effect on its loading capacity; the loading capacity of aerostatic bearings increases first and then decreases with the increase of groove structure radius; the depth,number and pressure of radial groove structure of aerostatic bearings angle,radius and pressure of supply gas affect the film thickness where the stiffness and its peak value of stiffness of aerostatic bearing. Radius,number of grooves and pressure of supply gas have significant influence on stiffness value. Angle and radius of groove structure have significant influence on the film thickness where the peak value of stiffness of aerostatic bearing lies. The static performance simulation lays a good theoretical foundation and technical support for the research and development of high loading capacity and high stiffness aerostatic bearing.
引文
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[22]张君安.高刚度空气静压轴承研究[D].兰州:西北工业大学,2006.
[2]李圣怡,戴一帆.超精密加工机床新进展[J].机械工程学报,2003,39(8):7-14.
[3] CHENG K,HUO D H. Micro cutting:fundamentals and Applications.Publisher:John Wiley&Sons. 2013.
[4] YU P L,CHEN X D,WANG X L,et al. Frequency-dependent nonlinear dynamic stiffness of aerostatic bearings subjected to external perturbations[J]. International Journal of Precision Engineering&Manufacturing,2015,16(8):1771-1777.
[5] TALUKDER H M,STOWELL T B. Pneumatic hammer in an externally pressurized orifice-compensated air journal bearing[J].Tribology International,2003,36(8):585-591.
[6] YE Y X,CHEN X D,HU Y T,et al. Effects of recess shapes on pneumatic hammering in aerostatic bearings[J]. Proceedings of the Institution of Mechanical Engineers,Part J:Journal of Engineering Tribology,2010,224(3):231-237.
[7]杜建军,刘暾,张国庆,等.带有圆周方向均压槽的静压气体止推轴承的气锤自激[J].润滑与密封,2010(01):9-12.
[8] MIYATAKE M,YOSHIMOTO S. Numerical investigation of static and dynamic characteristics of aerostatic thrust bearings with small Feed Holes[J]. Tribology International,2010(43):1353-1359.
[9] YU P L,JIANG W,WANG X L,et al. A newly developed r-theta-z motion stage for high-speed wafer inspection system[C]//Design,Manufacturing and Mechatronics:Proceedings of the International Conference on Design, Manufacturing and Mechatronics(ICDMM2016). 2017:652-662.
[10]FAN K,HO C,MOU J. Development of a multiple-microhole aerostatic air bearing system[J]. Journal of Micromechanics and Microengineering,2002,12(5):636-43.
[11]HASHIMOTO H,NAMBA T. Optimization of groove geometry for a thrust air bearing according to various objective functions[J].ASME Journal of Tribology,2009(131):041704.
[12]BELFORTE G,COLOMBO F,RAPARELLI T,TRIVELLA A,et al.Comparison between grooved and plane aerostatic thrust bearingsstatic performance[J]. Meccanica,2011,46(3):547-555.
[13]DU JJ,ZHANG GQ,LIU T,et al. Improvement on load performance of externally pressurized gas journal bearings by opening pressureequalizing grooves[J]. Tribology International,2014,73:156-166.
[14]YANG D,CHEN C,KANG Y,et al. Influence of orifices on stability of rotor-aerostatic bearing system[J]. Tribology International,2009,42(8):1206-1219.
[15]CHEN C,TSAI T,YANG D,et al. Inherent restriction on stability of rotor-aerostatic bearing system[J]. Industrial Lubrication and Tribology,2011,63(4):277-292.
[16]BOFFEY D A,WADDELL M,DEARDEN J K. A theoretical and experimental study into the steady-state performance characteristics of industrial air lubricated thrust bearings[J]. Tribology International,1985,18(4):229-233.
[17]CHEN X D,CHEN H,LUO X,et al. Air vortices and nano-vibration of aerostatic bearings[J]. Tribology Letters,2011,42(2):179-183.
[18]CHEN X D,HE X M. The Effect of the recess shape on performance analysis of the gas-iubricated bearing in optical lithography[J].Tribology International,2006,39(11):1336-1341.
[19]CHEN X D,YE Y X. Influences of the restrictor design parameter and operating conditions of aerostatic bearings on its dynamic characteristics[C]//IEEE/ASME International Conference on Advanced Intelligent Mechatronics. IEEE,2009:516-521.
[20]YOSHIMURA T, HANAFUSA T, KITAGAWA T, et al.Clarifications of the mechanism of nano-fluctuation of aerostatic thrust bearing with surface restriction[J]. Tribology International,2012,48(4):29-34.
[21]黄平.摩擦学教程[M].北京:高等教育出版社,2008:378-379
[22]张君安.高刚度空气静压轴承研究[D].兰州:西北工业大学,2006.