微喷砂处理对TiN/MT-TiCN/Al_2O_3/TiOCN多层涂层摩擦磨损性能的影响
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摘要
目的采用微喷砂的方法对TiN/MT-TiCN/Al_2O_3/TiOCN多层涂层进行后处理,研究其对涂层摩擦磨损性能的影响。方法采用化学气相沉积(CVD)的方法在硬质合金基体上沉积多层涂层,并进行微喷砂处理。利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)表征涂层的显微组织结构,利用显微维氏硬度计、纳米压痕仪、X射线应力仪以及划痕仪测试涂层的硬度、应力和结合力,采用往复式多功能摩擦磨损试验机(UMT-3T)研究涂层的摩擦磨损性能。结果 TiN/MT-TiCN/Al_2O_3/TiOCN多层涂层经过微喷砂处理后,表层粗糙度改善,显微硬度提高21.4%,顶层TiOCN的纳米压痕硬度由微喷砂前的36.31 GPa增大至39.32 GPa,摩擦系数降低,磨损体积由微喷砂前的1.95×10~(-3) mm~3增大至2.26×10~(-3) mm~3,磨损率由微喷砂前的1.81×10~(-6) mm~3/(N·m)增大至2.10×10~(-6) mm~3/(N·m)。微喷砂后处理在提高TiOCN顶层硬度的同时,也减薄了TiOCN顶层的厚度,并使得TiOCN层表面出现明显的裂纹,Al_2O_3层的抗塑性变形能力变弱,从而使顶层TiOCN被提早磨穿,Al_2O_3层产生大量磨屑,加剧了磨损,微喷砂后涂层表现出较差的耐磨性。结论微喷砂处理可以有效改善涂层力学性能。但在涂层较薄的情况下,微喷砂处理造成的裂纹和减薄现象会使其整体耐磨损性能下降。
The work aims to treat the TiN/MT-TiCN/Al_2O_3/Ti OCN multilayer coatings through micro-blasting and study the effect of micro-blasting post-treatment on the friction and wear properties of coatings.Multilayer coatings were deposited on cemented carbides by chemical vapor deposition(CVD).X-ray diffraction(XRD)and scanning electron microscopy(SEM)were applied to characterize the microstructure of coatings.The hardness,stress and adhesion strength of coatings were tested by microhardness tester,nanoindentation,X-ray stress tester and scratch tester.The friction and wear properties of coatings were investigated by UMT-3MT tribometer.After micro-blasting treatment,the roughness of TiN/MT-TiCN/Al_2O_3/TiOCN multilayer coating was improved,the micro-hardness increased by 21.4%and the nano-hardness of TiOCN layer increased from 36.31 GPa to 39.32GPa.Meanwhile,the friction coefficient decreased,the wear volume increased from 1.95×10~(-3) mm~3 to 2.26×10~(-3) mm~3 and the wear rate increased from 1.81×10~(-6) mm~3/(N·m)to 2.10×10~(-6) mm~3/(N·m).Micro-blasting post-treatment improved the hardness of TiOCN top layer,but reduced the thickness of TiOCN top layer.Moreover,many obvious cracks were formed on the surface of TiOCN layer,and the plastic resistance of Al_2O_3 layer became weak.Therefore,the TiOCN layer was worn out in advance,and a large amount of debris were produced on the Al_2O_3 layer.Consequently,the wear was aggravated and the coating showed poor wear property after micro-blasting.The micro-blasting treatment can effectively improve the mechanical properties of TiN/MT-TiCN/Al_2O_3/TiOCN coatings.However,the cracking and thinning caused by micro-blasting treatment reduce the wear resistance of the TiN/MT-TiCN/Al_2O_3/TiOCN multilayer coatings when coatings are thinner.
The work aims to treat the TiN/MT-TiCN/Al_2O_3/Ti OCN multilayer coatings through micro-blasting and study the effect of micro-blasting post-treatment on the friction and wear properties of coatings.Multilayer coatings were deposited on cemented carbides by chemical vapor deposition(CVD).X-ray diffraction(XRD)and scanning electron microscopy(SEM)were applied to characterize the microstructure of coatings.The hardness,stress and adhesion strength of coatings were tested by microhardness tester,nanoindentation,X-ray stress tester and scratch tester.The friction and wear properties of coatings were investigated by UMT-3MT tribometer.After micro-blasting treatment,the roughness of TiN/MT-TiCN/Al_2O_3/TiOCN multilayer coating was improved,the micro-hardness increased by 21.4%and the nano-hardness of TiOCN layer increased from 36.31 GPa to 39.32GPa.Meanwhile,the friction coefficient decreased,the wear volume increased from 1.95×10~(-3) mm~3 to 2.26×10~(-3) mm~3 and the wear rate increased from 1.81×10~(-6) mm~3/(N·m)to 2.10×10~(-6) mm~3/(N·m).Micro-blasting post-treatment improved the hardness of TiOCN top layer,but reduced the thickness of TiOCN top layer.Moreover,many obvious cracks were formed on the surface of TiOCN layer,and the plastic resistance of Al_2O_3 layer became weak.Therefore,the TiOCN layer was worn out in advance,and a large amount of debris were produced on the Al_2O_3 layer.Consequently,the wear was aggravated and the coating showed poor wear property after micro-blasting.The micro-blasting treatment can effectively improve the mechanical properties of TiN/MT-TiCN/Al_2O_3/TiOCN coatings.However,the cracking and thinning caused by micro-blasting treatment reduce the wear resistance of the TiN/MT-TiCN/Al_2O_3/TiOCN multilayer coatings when coatings are thinner.
引文
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[2]QIN Y F,ZHU L Y,HE J N,et al.Microstructure and tribological properties of TiCN-Al2O3 composite coatings fabricated by reactive plasma spraying[J].Vacuum,2018,147:149-157.
[3]ANIRBAN N,CHATTOPADHYAY A K.Investigation on flank wear mechanism of CVD and PVD hard coatings in high speed dry turning of low and high carbon steel[J].Wear,2018,396-397:98-106.
[4]HSIEH J H,WU W,LI C,et al.Deposition and characterization of Ti(C,N,O)coatings by unbalanced magnetron sputtering[J].Surface and coatings technology,2003,163-164:233-237.
[5]HSIEH J H,LI C,WU W,et al.Synthesis of Ti(C,N,O)coatings by unbalanced magnetron sputtering[J].Journal of materials processing technology,2003,140:662-667.
[6]RUPPIA S,LARSSON A.deposition,microstructure,and properties of nanocrystalline Ti(C,O,N)coatings[J].Journal of vacuum science&technology A:Vacuum,surfaces and films,2003,21:66-75.
[7]CZETTL C,MITTERER C,MüHLE U,et al.CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings[J].Surface and coatings technology,2011,206:1691-1697.
[8]ZHU Li-hui,ZHANG Yu-meng,HU Tao,et al.Oxidation resistance and thermal stability of Ti(C,N)and Ti(C,N,O)coatings deposited by chemical vapor deposition[J].International journal of refractory metals and hard materials,2016,54:295-303.
[9]陈响明.硬质合金刀具TiN-TiCN-Al2O3-TiN多层复合涂层制备与组织性能研究[D].长沙:中南大学,2012.CHEN Xiang-ming.Preparation,microstructure and properties of Ti N-Ti CN-Al2O3-TiN multilayers on cemented carbide cutting tools[D].Changsha:Central South University,2012.
[10]LIU Can-yu,LIU Zhan-qiang,WANG Bing.Modification of surface morphology to enhance tribological properties for CVD coated cutting tools through wet micro-blasting post-process[J].Ceramics international,2018,44:3430-3439.
[11]TANAKA S,SHICROCHI T,NISHIZAWA H,et al.Micro-blasting effect on fracture resistance of PVD-AlTiNcoated cemented carbide cutting tools[J].Surface and coatings technology,2016,308:337-340.
[12]SCHALK N,MITTERER C,CZETTL C,et al.Dry-blasting ofα-Al2O3 andκ-Al2O3 CVD hard coatings:Friction behavior and thermal stress relaxation[J].Tribology letters,2013,52(1):147-154.
[13]BOUZAKIS K D,GERARDIS S,SKOEDARIS G,et al.Effect of dry micro-blasting on PVD-film properties,cutting edge geometry and tool life in milling[J].Surface and coating technology,2009,204(6-7):1081-1086.
[14]KLOCKE F,GORGELS C,BOUZAKIS E,et al.Tool life increase of coated carbide tools by micro blasting[J].Production engineering,2009,3:453-459.
[15]WENSINK H,ELWENSPOEK M C.A closer look at the ductile-brittle transition in solid particle erosion[J].Wear,2002,253:1035-1043.
[16]刘灿宇.TiN/Al2O3/TiCN和Al2O3/TiCN涂层刀具湿式微喷砂后处理工艺[D].济南:山东大学,2018.LIU Can-yu.Wet micro-blasting post-processing on TiN/Al2O3/TiCN and Al2O3/TiCN coated tools[D].Jinan:Shandong University,2018.
[17]BOUZAKIS K D,TSOUKNIDAS A,SKOEDARIS G,et al.Optimization of wet or dry micro-blasting on PVDfilms by various Al2O3 grain sizes for improving the coated tools'cutting performance[J].Tribology in industry,2011,33(2):49-56.
[18]PHILIPPON D,GODINHO V,NAGY P M.Endurance of TiAlSiN coatings:Effect of Si and bias on wear and adhesion[J].Wear,2011,270:541-549.
[19]赵嫚,王少龙,江南,等.Ti N层微观结构对CVDTiC-TiCN-TiN多层涂层耐磨性能的影响[J].材料导报,2016,30(10):51-56.ZHAO Man,WANG Shao-long,JIANG Nan,et al.Effect of microstructure of TiN layer on wear resistance of CVDTiC-TiCN-TiN multilayer coating[J].Materials review,2016,30(10):51-56.