不同电极结构下介质阻挡放电电离特征的试验研究
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摘要
由于具有工作气压高、放电均匀等特点,大气压介质阻挡放电成为近年来非平衡等离子体领域研究的主要技术。电极结构是电离特性的主要影响因素之一,因此,通过电极结构优化来改善电离特性,对等离子体放电设备的应用领域拓展及性能优化至关重要。为改善大气压介质阻挡放电的电离特性,产生高活性、高均匀性的低温等离子体,基于自主设计的同轴介质阻挡放电装置进行了不同电极结构的电离试验及参数诊断;在一个标准大气压、放电频率11.4kHz、放电峰值电压5.4～13.4kV条件下进行了氩气电离试验;采用原子发射光谱法(AES)对氩等离子体谱线的激发、分光进行了检测分析;研究了螺纹电极、齿状电极、圆柱电极放电的特征光谱参数及外施电压对介质阻挡放电特征参数的影响。结果表明,齿状电极放电所形成等离子体的放电强度更大且放电效果显著,电子平均能量利用率低,电子激励温度弱于圆柱电极;圆柱电极放电强度较弱,但易形成大面积均匀性等离子体;大气压环境下电子激励温度不因外源电压的升高而单调递加,这表明通道内微放电的主要特征并不依赖于外施电压的供给,而是取决于电极结构、气体组份、气体压强;增大外施电压仅能增加单位时间内微放电的数量,经整合电子激励温度可达3 500K,符合典型的低温等离子体特征。
Because of high working pressure and uniform discharge,atmospheric dielectric barrier discharge(DBD)has become the main technology of non-equilibrium plasma discharge in recent years.Electrode structure isthe key factor in the ionization characteristics.Therefore,optimizing the electrode structure to improve ionization characteristics is very important for the development of plasma discharge equipment and the optimization of its performance.In order to enhance the ionization characteristics of dielectric barrier discharge at atmospheric pressure,high activity,low temperature plasma uniformity,coaxial dielectric barrier discharge device has been designed based on the ionization characteristics test and parameter diagnosis.Experimental researches on the effect of electrode structure of three grounding electrode on the spectral parameters were carried out by using photoelectric technology,and argon ionization tests were carried out under the conditions of a standard atmospheric pressure,discharge frequency 11.4kHz and varied discharge peak voltage increasing from 5.4to 13.4kV(with 1.0kV interval).Atomic emission spectroscopy(AES)was used to detect and analyze the excitation and splitting spectra of argon plasma,and the influence law and effect of electrode shape and applied voltage on the characteristic parameters of dielectric barrier discharge were obtained.The influence ofthe spectral parameters of threaded electrode,toothed electrode and cylindrical electrode,as well as the applied voltage on the characteristic parameters of DBD were studied.The results showed that the discharge intensity of the plasma of tooth shaped electrode is greater and the discharge effect is significant.The average energy utilization ratio of the electron is low,and the electron excitation temperature is weaker than that of cylindrical electrode.Under testing voltage conditions,the electron excitation temperature does not increase with the increase of applied voltage.It indicates that the main features of the micro discharge channel do not depend on the applied voltage supply,but depends on the electrode structure,gas composition and gas pressure.The increase in applied voltage only increases the number of micro discharge in unit time.The integration of electronic excitation temperature can reach up to 3 500 K,which accords with the typical characteristics of low temperature plasma.
Because of high working pressure and uniform discharge,atmospheric dielectric barrier discharge(DBD)has become the main technology of non-equilibrium plasma discharge in recent years.Electrode structure isthe key factor in the ionization characteristics.Therefore,optimizing the electrode structure to improve ionization characteristics is very important for the development of plasma discharge equipment and the optimization of its performance.In order to enhance the ionization characteristics of dielectric barrier discharge at atmospheric pressure,high activity,low temperature plasma uniformity,coaxial dielectric barrier discharge device has been designed based on the ionization characteristics test and parameter diagnosis.Experimental researches on the effect of electrode structure of three grounding electrode on the spectral parameters were carried out by using photoelectric technology,and argon ionization tests were carried out under the conditions of a standard atmospheric pressure,discharge frequency 11.4kHz and varied discharge peak voltage increasing from 5.4to 13.4kV(with 1.0kV interval).Atomic emission spectroscopy(AES)was used to detect and analyze the excitation and splitting spectra of argon plasma,and the influence law and effect of electrode shape and applied voltage on the characteristic parameters of dielectric barrier discharge were obtained.The influence ofthe spectral parameters of threaded electrode,toothed electrode and cylindrical electrode,as well as the applied voltage on the characteristic parameters of DBD were studied.The results showed that the discharge intensity of the plasma of tooth shaped electrode is greater and the discharge effect is significant.The average energy utilization ratio of the electron is low,and the electron excitation temperature is weaker than that of cylindrical electrode.Under testing voltage conditions,the electron excitation temperature does not increase with the increase of applied voltage.It indicates that the main features of the micro discharge channel do not depend on the applied voltage supply,but depends on the electrode structure,gas composition and gas pressure.The increase in applied voltage only increases the number of micro discharge in unit time.The integration of electronic excitation temperature can reach up to 3 500 K,which accords with the typical characteristics of low temperature plasma.
引文
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