多电极石英力敏谐振器的力敏特性及稳定性研究
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摘要
在分析石英晶片受力作用时晶片内应力分布的基础上,设计了一种多电极新型石英力敏谐振器及信号处理电路。在室温及大气状态下对设计的力敏谐振器同时进行激励时,各对电极对应的谐振器的力-频特性线性度及频率稳定性良好。将各谐振器的频率互作差频,再作叠加处理后,输出的频率信号的力-频系数达到2 951.8Hz/N,线性相关度为0.999 7,频率稳定性可达10-10数量级。
A new multi-electrode quartz resonator and signal processing circuit is designed on the basis of analyzing the stress distribution in the wafer when the quartz wafer is subjected to force.When a plurality of resonators are simultaneously excited at room temperature and atmospheric conditions,the resonator's linearity of force-frequency characteristics and frequency stability corresponding to the respective electrodes are excellent.After the interaction frequency difference and superposition processing to the frequency of each resonator,the force-frequency coefficient of the output frequency signal can reach 2 951.8 Hz/N,the linear correlation is 0.999 7,and the frequency stability can reach the magnitude of 10-10.
A new multi-electrode quartz resonator and signal processing circuit is designed on the basis of analyzing the stress distribution in the wafer when the quartz wafer is subjected to force.When a plurality of resonators are simultaneously excited at room temperature and atmospheric conditions,the resonator's linearity of force-frequency characteristics and frequency stability corresponding to the respective electrodes are excellent.After the interaction frequency difference and superposition processing to the frequency of each resonator,the force-frequency coefficient of the output frequency signal can reach 2 951.8 Hz/N,the linear correlation is 0.999 7,and the frequency stability can reach the magnitude of 10-10.
引文
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[2]郑峰.51单片机典型应用开发范例大全[M].北京:中国铁道出版社,2011.
[3]孙荣,周涛.谐振器晶片结构应力的失效分析及减少影响的措施[J].中国高新技术企业,2013(5):80-82.SUN Rong,ZHOU Tao.The failure analysis of resonator chip structure stress and the measures to reduce impact[J].High-tech Enterprises of China,2013(5):80-82.
[4]张世超,尚建国.石英晶体谐振器的仿真分析[J].西安航空技术高等专科学校学报,2011,29(3):52-54.ZHAO Shichao,SHANG Jianguo.The simulation analysis of quartz crystal resonator[J].Journal of Xi’an Aeronautical Technical College,2011,29(3):52-54.
[5]田文杰,路峻岭,刘玲玲,等.切变振动型石英晶体谐振器的特点及其应用[J].压电与声光,2006,28(2):150-152.TIAN Wenjie,LU Junling,LIU Lingling,et al.The characteristics and application of the vibrating quartz crystal resonator[J].Piezoelectrics&Acoustooptics,2006,28(2):150-152.
[6]吴荣兴,李继亮,于兰珍,等.石英晶体板高频振动的三维有限元分析[J].压电与声光,2014,36(5):821-824.WU Rongxing,LI Jiliang,YU Lanzhen,et al.Threedimensional finite element analysis of high frequency vibration of quartz crystal plate[J].Piezoelectrics&Acoustooptics,2014,36(5):821-824.
[7]魏海潮,张记龙,陈友华,等.弹光调制器压电晶体阻抗匹配特性的研究[J].压电与声光,2013,35(2):185-187.WEI Haichao,ZHANG Jilong,CHEN Youhua,et al.Study on impedance matching characteristics of piezoelectric crystal with light modulator[J].Piezoelectrics&Acoustooptics,2013,35(2):185-187.
[8]宋新菊,李东,王艳林,等.用于石英晶体-频率测试相位检测技术研究[J].传感器世界,2006(11):14-16.SONG Xinju,LI Dong,WANG Yanlin,et al.Study on phase detection technology for quartz crystal-frequency test[J].Sensor World,2006(11):14-16.