微机械陀螺式加速度器的力学分析
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摘要
静电驱动电容检测微机械陀螺加速度器(POGA),是基于宏观的陀螺加速度器(PIGA)设计出来的高精度微机械加速度器.根据惯性力矩和陀螺效,得到静电驱动电容检测微机械陀螺加速度器的工作方程.利用电学、力学和力电转换的知识,详细分析了微机械陀螺加速度器各个部件的工作原理,并对其主要的梁结构单元的力学行为进行了分析.最后利用ANSYS软件,对设计出的简单微机械陀螺加速度器的陀螺转子结构进行了模态分析,得出其前模态振型和较高的两阶模态频率,证明POGA传感器将会在一定的频率范围内保持很好的线性度,为传感器的设计提供指导意义.
We present mechanical analysis on a pendulous oscillating gyroscopic accelerometer( POGA) which is designed according to three-dimensional macro pendulous integrating gyroscopic accelerometer( PIGA). The motion equation of a capacitance read-out micro-machined gyroscopic accelerometer under an electrostatic comb-driver is derived by using the moment of inertia and the gyroscopic effect.The mechanical behavior of the main beam element is discussed basing on all motion equations of elements in the system. By using ANSYS,modal analysis on the POGA is done numerically and the vibration modes and corresponding frequencies are obtained. Our result shows that the POGA sensor has a good linearity within a specific frequency range,which is important for the design of the sensor.
We present mechanical analysis on a pendulous oscillating gyroscopic accelerometer( POGA) which is designed according to three-dimensional macro pendulous integrating gyroscopic accelerometer( PIGA). The motion equation of a capacitance read-out micro-machined gyroscopic accelerometer under an electrostatic comb-driver is derived by using the moment of inertia and the gyroscopic effect.The mechanical behavior of the main beam element is discussed basing on all motion equations of elements in the system. By using ANSYS,modal analysis on the POGA is done numerically and the vibration modes and corresponding frequencies are obtained. Our result shows that the POGA sensor has a good linearity within a specific frequency range,which is important for the design of the sensor.
引文
[1]乔永辉,曾鸣,苏宝库.离心机旋转运动对陀螺加速度计测试精度影响研究[J].航空精密制造技术,2006,4(4):21-24.
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[6]J T KAISER,A MARKG.A pendulous oscillating gyroscopic accelerometer fabricated using deep-reactive ion etching[J].Journal of Microelectromechanical Systems[DB].2003,12(1):21-22.
[7]刁方印.静电驱动电容检测微机械陀螺式加速度器的力学分析[D].广州:暨南大学,2009.
[8]肖尚彬,董秋泉.陀螺力学[M].北京:人民教育出版社,1981.
[9]葛松华.关于非平行板电容器电容计算的讨论[J].物理与工程,2003,13(5):16-17.
[10]吴家龙.弹性力学[M].北京:高等教育出版社,2004:227-231.
[11]单祖辉.材料力学[M].北京:高等教育出版社,2005.
[12]吴起星,黄威然,马宏伟.盾构机总推力反算滚刀法向破岩力探讨[J].暨南大学学报:自然科学版,2010,31(5):485-488.
[13]TU Ching Chen,KUOHAO Fanchiang,LIU ChengHsien.Rotary electrostatic micromirror switches using wafer-scale processing and assembly[J].Microsyst Technol,2006:1099-1108.
[14]龙驭球,包世华.结构力学教程(Ⅱ)[M].北京:高等教育出版社,2005.
[2]SUN Bohua,ZHANG B,KHAN T.Modeling and formulation of a novel microoptoelectromechanical gyroscope[J].Journal of Nanomaterials,Volume 2008,Article ID429168,9 pages http://dx.doi.org/10.1155/2008/429168
[3]刘畅.微机电系统基础[M].黄庆安,译.北京:机械工业出版社,2007.
[4]DONATO CARDARELLI,MICHELE SAPUPPO.Oscillating Gyroscope,US5915275A[P].22 Jun 1999,https://docs.google.com/viewer?url=patentimages.storage.googleapis.com/pdfs/us5915275.pdf.
[5]格雷戈里T A科瓦奇.微传感器与微执行器全书[M].张文栋,等译.北京:科学出版社,2003.
[6]J T KAISER,A MARKG.A pendulous oscillating gyroscopic accelerometer fabricated using deep-reactive ion etching[J].Journal of Microelectromechanical Systems[DB].2003,12(1):21-22.
[7]刁方印.静电驱动电容检测微机械陀螺式加速度器的力学分析[D].广州:暨南大学,2009.
[8]肖尚彬,董秋泉.陀螺力学[M].北京:人民教育出版社,1981.
[9]葛松华.关于非平行板电容器电容计算的讨论[J].物理与工程,2003,13(5):16-17.
[10]吴家龙.弹性力学[M].北京:高等教育出版社,2004:227-231.
[11]单祖辉.材料力学[M].北京:高等教育出版社,2005.
[12]吴起星,黄威然,马宏伟.盾构机总推力反算滚刀法向破岩力探讨[J].暨南大学学报:自然科学版,2010,31(5):485-488.
[13]TU Ching Chen,KUOHAO Fanchiang,LIU ChengHsien.Rotary electrostatic micromirror switches using wafer-scale processing and assembly[J].Microsyst Technol,2006:1099-1108.
[14]龙驭球,包世华.结构力学教程(Ⅱ)[M].北京:高等教育出版社,2005.