立体螺旋线圈微型电感耦合等离子体激发源激发测试研究
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摘要
介绍了一种电感耦合等离子体(Inductively Coupled Plasma,ICP)光谱激发源,该激发源采用微结构立体螺旋线圈。实验以氩气作为实验气体,采用以立体螺旋线圈作为微电路组件主体的微型ICP激发源研究了立体螺旋线圈激发氩气的最佳结构参数:匝数为4.5匝,线圈直径为5mm,铜线直径为1mm;测得了激发源在激发氩气时的工作条件:最佳射频功率为15～20W,最佳工作气压为50～100Pa,并分析了射频功率和工作气压对于氩气谱线强度的影响。采用射频功率为15W、氩气工作气压为60Pa对空气样品进行激发,检测到氮离子、氦离子等,由此表明立体螺旋线圈微型ICP激发源对空气样品具有激发能力,并且立体螺旋线圈微型ICP激发源比平面微型ICP激发源的激发能力更强。
A kind of excitation source for inductively coupled plasma(ICP)spectrometer was introduced.This excitation source adopted the microstructure three-dimensional spiral coil.Argon was selected as the experimental gas in experiments.A micro ICP excitation source based on three-dimensional spiral coil that is the main body of micro-circuit was studied.The optimum structural parameters for the excitation of argon in the three-dimensional spiral coil were obtained:the number of turns was 4.5,the diameter of coil was 5 mm,and the diameter of copper wire was 1 mm.The working conditions of excitation source were measured when argon was excited:the optimum radio-frequency power was 15-20 W,and the optimum gas pressure was 50-100 Pa.The influence of radio-frequency power and gas pressure on the spectral intensity of argon was investigated.The air samples were excited when the radio-frequency power was 15 W and the argon pressure was 60 Pa.Nitrogen ions and helium ions were detected,indicating that the micro ICP excitation source with three-dimensional spiral coil had excitation ability to air sample.Moreover,the micro ICP excitation source with three-dimensional spiral coil showed stronger excitation ability than that of plane micro ICP excitation source.
A kind of excitation source for inductively coupled plasma(ICP)spectrometer was introduced.This excitation source adopted the microstructure three-dimensional spiral coil.Argon was selected as the experimental gas in experiments.A micro ICP excitation source based on three-dimensional spiral coil that is the main body of micro-circuit was studied.The optimum structural parameters for the excitation of argon in the three-dimensional spiral coil were obtained:the number of turns was 4.5,the diameter of coil was 5 mm,and the diameter of copper wire was 1 mm.The working conditions of excitation source were measured when argon was excited:the optimum radio-frequency power was 15-20 W,and the optimum gas pressure was 50-100 Pa.The influence of radio-frequency power and gas pressure on the spectral intensity of argon was investigated.The air samples were excited when the radio-frequency power was 15 W and the argon pressure was 60 Pa.Nitrogen ions and helium ions were detected,indicating that the micro ICP excitation source with three-dimensional spiral coil had excitation ability to air sample.Moreover,the micro ICP excitation source with three-dimensional spiral coil showed stronger excitation ability than that of plane micro ICP excitation source.
引文
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[2]郑国经.电感耦合等离子体原子发射光谱分析仪器与方法的新进展[J].冶金分析,2014,34(11):1-10.ZHENG Guo-jing.New development of inductively coupled plasma atomic emission spectrometry instruments and methods[J].Metallurgical Analysis,2014,34(11):1-10.
[3]辛仁轩.电感耦合等离子体光谱仪器技术进展与现状[J].中国无机分析化学,2011,1(4):1-8.XIN Ren-xuan.Advances and current status of inductively coupled plasma spectrometer[J].Chinese Inorganic Analytical Chemistry,2011,1(4):1-8.
[4]王永清,马雯,王海舟,等.基于微电子机械系统微型光谱仪的研究与进展[J].冶金分析,2006,26(4):40-46.WANG Yong-qing,MA Wen,WANG Hai-zhou,et al.Research and development of micro-spectrometer based on microelectronic mechanical system[J].Metallurgical Analysis,2006,26(4):40-46.
[5]王永青,娄建忠,孙荣霞,等.基于平面螺旋电感的微型ICP激发源[J].光谱学与光谱分析,2008,28(11):2708-2712.WANG Yong-qing,LOU Jian-zhong,SUN Rong-xia,et al.Micro-ICP excitation source based on planar helical inductance[J].Spectroscopy and Spectral Analysis,2008,28(11):2708-2712.
[6]Hopwood J A.A micro-fabricated inductively-coupled plasma generator[J].Micro-electro-mechanical Systems,2000,9(3):309-313.
[7]Minayeva O B,Hopwood J A.Emission spectroscopy using a micro-fabricated inductively coupled plasmaonachip[J].J.Anal.At.Spectrom.,2002,17(9):1103-1107.
[8]WANG Yong-qing,PU Yong-ni,SUN Rong-xia,et al.A micro-fabricated inductively coupled plasma excitation source[J].Chinese Physics Letters,2008,25(1):202-204.
[9]王永清,李津娥,周颖昌,等.微型电感耦合等离子体激发源对气体样品定性分析探索[J].分析化学,2013,41(12):1923-1927.WANG Yong-qing,LI Jin-e,ZHOU Ying-chang,et al.Study on qualitative analysis of gas samples by microinductively coupled plasma excitation source[J].Analytical Chemistry,2013,41(12):1923-1927.
[10]李春丽.立体螺旋线圈微型ICP激发源研究[D].保定:河北大学,2009.
[11]王占友.微型ICP激发源进样器设计及激发能力测试研究[D].保定:河北大学,2010.