摘要
为研究SF_6混合气体的放电参数特性,文中通过两项近似求解Boltzmann方程得到温度为300 K,不同混合比下SF_6/N_2、SF_6/CF_4的电子能量分布函数(EEDF)、折合电离系数α/N、折合吸附系数η/N和折合有效电离系数(α-η)/N,与其他文献结果对比,验证了该计算方法与放电参数的有效性。结果表明:SF_6/N_2、SF_6/CF_4两种混合气体都随折合场强E/N增大时,在较低电子能量区域的EEDF减小而在较高电子能量区域的EEDF增大,且SF_6/N_2混合气体在电子能量为3 e V附近存在EEDF的骤降现象,该现象与N_2的碰撞参数截面有关,而SF_6/CF_4混合气体不存在此现象;此外,SF_6/N_2、SF_6/CF_4两种混合气体随着折合场强E/N增大,折合电离系数α/N显著增大、折合吸附系数η/N减小,最终折合有效电离反应系数(α-η)/N也均随之增加。
To study the discharge parameter characteristics of SF_6 mixtures,with the"two-term"approximation to solve the Boltzmann equation,the discharge parameters of different mixing ratio of SF_6/N_2,SF_6/CF_4 mixtures can be acquired including the electron energies distribution function(EEDF),the equivalent ionization coefficient(α/N) and the equivalent attachment coefficient(η/N),as well as the equivalent effective ionization coefficient. The effectiveness of the calculation method and results are proved by comparing with other experimental data. Results show that with an increase in E/N,the EEDF of the two mixtures in low-energy region decreases,while the EEDF in the high-energy region increases. The EEDF of SF_6/N_2 gas mixtures frequently decreases at electron energy of3 e V. This phenomenon is related to the collision parameters of N_2,but don't exist in SF_6/CF_4 gas mixtures. When E/N is increased,the equivalent ionization coefficients of both mixtures have a significant increase with the attachment coefficient reduced,and the equivalent effective ionization coefficient also increases.
引文
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