热屏结构对泡生法蓝宝石单晶炉功率影响研究
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摘要
蓝宝石晶体因优异的综合性能被广泛用于航空航天等高性能要求领域。泡生法是目前生产大直径蓝宝石单晶的主要方法,热场对生产工艺、产品质量和单晶炉功率具有重要影响;并将影响生产成本。本文对氧化锆及钼金属组合式热屏中氧化锆材料内置、外置及材料不同组合方式对泡生法蓝宝石单晶炉功率的影响进行研究,得到合理的热场结构;并与实际生产结果进行验证。结果表明:相比于传统的15层钼保温结构,加入氧化锆保温层会明显降低单晶炉能耗,其中氧化锆内置的热场结构对单晶炉能耗降低影响更为明显;随着氧化锆层由0增加至15层,单晶炉能耗显著降低,相比传统15层钼保温结构,15层氧化锆保温结构炉体功率降低了38%。
Sapphire crystal has widely used in the aerospace and other high performance requirements for the excellent comprehensive performance. Kyropoulos method is a main method for producing large diameter sapphire single crystal; the heat shield shows an important influence onthe power of sapphire single crystal furnace. The effect of sapphire single crystal furnace power containing of the zirconia material heat shield in internal and external materials with different proportions is studied in this paper.The design of the most reasonable structure of the thermal field is verified as comparison with the tests results. The results show that: compared to the traditional molybdenum insulation structure of 15-layers,adding zirconia insulation layers will reduce the single crystal furnace energy consumption. However,the built-in oxidation hopper structure presents an obvious effect on the energy consumption of single crystal furnace. With the increase of the number of zirconia layers,the energy consumption of the single crystal furnace is greatly reduced,15-layer zirconia insulation structure furnace power reduced by 38%compared with the traditional 15-layer molybdenum insulation structure.
Sapphire crystal has widely used in the aerospace and other high performance requirements for the excellent comprehensive performance. Kyropoulos method is a main method for producing large diameter sapphire single crystal; the heat shield shows an important influence onthe power of sapphire single crystal furnace. The effect of sapphire single crystal furnace power containing of the zirconia material heat shield in internal and external materials with different proportions is studied in this paper.The design of the most reasonable structure of the thermal field is verified as comparison with the tests results. The results show that: compared to the traditional molybdenum insulation structure of 15-layers,adding zirconia insulation layers will reduce the single crystal furnace energy consumption. However,the built-in oxidation hopper structure presents an obvious effect on the energy consumption of single crystal furnace. With the increase of the number of zirconia layers,the energy consumption of the single crystal furnace is greatly reduced,15-layer zirconia insulation structure furnace power reduced by 38%compared with the traditional 15-layer molybdenum insulation structure.
引文
[1]李留臣,冯金生.我国蓝宝石晶体生长技术的现状与发展趋势[J].人工晶体学报,2012,41(s1):221-226.
[2]陈晨,陈洪建,于海群,等.引晶直径对泡生法蓝宝石晶体位错及小角度晶界影响的研究[J].人工晶体学报,2013,42(12):2556-2561.
[3]范志刚,刘建军,肖昊苏,等.蓝宝石单晶的生长技术及应用研究进展[J].硅酸盐学报,2011,39(5):148-159.
[4]汪传勇,左然,Andrey Smirnov,et al.泡生法生长蓝宝石单晶的热场改进与模拟优化[J].人工晶体学报,2011,40(1):83-87.
[5]杨琳,左然,苏文佳.泡生法蓝宝石不同生长阶段热应力的数值模拟研究[J].材料导报,2012,26(22):134-137.
[6]郭余庆,葛楠楠,王凯,等.泡生法蓝宝石晶体不同保温屏材料的性能比较分析[J].人工晶体学报,2015,44(11):3333-3339.
[7]刘方方,左然,苏文佳.泡生法蓝宝石单晶不同生长阶段的数值模拟研究[J].人工晶体学报,2015,44(10):2898-2902.
[8]韩江山,左然,苏文佳,等.钼屏发射率对泡生法蓝宝石单晶生长影响的数值模拟研究[J].材料导报,2013,27(16):143-145.
[9]Chen C,Chen H J,Yan W B,et al.Effect of Crucible Shape on Heat Transport and Melt-crystal Interface during the Kyropoulos Sapphire Crystal Growth[J].Journal of Crystal Growth,2014,388(15):29-34.
[10]Demina S E,Bystrova E N,Lukanina M A,et al.Numerical Analysis of Sapphire Crystal Growth by the Kyropoulos Technique[J].Optical Materials,2007,30(1):62-65.
[11]王凯,郭余庆,胡章中,等.泡生法蓝宝石单晶炉热屏对热场的影响分析[J].人工晶体学报,2014,43(11):2799-2805.
[12]武红磊,郑瑞生,孟姝.用于晶体生长的氮化铝保温材料的研究[J].人工晶体学报,2009,38(3):761-766.
[2]陈晨,陈洪建,于海群,等.引晶直径对泡生法蓝宝石晶体位错及小角度晶界影响的研究[J].人工晶体学报,2013,42(12):2556-2561.
[3]范志刚,刘建军,肖昊苏,等.蓝宝石单晶的生长技术及应用研究进展[J].硅酸盐学报,2011,39(5):148-159.
[4]汪传勇,左然,Andrey Smirnov,et al.泡生法生长蓝宝石单晶的热场改进与模拟优化[J].人工晶体学报,2011,40(1):83-87.
[5]杨琳,左然,苏文佳.泡生法蓝宝石不同生长阶段热应力的数值模拟研究[J].材料导报,2012,26(22):134-137.
[6]郭余庆,葛楠楠,王凯,等.泡生法蓝宝石晶体不同保温屏材料的性能比较分析[J].人工晶体学报,2015,44(11):3333-3339.
[7]刘方方,左然,苏文佳.泡生法蓝宝石单晶不同生长阶段的数值模拟研究[J].人工晶体学报,2015,44(10):2898-2902.
[8]韩江山,左然,苏文佳,等.钼屏发射率对泡生法蓝宝石单晶生长影响的数值模拟研究[J].材料导报,2013,27(16):143-145.
[9]Chen C,Chen H J,Yan W B,et al.Effect of Crucible Shape on Heat Transport and Melt-crystal Interface during the Kyropoulos Sapphire Crystal Growth[J].Journal of Crystal Growth,2014,388(15):29-34.
[10]Demina S E,Bystrova E N,Lukanina M A,et al.Numerical Analysis of Sapphire Crystal Growth by the Kyropoulos Technique[J].Optical Materials,2007,30(1):62-65.
[11]王凯,郭余庆,胡章中,等.泡生法蓝宝石单晶炉热屏对热场的影响分析[J].人工晶体学报,2014,43(11):2799-2805.
[12]武红磊,郑瑞生,孟姝.用于晶体生长的氮化铝保温材料的研究[J].人工晶体学报,2009,38(3):761-766.
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