静电驱动MOEMS保险机构的设计与试验
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摘要
为了提高引信状态控制的安全性,增强其抵抗引信内、外强电磁干扰的能力,提出了一种应用于微小型引信安全系统的硅基微光机电保险机构。该机构采用光纤作为过程能量传输的载体,通过静电驱动方式实现对光纤光路错位与对准的控制,达到引信安全与解除保险的目的。设计了MOEMS保险机构的总体结构和耦合光路,并对它进行SOI+DRIE工艺设计和加工。通过开展静电微驱动器性能测试试验和光路性能测试试验得出,静电微驱动器能够实现130μm的大位移输出,MOEMS保险机构的解除保险时间和恢复保险时间分别为13 ms和5 ms,光能传输效率为46.1%。所设计的MOEMS保险机构能够满足功能要求,具备天然的抗电磁干扰能力,有效提高了引信的本征安全性。
To improve the state control safety of a fuze and enhance its ability to resist electromagnetic interference,this paper proposes a silicon-based Micro-Opto-Electro-Mechanical Systems(MOEMS)arming device used in the miniature safety and arming system of a fuze.The device adopts two optical fibers as the carriers of energy transmission,and their misalignment and alignment are controlled through an electrostatic driving mechanism,which determines the safety and arming state of the fuze.The overall structure and coupled optical path of the MOEMS arming device are designed,and subsequently,it is manufactured through a silicon-on-insulator deep reactive-ion etching process.Through experiments evaluating the performances of the electrostatic driving mechanism and optical path,it is concluded that the displacement output of the electrostatic driving mechanism can reach 130μm,the arming time and restore safety time are 13 ms and 5 ms,respectively,and the light energy transfer efficiency is 46.1%.The MOEMS arming device can satisfy the functional requirements of a fuze and it can have natural resistance to electromagnetic interference,which improves the intrinsic safety of the fuze.
To improve the state control safety of a fuze and enhance its ability to resist electromagnetic interference,this paper proposes a silicon-based Micro-Opto-Electro-Mechanical Systems(MOEMS)arming device used in the miniature safety and arming system of a fuze.The device adopts two optical fibers as the carriers of energy transmission,and their misalignment and alignment are controlled through an electrostatic driving mechanism,which determines the safety and arming state of the fuze.The overall structure and coupled optical path of the MOEMS arming device are designed,and subsequently,it is manufactured through a silicon-on-insulator deep reactive-ion etching process.Through experiments evaluating the performances of the electrostatic driving mechanism and optical path,it is concluded that the displacement output of the electrostatic driving mechanism can reach 130μm,the arming time and restore safety time are 13 ms and 5 ms,respectively,and the light energy transfer efficiency is 46.1%.The MOEMS arming device can satisfy the functional requirements of a fuze and it can have natural resistance to electromagnetic interference,which improves the intrinsic safety of the fuze.
引文
[1]张合.弹药发展对引信技术的需求与推动[J].兵器装备工程学报,2018(3):1-5.ZHANG H.Development of ammunition for the demand and promotion of fuze technology[J].Journal of Ordnance Equipment Engineering,2018(3):1-5.(in Chinese)
[2]步超,聂伟荣,徐安达,等.基于柔性止动的MEMS惯性开关冲击可靠性强化[J].光学精密工程,2017,25(1):123-132.BU CH,NIE W R,XU A D,et al..Shock reliability enhancement by flexible stop for MEMS inertial switch[J].Opt.Precision Eng.,2017,25(3):123-132.(in Chinese)
[3]刘民哲,王泰升,李和福,等.静电场辅助的微压印光刻技术[J].光学精密工程,2017,25(3):663-671.LIU M ZH,WANG T SH,LI H F,et al..Electrostatic field assisted micro imprint lithography technology[J].Opt.Precision Eng.,2017,25(3):663-671.(in Chinese)
[4]范卫民,刘双杰,王丽爽,等.MEMS加速度计在防空导弹引信中的应用[J].兵器装备工程学报,2018(3):75-82.FAN W M,LIU SH J,WANG L SH,et al..Application of MEMS accelerometer in antiaircraft missile fuze[J].Journal of Ordnance Equipment Engineering,2018(3):75-82.(in Chinese)
[5]马宝华.现代引信的控制功能及特征[J].探测与控制学报,2008,30(1):1-5.MA B H.Control function and characteristics of modern fuzes[J].Journal of Detection&Control,2008,30(1):1-5.(in Chinese)
[6]黄德雨,张世林.一种新型深水炸弹引信解除保险机构设计[J].兵器装备工程学报,2017(1):47-50.HUANG D Y,ZHANG SH L.Design of new type of depth bomb fuze arming mechanism[J].Journal of Ordnance Equipment Engineering,2017(1):47-50.(in Chinese)
[7]DEFENSE TECHNICAL INFORMATION CEN-TER.OSD RDT&E project justification(R2aexhibit)[EB/OL].http://www.ditc.mil/descriptivesum/Y2012/OSD/0603225D8Z.pdf,2012.02.
[8]MCENTIRE R S,BUTLER P.Fuzing&firing systems at sandia national laboratories[C].NDIAs 58rd Annual Fuze Conference,2014.
[9]JOHN D H.Evolving requirements for the use of logic devices in the implementation of safety features or an update to the DoD Fuze Engineering Standardization Working Groups(FESWG)technical manual for the use of logic devices in safety features[C].55th Annua1 Fuze Conference,2011.
[10]BEAMESDERFER M,CHEN S P,DEVOE D,et al..Analysis of an optical energy interrupter for MEMS based safety and arming systems[J].SPIE,1999,3880:101-111.
[11]单体强.基于MOEMS的引信电子安全系统状态控制技术研究[D].石家庄:军械工程学院,2016.SHAN T Q.Research on the State Control Technology of Fuze Electronic Safety System Based on MOEMS[D].Shijiazhuang:Ordance Engineering College,2016.(in Chinese)
[12]BLAIR P,MCMILLAN D,PODLECKI J,et al..MEMS hybridisation-bridging the free-space gap[J].SPIE,2001,4407:193-201.
[13]TI Q SH,XING L Q.Analysis and design of a high power laser interrupter for MEMS based safety and arming systems[J].Microsystem Technologies,2016,26:382-401.
[2]步超,聂伟荣,徐安达,等.基于柔性止动的MEMS惯性开关冲击可靠性强化[J].光学精密工程,2017,25(1):123-132.BU CH,NIE W R,XU A D,et al..Shock reliability enhancement by flexible stop for MEMS inertial switch[J].Opt.Precision Eng.,2017,25(3):123-132.(in Chinese)
[3]刘民哲,王泰升,李和福,等.静电场辅助的微压印光刻技术[J].光学精密工程,2017,25(3):663-671.LIU M ZH,WANG T SH,LI H F,et al..Electrostatic field assisted micro imprint lithography technology[J].Opt.Precision Eng.,2017,25(3):663-671.(in Chinese)
[4]范卫民,刘双杰,王丽爽,等.MEMS加速度计在防空导弹引信中的应用[J].兵器装备工程学报,2018(3):75-82.FAN W M,LIU SH J,WANG L SH,et al..Application of MEMS accelerometer in antiaircraft missile fuze[J].Journal of Ordnance Equipment Engineering,2018(3):75-82.(in Chinese)
[5]马宝华.现代引信的控制功能及特征[J].探测与控制学报,2008,30(1):1-5.MA B H.Control function and characteristics of modern fuzes[J].Journal of Detection&Control,2008,30(1):1-5.(in Chinese)
[6]黄德雨,张世林.一种新型深水炸弹引信解除保险机构设计[J].兵器装备工程学报,2017(1):47-50.HUANG D Y,ZHANG SH L.Design of new type of depth bomb fuze arming mechanism[J].Journal of Ordnance Equipment Engineering,2017(1):47-50.(in Chinese)
[7]DEFENSE TECHNICAL INFORMATION CEN-TER.OSD RDT&E project justification(R2aexhibit)[EB/OL].http://www.ditc.mil/descriptivesum/Y2012/OSD/0603225D8Z.pdf,2012.02.
[8]MCENTIRE R S,BUTLER P.Fuzing&firing systems at sandia national laboratories[C].NDIAs 58rd Annual Fuze Conference,2014.
[9]JOHN D H.Evolving requirements for the use of logic devices in the implementation of safety features or an update to the DoD Fuze Engineering Standardization Working Groups(FESWG)technical manual for the use of logic devices in safety features[C].55th Annua1 Fuze Conference,2011.
[10]BEAMESDERFER M,CHEN S P,DEVOE D,et al..Analysis of an optical energy interrupter for MEMS based safety and arming systems[J].SPIE,1999,3880:101-111.
[11]单体强.基于MOEMS的引信电子安全系统状态控制技术研究[D].石家庄:军械工程学院,2016.SHAN T Q.Research on the State Control Technology of Fuze Electronic Safety System Based on MOEMS[D].Shijiazhuang:Ordance Engineering College,2016.(in Chinese)
[12]BLAIR P,MCMILLAN D,PODLECKI J,et al..MEMS hybridisation-bridging the free-space gap[J].SPIE,2001,4407:193-201.
[13]TI Q SH,XING L Q.Analysis and design of a high power laser interrupter for MEMS based safety and arming systems[J].Microsystem Technologies,2016,26:382-401.