关节臂式坐标测量机热变形误差建模及补偿
|
摘要
建立了关节臂式坐标测量机(AACMM)结构参数热变形误差的运动学方程,研究了在实验温度约为20℃时关节臂式坐标测量机主要结构参数的温度变化规律和测量误差的变化趋势,建立了基于多元线性回归方法的热变形误差补偿模型并进行验证。实验结果表明:AACMM工作温度上升值最大可达3℃,测量误差随温度上升呈增大趋势,最大长度测量误差可达0. 115 mm。实现了AACMM热变形误差补偿,平均测量误差从0. 0715 mm降到0. 0335 mm,在一定程度上提高了AACMM的测量精度。
The kinematic equation of the thermal deformation error of the AACMM is established. The temperature variation and the measurement error variation trend of the main structural parameters of the AACMM are studied at the experimental temperature of about 20 ℃. A thermal deformation error compensation model based on multiple linear regression method is established and validated. The results show that the AACMM operating temperature rise up to 3 ℃,measurement error increases with temperature tends to increase, the maximum length measurement error of up to0. 115 mm. And the thermal deformation error compensation of AACMM is realized,the average length measurement error decreased from 0. 071 5 mm to 0. 033 5 mm. The measurement accuracy of the AACMM is improved to a certain extent.
The kinematic equation of the thermal deformation error of the AACMM is established. The temperature variation and the measurement error variation trend of the main structural parameters of the AACMM are studied at the experimental temperature of about 20 ℃. A thermal deformation error compensation model based on multiple linear regression method is established and validated. The results show that the AACMM operating temperature rise up to 3 ℃,measurement error increases with temperature tends to increase, the maximum length measurement error of up to0. 115 mm. And the thermal deformation error compensation of AACMM is realized,the average length measurement error decreased from 0. 071 5 mm to 0. 033 5 mm. The measurement accuracy of the AACMM is improved to a certain extent.
引文
[1]刘万里,曲兴华,闫勇刚.便携式三坐标测量臂校准和误差补偿[J].仪器仪表学报,2007,28(s1):86-89.Liu W L,Qu X H,Yan Y G. Calibration and error compensation of portable coordinate measuring arm[J].Chinese Journal of Scientific Instrument,2007(s1):86-89.
[2]陆艺,张培培,王学影,等.基于PSO-BP神经网络的关节臂式坐标测量机长度误差补偿[J].计量学报,2017,38(3):271-275.Lu Y,Zhang P P,WAng X Y,et al. AACMM Length Error Compensation Based on PSO-BP Neural Network[J]. Acta Metrologica Sinica,2017,38(3):271-275.
[3] Pati1o H,Gonzalez-Madruga D,Cuesta E,et al. Study of Virtual Features in the Performance of Coordinate Measuring Arms[J]. Procedia Engineering, 2014,69(1):433-441.
[4]王继虎,寇鹏,曹铁泽,等.关节臂坐标测量机的性能评价方法[J].计量学报,2008,29(z1):100-103.Wang J H,Kou P,Cao T Z,et al. Performance evaluation method of Articulated Arm Coordinate Measuring Machine[J]. Acta Metrologica Sinica2008,29(z1):100-103.
[5]胡毅,费业泰,程文涛.关节式坐标测量机热变形误差及修正[J].机械工程学报,2011,47(24):15-19.Hu Y,Fei Y T,Cheng W T. Thermal Deformation Error and Correction for Articulated Arm Coordinate-measuring Machines[J]. Journal of Mechanical Engineering,2011,47(24):15-19.
[6]费业泰,罗哉.精密技术中热变形误差影响的基本问题[J].纳米技术与精密工程,2003,1(1):79-84.Fei Y T,Luo Z. Basic Problems about Thermal Deformation Error in Precision Technology[J].Nanotechnology and Precision Engineering,2003,1(1):79-84.
[7]许静,祝连庆,潘志康,等.关节臂式坐标测量机转角误差的仿真研究[J].制造技术与机床,2013,(4):72-76.Xu J,Zhu L Q,Pan Z K,et al. The simulation research of the joint angles error of articulated arm coordinate measuring machine[J]. Manufacturing Technology,2013,(4):72-76.
[8]高贯斌,王文,林铿,等.基于RBF神经网络的关节转角误差补偿[J].机械工程学报,2010,46(12):20-24.Gao G B,Wang W,Lin K,et al. Error Compensation of Joint Angles Based on RBF Neural Networks[J]. Journal of Mechanical Engineering,2010,46(12):20-24.
[9]汪平平,费业泰,林慎旺.柔性三坐标测量臂精度的优化设计[J].应用科学学报,2006,24(4):410-414.Wang P P,Fei Y T,Lin S W. Accuracy Optimization Design of Flexible Three-Coordinate Measuring Arm[J]. Journal of Applied Sciences,2006,24(4):410-414.
[10] Santolaria J,Aguilar J J,Yagüe J A,et al. Kinematic parameter estimation technique for calibration and repeatability improvement of articulated arm coordinate measuring machines[J]. Precision Engineering,2008,32(4):251-268.
[11]温秀兰,崔俊宇,芮平,等.轴线测量与迭代补偿的机器人几何参数标定[J].计量学报,2018,39(4):449-454.Wen X L,Cui J Y,Rui P,et al. Robot Geometric Parameters Calibration Based on Axis Measurement and Iterative Compensation[J]. Acta Metrologica Sinica,2018,39(4):449-454..
[12]周爱国,周飞,吕刚,等.关节臂式坐标测量机的运动学与工作空间分析[J].机械传动,2015,39(1):48-51.Zhou A G, Zhou F, Lv G, et al. Kinematics and Workspace Analysis for Articulated Arm Coordinate Measuring Machine[J]. Journal of Mechanical Transmission,2015,39(1):48-51.
[13]吴斌,丁文,杨峰亭,等.非正交轴系全站仪坐标测量系统误差分析技术研究[J].计量学报,2017,38(6):661-666.Wu B,Ding W,Yang F T,et al. The Error Analysis of the Non-orthogonal Total Station Coordinate Measurement System[J]. Acta Metrologica Sinica,2017,38(6):661-666.
[14]陈晓晖,周钢,李中伟,等.柔性测量臂测头半径补偿算法研究[J].新技术新工艺,2009,(6):10-14.Chen X H,Zhou G,Li Z W,et al. Research on Probe Radius Compensation Procedure for Articulated Coordinate Measuring Machine[J]. New Technology&New Process,2009(6):10-14.
[15] Gonzálezmadruga D,Cuesta G E,Barreiro G J,et al.Application of a Force Sensor to Improve the Reliability of Measurement with Articulated Arm Coordinate Measuring Machines[J]. Sensors,2013,13(8):10430-10448.
[16]罗哉,刘晖,田焜,等.关节臂式坐标测量机测量力误差分析及补偿[J].仪器仪表学报,2017,38(5):1159-1167.Luo Z, Liu H, Tian K, et al. Error analysis and compensation of the measuring force of the articulated arm coordinate measuring machine[J]. Chinese Journal of Scientific Instrument,2017,38(5):1159-1167.
[17] Cuesta E,Telenti A,Pati1o H,et al. Sensor Prototype to Evaluate the Contact Force in Measuring with Coordinate Measuring Arms[J]. Sensors, 2015,15(6):13242-13257.
[18]林述温,吴昭同,严拱标.基于热变形反馈信息的三坐标测量机误差建模与补偿[J].机械工程学报,2001,37(12):70-74.Lin S W, Wu Z T, Yan G B. Modeling and Compensating for Error of CMM based on Feedback Information of Thermal Deformation[J]. Journal of Mechanical Engineering,2001,37(12):70-74.
[19]杨庆东,Bergh V D,Vanheck P,et al.三坐标测量机的热变形和神经网络误差补偿[J].计量学报,2000,21(2):113-118.Yang Q D,Bergh V D,Vanheck P,et al. The Thermal Deformations and Error Compensation Based on Neural Network on a CMM[J]. Acta Metrologica Sinica,2000,21(2):113-118.
[20]张馨龙,田光宇,黄勇.三轴正交机器人运动误差的建模与分析[J].计量学报,2017,38(4):396-401.Zhang X L, Tian G Y, Huang Y. Modeling and Analysis of Movement Error of Three Axis Orthogonal Robots[J]. Acta Metrologica Sinica,2017,38(4):396-401.
[21]钟莹,刘佳,李杏华.基于双环法回转体测量机在线温度误差补偿[J].中南大学学报(自然科学版),2016,47(9):2992-2996.Zhong Y, Liu J, Li X H. Online thermal error compensation of rotatory measuring machines based on bicyclic law[J]. Journal of Central South University(Science&Technology),2016,47(9):2992-2996.
[22]王学影,王华,陆艺,等.关节臂式坐标测量机参数标定方法[J].农业机械学报,2016,47(6):408-412.Wang X Y,Wang H,Lu Y,et al. Parameter Calibration Method of Articulated Arm Coordinate Measuring Machine[J]. Transactions of The Chinese Society of Agricultural Machinery,2016,47(6):408-412.
[23]程文涛,于连栋,费业泰.关节式坐标测量机参数识别算法研究[J].中国科学技术大学学报,2011,41(1):45-49.Cheng W T,Yu L D,Fei Y T. Study on parameter identification algorithms for articulated arm coordinate measuring machine[J]. Journal of University of Science and Technology of China,2011,41(1):45-49.
[24]罗哉,费业泰.形状因素对精密技术中零件热变形的影响[J].机械工程学报,2009,45(1):235-238.Luo Z,Fei Y T. Effect of Form Factors on Thermal Deformation of Mechanical Parts in Microtechnique[J].Journal of Mechanical Engineering,2009,45(1):235-238.
[25]费业泰.机械热变形理论及应用[M].北京:国防工业出版社,2009.
[26]李书和,杨世民,张奕群,等.机床热变形误差实时补偿技术[J].天津大学学报(自然科学与工程技术版),1998,31(6):810-814.Li S H,Yang S M,Zhang Y Q,et al. Real Time Compensation for Thermally Induced Errors of Machine Tools[J]. Journal of Tianjin University(Science and Technology),1998,31(6):810-814.
[27]费业泰.误差理论与数据处理[M].北京:机械工业出版社,2010.
[28]方开泰.实用回归分析[M].北京:科学出版社,1988.
[2]陆艺,张培培,王学影,等.基于PSO-BP神经网络的关节臂式坐标测量机长度误差补偿[J].计量学报,2017,38(3):271-275.Lu Y,Zhang P P,WAng X Y,et al. AACMM Length Error Compensation Based on PSO-BP Neural Network[J]. Acta Metrologica Sinica,2017,38(3):271-275.
[3] Pati1o H,Gonzalez-Madruga D,Cuesta E,et al. Study of Virtual Features in the Performance of Coordinate Measuring Arms[J]. Procedia Engineering, 2014,69(1):433-441.
[4]王继虎,寇鹏,曹铁泽,等.关节臂坐标测量机的性能评价方法[J].计量学报,2008,29(z1):100-103.Wang J H,Kou P,Cao T Z,et al. Performance evaluation method of Articulated Arm Coordinate Measuring Machine[J]. Acta Metrologica Sinica2008,29(z1):100-103.
[5]胡毅,费业泰,程文涛.关节式坐标测量机热变形误差及修正[J].机械工程学报,2011,47(24):15-19.Hu Y,Fei Y T,Cheng W T. Thermal Deformation Error and Correction for Articulated Arm Coordinate-measuring Machines[J]. Journal of Mechanical Engineering,2011,47(24):15-19.
[6]费业泰,罗哉.精密技术中热变形误差影响的基本问题[J].纳米技术与精密工程,2003,1(1):79-84.Fei Y T,Luo Z. Basic Problems about Thermal Deformation Error in Precision Technology[J].Nanotechnology and Precision Engineering,2003,1(1):79-84.
[7]许静,祝连庆,潘志康,等.关节臂式坐标测量机转角误差的仿真研究[J].制造技术与机床,2013,(4):72-76.Xu J,Zhu L Q,Pan Z K,et al. The simulation research of the joint angles error of articulated arm coordinate measuring machine[J]. Manufacturing Technology,2013,(4):72-76.
[8]高贯斌,王文,林铿,等.基于RBF神经网络的关节转角误差补偿[J].机械工程学报,2010,46(12):20-24.Gao G B,Wang W,Lin K,et al. Error Compensation of Joint Angles Based on RBF Neural Networks[J]. Journal of Mechanical Engineering,2010,46(12):20-24.
[9]汪平平,费业泰,林慎旺.柔性三坐标测量臂精度的优化设计[J].应用科学学报,2006,24(4):410-414.Wang P P,Fei Y T,Lin S W. Accuracy Optimization Design of Flexible Three-Coordinate Measuring Arm[J]. Journal of Applied Sciences,2006,24(4):410-414.
[10] Santolaria J,Aguilar J J,Yagüe J A,et al. Kinematic parameter estimation technique for calibration and repeatability improvement of articulated arm coordinate measuring machines[J]. Precision Engineering,2008,32(4):251-268.
[11]温秀兰,崔俊宇,芮平,等.轴线测量与迭代补偿的机器人几何参数标定[J].计量学报,2018,39(4):449-454.Wen X L,Cui J Y,Rui P,et al. Robot Geometric Parameters Calibration Based on Axis Measurement and Iterative Compensation[J]. Acta Metrologica Sinica,2018,39(4):449-454..
[12]周爱国,周飞,吕刚,等.关节臂式坐标测量机的运动学与工作空间分析[J].机械传动,2015,39(1):48-51.Zhou A G, Zhou F, Lv G, et al. Kinematics and Workspace Analysis for Articulated Arm Coordinate Measuring Machine[J]. Journal of Mechanical Transmission,2015,39(1):48-51.
[13]吴斌,丁文,杨峰亭,等.非正交轴系全站仪坐标测量系统误差分析技术研究[J].计量学报,2017,38(6):661-666.Wu B,Ding W,Yang F T,et al. The Error Analysis of the Non-orthogonal Total Station Coordinate Measurement System[J]. Acta Metrologica Sinica,2017,38(6):661-666.
[14]陈晓晖,周钢,李中伟,等.柔性测量臂测头半径补偿算法研究[J].新技术新工艺,2009,(6):10-14.Chen X H,Zhou G,Li Z W,et al. Research on Probe Radius Compensation Procedure for Articulated Coordinate Measuring Machine[J]. New Technology&New Process,2009(6):10-14.
[15] Gonzálezmadruga D,Cuesta G E,Barreiro G J,et al.Application of a Force Sensor to Improve the Reliability of Measurement with Articulated Arm Coordinate Measuring Machines[J]. Sensors,2013,13(8):10430-10448.
[16]罗哉,刘晖,田焜,等.关节臂式坐标测量机测量力误差分析及补偿[J].仪器仪表学报,2017,38(5):1159-1167.Luo Z, Liu H, Tian K, et al. Error analysis and compensation of the measuring force of the articulated arm coordinate measuring machine[J]. Chinese Journal of Scientific Instrument,2017,38(5):1159-1167.
[17] Cuesta E,Telenti A,Pati1o H,et al. Sensor Prototype to Evaluate the Contact Force in Measuring with Coordinate Measuring Arms[J]. Sensors, 2015,15(6):13242-13257.
[18]林述温,吴昭同,严拱标.基于热变形反馈信息的三坐标测量机误差建模与补偿[J].机械工程学报,2001,37(12):70-74.Lin S W, Wu Z T, Yan G B. Modeling and Compensating for Error of CMM based on Feedback Information of Thermal Deformation[J]. Journal of Mechanical Engineering,2001,37(12):70-74.
[19]杨庆东,Bergh V D,Vanheck P,et al.三坐标测量机的热变形和神经网络误差补偿[J].计量学报,2000,21(2):113-118.Yang Q D,Bergh V D,Vanheck P,et al. The Thermal Deformations and Error Compensation Based on Neural Network on a CMM[J]. Acta Metrologica Sinica,2000,21(2):113-118.
[20]张馨龙,田光宇,黄勇.三轴正交机器人运动误差的建模与分析[J].计量学报,2017,38(4):396-401.Zhang X L, Tian G Y, Huang Y. Modeling and Analysis of Movement Error of Three Axis Orthogonal Robots[J]. Acta Metrologica Sinica,2017,38(4):396-401.
[21]钟莹,刘佳,李杏华.基于双环法回转体测量机在线温度误差补偿[J].中南大学学报(自然科学版),2016,47(9):2992-2996.Zhong Y, Liu J, Li X H. Online thermal error compensation of rotatory measuring machines based on bicyclic law[J]. Journal of Central South University(Science&Technology),2016,47(9):2992-2996.
[22]王学影,王华,陆艺,等.关节臂式坐标测量机参数标定方法[J].农业机械学报,2016,47(6):408-412.Wang X Y,Wang H,Lu Y,et al. Parameter Calibration Method of Articulated Arm Coordinate Measuring Machine[J]. Transactions of The Chinese Society of Agricultural Machinery,2016,47(6):408-412.
[23]程文涛,于连栋,费业泰.关节式坐标测量机参数识别算法研究[J].中国科学技术大学学报,2011,41(1):45-49.Cheng W T,Yu L D,Fei Y T. Study on parameter identification algorithms for articulated arm coordinate measuring machine[J]. Journal of University of Science and Technology of China,2011,41(1):45-49.
[24]罗哉,费业泰.形状因素对精密技术中零件热变形的影响[J].机械工程学报,2009,45(1):235-238.Luo Z,Fei Y T. Effect of Form Factors on Thermal Deformation of Mechanical Parts in Microtechnique[J].Journal of Mechanical Engineering,2009,45(1):235-238.
[25]费业泰.机械热变形理论及应用[M].北京:国防工业出版社,2009.
[26]李书和,杨世民,张奕群,等.机床热变形误差实时补偿技术[J].天津大学学报(自然科学与工程技术版),1998,31(6):810-814.Li S H,Yang S M,Zhang Y Q,et al. Real Time Compensation for Thermally Induced Errors of Machine Tools[J]. Journal of Tianjin University(Science and Technology),1998,31(6):810-814.
[27]费业泰.误差理论与数据处理[M].北京:机械工业出版社,2010.
[28]方开泰.实用回归分析[M].北京:科学出版社,1988.